diff --git a/process_steps/process_hightech/process_hightech_fox.tex b/process_steps/process_hightech/process_hightech_fox.tex index 7d71b06d8546887ad7d6a1ea1a947191102f98e3..c43c6b88022be019e4b601f8fae80a7f4cc24618 100644 --- a/process_steps/process_hightech/process_hightech_fox.tex +++ b/process_steps/process_hightech/process_hightech_fox.tex @@ -25,7 +25,7 @@ The LTO thickness has been chosen to be 200nm which is thin enough for the polys \subsection{Oxide deposition} -Now we need to deposit the silicon dioxide which will provide a spacer between the non active area and the polysilicon gate layer. within the non-active areas. +Now we need to deposit the silicon dioxide which will provide a spacer between the non active area and the polysilicon gate layer within the non-active areas. \begin{figure}[H] \centering diff --git a/process_steps/process_hightech/process_hightech_junctions.tex b/process_steps/process_hightech/process_hightech_junctions.tex index 03612d61f4562506b81d289f27d06794aa3c775c..a4230beaba110f0a02ec229b4bc10a1395c224f1 100644 --- a/process_steps/process_hightech/process_hightech_junctions.tex +++ b/process_steps/process_hightech/process_hightech_junctions.tex @@ -19,5 +19,6 @@ After we've implanted the Boron and Phosphorus, we will drive the whole thing in oxide needed to deposit the nitride for the side wall spacers later on in \autoref{nitride_spacers_deposition}. \newpage +\input{process_hightech_implant_stop.tex} \input{process_hightech_nimplant.tex} \input{process_hightech_pimplant.tex} diff --git a/process_steps/process_hightech/process_hightech_nbase.tex b/process_steps/process_hightech/process_hightech_nbase.tex index 124fe0c91955641f0277f83399065d0fad29e3f6..94bc108ca31f56b3d35e5dda2df797681ea88fc8 100644 --- a/process_steps/process_hightech/process_hightech_nbase.tex +++ b/process_steps/process_hightech/process_hightech_nbase.tex @@ -15,3 +15,5 @@ The cross section as well as the top view of the targeted geometry are shown in The N-well will serve us as an island of N-doped substrate within the P-doped basis substrate. The dopant dose will be $2.33\times10^{12}cm^{-2}$ at 70 keV. + +After the implantation we perform a drive-in in inert atmosphere at $1050\degreesC$ for 30 minutes. diff --git a/process_steps/process_hightech/process_hightech_steps.pdf b/process_steps/process_hightech/process_hightech_steps.pdf index 1e83c95f0dde8f4a75442b1e8751da1d804587de..8a82233c71d37cc4d5c40ef27853384ace868914 100644 Binary files a/process_steps/process_hightech/process_hightech_steps.pdf and b/process_steps/process_hightech/process_hightech_steps.pdf differ