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Manufacturing
Manufacturing Process
Commits
bf71122e
Commit
bf71122e
authored
5 years ago
by
David Lanzendörfer
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Updatin design rules
parent
780e5010
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process_design_rules/process_design_rules.pdf
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process_design_rules/process_design_rules.pdf
process_design_rules/process_design_rules.tex
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77 additions, 7 deletions
process_design_rules/process_design_rules.tex
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7 deletions
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process_design_rules/process_design_rules.tex
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...
...
@@ -238,13 +238,36 @@
\subsection
{
ACTIVE Rules
}
\label
{
design
_
rules
_
active
_
rules
}
\begin{center}
\begin{tikzpicture}
[scale=(.33)]
\filldraw
[fill=pwell]
(0, 0) rectangle (10, 10);
\filldraw
[fill=nwell]
(20, 0) rectangle (30, 10);
\filldraw
[fill=gray]
(2,2) rectangle (4,5);
\filldraw
[fill=gray]
(6,2) rectangle (8,8);
\filldraw
[fill=gray]
(22,2) rectangle (24,8);
\filldraw
[fill=gray]
(26,2) rectangle (28,5);
\node
at(2,10.5)
{
PWELL
}
;
\node
at(22,10.5)
{
NWELL
}
;
\node
at(7,8.5)
{
ACTIVE
}
;
\draw
[<->]
(0, 4) -- ( 2, 4) node[near start, below]
{
2.3.3
}
;
\draw
[<->]
(4, 4) -- ( 6, 4) node[near start, below]
{
2.3.2
}
;
\draw
[<->]
(8, 4) -- (10, 4) node[near start, below]
{
2.3.3
}
;
\draw
[<->]
(2, 0) -- ( 2, 2) node[near start, below]
{
2.3.3
}
;
\draw
[<->]
(6, 0) -- ( 6, 2) node[near start, below]
{
2.3.3
}
;
\draw
[<->]
(22, 3) -- (24, 3) node[near start, below]
{
2.3.1
}
;
\draw
[<->]
(27, 2) -- (27, 5) node[near start, below]
{
2.3.1
}
;
\end{tikzpicture}
\end{center}
\begin{flushleft}
\begin{tabular}
{
c l c
}
2.3.1
&
Minimum Width of ACTIVE is
&
$
3
\lambda
$
.
\\
2.3.1
&
Minimum Width
/Height
of ACTIVE is
&
$
3
\lambda
$
.
\\
2.3.2
&
Minimum Spacing to ACTIVE is
&
$
3
\lambda
$
.
\\
2.3.3
&
Minimum Source/Drain surround by PWELL/NWELL is
&
$
6
\lambda
$
.
\\
2.3.4
&
Minimum Substrate/NWELL contact sourround by PWELL/NWELL is
&
$
3
\lambda
$
.
\\
2.3.5
&
Minimum Spacing to ACTIVE of opposite type is
&
$
4
\lambda
$
.
\\
2.3.3
&
Minimum ACTIVE surround by PWELL/NWELL/PBASE/NBASE is
&
$
6
\lambda
$
.
\\
\end{tabular}
\end{flushleft}
...
...
@@ -255,7 +278,7 @@
\filldraw
[fill=poly]
(0, 0) rectangle ++(2, 12);
\draw
[<->]
(0, 6) -- (2, 6) node[near start, above]
{
2.4.1
}
;
\draw
[<->]
(2, 4) -- (4, 4) node[near start, above]
{
2.4.3
}
;
\filldraw
[fill=
nitride
]
(7, 0) rectangle ++(5, 12);
\filldraw
[fill=
gray
]
(7, 0) rectangle ++(5, 12);
\draw
[<->]
(10, 5) -- (10, 7) node[near start, left]
{
2.4.2
}
;
\draw
[<->]
(9, 0) -- (9, 3) node[near start, left]
{
2.4.5
}
;
\filldraw
[fill=poly]
(4, 5) -- ++(10, 0) -- ++(0, -2) -- ++(-8, 0) -- ++(0, -3) -- ++(-2, 0) -- ++(0, 5);
...
...
@@ -278,18 +301,65 @@
\end{tabular}
\end{flushleft}
\subsection
{
NPLUS/PPLUS Rules
}
\label
{
design
_
rules
_
plus
_
rules
}
\subsection
{
NPLUS/PPLUS (nimplant/pimplant) Rules
}
\label
{
design
_
rules
_
plus
_
rules
}
\begin{center}
\begin{tikzpicture}
[scale=(.33)]
\filldraw
[fill=pwell]
(0, 0) rectangle (10, 10);
\filldraw
[fill=nwell]
(20, 0) rectangle (30, 10);
\filldraw
[fill=gray, opacity=0.5]
(2,2) rectangle (4,5);
\filldraw
[fill=gray, opacity=0.5]
(6,2) rectangle (8,8);
\filldraw
[fill=gray, opacity=0.5]
(22,2) rectangle (24,8);
\filldraw
[fill=gray, opacity=0.5]
(26,2) rectangle (28,5);
\filldraw
[fill=poly]
(5,4) rectangle (11,6);
\filldraw
[fill=poly]
(19,4) rectangle (25,6);
\filldraw
[fill=red, opacity=0.5]
(1.75,1.75) rectangle (4.25,5.25);
\filldraw
[fill=blue, opacity=0.5]
(5.75,1.75) rectangle (8.25,8.25);
\filldraw
[fill=red, opacity=0.5]
(21.75,1.75) rectangle (24.25,8.25);
\filldraw
[fill=blue, opacity=0.5]
(25.75,1.75) rectangle (28.25,5.25);
\node
at(2,10.5)
{
PWELL
}
;
\node
at(22,10.5)
{
NWELL
}
;
\node
at(7,8.75)
{
NPLUS
}
;
\node
at(23,8.75)
{
PPLUS
}
;
\draw
[<->]
(4.25,2) -- (5.75,2) node[near start, below]
{
2.5.3
}
;
\draw
[<->]
(8.25,2) -- (21.75,2) node[near start, above]
{
2.5.3
}
;
\draw
[<->]
(8.25,6) -- (8.25,8.25) node[near start, right]
{
2.5.1
}
;
\draw
[<->]
(24,2) -- (24.25,2) node[near start, below]
{
2.5.2
}
;
\end{tikzpicture}
\end{center}
\begin{flushleft}
\begin{tabular}
{
c l c
}
2.5.1
&
Minimum Spacing to POLY is
&
$
3
\lambda
$
.
\\
2.5.2
&
Minimum Overlap to ACTIVE is
&
$
2
\lambda
$
.
\\
2.5.3
&
Minimum
Overlap to CONTACT
is
&
$
1
\lambda
$
.
\\
2.5.3
&
Minimum
Spacing to NPLUS/PPLUS of opposite type
is
&
$
4
\lambda
$
.
\\
\end{tabular}
\end{flushleft}
\subsection
{
CONTACT Rules
}
\label
{
design
_
rules
_
contact
_
rules
}
\begin{center}
\begin{tikzpicture}
[scale=(.33)]
\filldraw
[fill=nwell]
(0, 0) rectangle (10, 10);
\filldraw
[fill=gray, opacity=0.5]
(2,2) rectangle (4,5);
\filldraw
[fill=gray, opacity=0.5]
(6,2) rectangle (8,8);
\filldraw
[fill=poly]
(5,4) rectangle (11,6);
\filldraw
[fill=blue, opacity=0.5]
(1.75,1.75) rectangle (4.25,5.25);
\filldraw
[fill=red, opacity=0.5]
(5.75,1.75) rectangle (8.25,8.25);
\filldraw
[fill=gray]
(2.5, 3) rectangle ++(1, 1);
\filldraw
[fill=gray]
(6.5, 2.5) rectangle ++(1, 1);
\filldraw
[fill=gray]
(6.5, 6.5) rectangle ++(1, 1);
\filldraw
[fill=gray]
(9.5, 4.5) rectangle ++(1, 1);
\end{tikzpicture}
\end{center}
\begin{flushleft}
\begin{tabular}
{
c l c
}
2.6.1
&
Exact Width/Height of CONTACT is
&
$
2
\lambda
\times
2
\lambda
$
.
\\
...
...
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