Fixing cleaning after STI CMP
According to Michael, the wafers need to be put into RCA after CMPing in wetstation B3
Showing
- process_implementations/hkust/equipment.yaml 5 additions, 0 deletionsprocess_implementations/hkust/equipment.yaml
- process_implementations/hkust/steps_dry.pdf 0 additions, 0 deletionsprocess_implementations/hkust/steps_dry.pdf
- process_implementations/hkust/steps_dry.yaml 3 additions, 3 deletionsprocess_implementations/hkust/steps_dry.yaml
- process_implementations/hkust/steps_wet.pdf 0 additions, 0 deletionsprocess_implementations/hkust/steps_wet.pdf
Loading
Please register or sign in to comment