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Commit 679b6136 authored by David Lanzendörfer's avatar David Lanzendörfer
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Updating the docs

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......@@ -25,7 +25,7 @@ The LTO thickness has been chosen to be 200nm which is thin enough for the polys
\subsection{Oxide deposition}
Now we need to deposit the silicon dioxide which will provide a spacer between the non active area and the polysilicon gate layer. within the non-active areas.
Now we need to deposit the silicon dioxide which will provide a spacer between the non active area and the polysilicon gate layer within the non-active areas.
\begin{figure}[H]
\centering
......
......@@ -19,5 +19,6 @@ After we've implanted the Boron and Phosphorus, we will drive the whole thing in
oxide needed to deposit the nitride for the side wall spacers later on in \autoref{nitride_spacers_deposition}.
\newpage
\input{process_hightech_implant_stop.tex}
\input{process_hightech_nimplant.tex}
\input{process_hightech_pimplant.tex}
......@@ -15,3 +15,5 @@ The cross section as well as the top view of the targeted geometry are shown in
The N-well will serve us as an island of N-doped substrate within the P-doped basis substrate.
The dopant dose will be $2.33\times10^{12}cm^{-2}$ at 70 keV.
After the implantation we perform a drive-in in inert atmosphere at $1050\degreesC$ for 30 minutes.
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