diff --git a/process_implementations/hkust/equipment.yaml b/process_implementations/hkust/equipment.yaml index 71d0ebb0dc51f54ab1abca60098f4be95b28718d..15f2f0d10f501d56800e7ad98ab1d51d44ddb233 100644 --- a/process_implementations/hkust/equipment.yaml +++ b/process_implementations/hkust/equipment.yaml @@ -23,6 +23,11 @@ WET-B1: { equipment: "B1: Sulfuric cleaning", level: clean, } +WET-B3: { + location: P2-01000, + equipment: "B3:Decontamination", + level: clean, +} #(spin drier) SRD-B: { location: P2-01000, diff --git a/process_implementations/hkust/steps_dry.pdf b/process_implementations/hkust/steps_dry.pdf index c0f092c5d22b790a0144f062e31923a768660751..ffc16923c96234df38d348395c6a283b6051d98a 100644 Binary files a/process_implementations/hkust/steps_dry.pdf and b/process_implementations/hkust/steps_dry.pdf differ diff --git a/process_implementations/hkust/steps_dry.yaml b/process_implementations/hkust/steps_dry.yaml index 13a8d1f5fe9b529e84d535c6b594186ee7466afd..dd8a0f6cdc5b14c12753dd322012cd0c1e6fd78f 100644 --- a/process_implementations/hkust/steps_dry.yaml +++ b/process_implementations/hkust/steps_dry.yaml @@ -52,9 +52,9 @@ requirement: "10 minutes, PT rpm: 40, chuck rpm: 25, back pressure: 2 psi", }, { - equipment: WET-G1, - process: "Ammonium cleaning", - requirement: "70\\degreesC, 10 minutes", + equipment: WET-B3, + process: "RCA-1", + requirement: "10 minutes", }, { equipment: WET-C1, diff --git a/process_implementations/hkust/steps_wet.pdf b/process_implementations/hkust/steps_wet.pdf index aef0e2d3af7c82aa9f8c64250f2dd2e706e10437..0522e1b0c6ecc3f92b1c82d763fbb528a4f43be6 100644 Binary files a/process_implementations/hkust/steps_wet.pdf and b/process_implementations/hkust/steps_wet.pdf differ