Updating STI process
According to the input from some fellow process engineers I've now removed the serious issue of irreversible crystal damage during CMPing without nitride CMP end stop
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- process_steps/process_hightech/process_hightech_shallow_trench_isolation.tex 93 additions, 14 deletions...ss_hightech/process_hightech_shallow_trench_isolation.tex
- process_steps/process_hightech/tikz_process_steps/contsts.tex 4 additions, 3 deletions...ess_steps/process_hightech/tikz_process_steps/contsts.tex
- process_steps/process_hightech/tikz_process_steps/sti.cmp.a.tex 1 addition, 0 deletions...s_steps/process_hightech/tikz_process_steps/sti.cmp.a.tex
- process_steps/process_hightech/tikz_process_steps/sti.cmp.b.tex 40 additions, 0 deletions...s_steps/process_hightech/tikz_process_steps/sti.cmp.b.tex
- process_steps/process_hightech/tikz_process_steps/sti.cmp.c.tex 15 additions, 0 deletions...s_steps/process_hightech/tikz_process_steps/sti.cmp.c.tex
- process_steps/process_hightech/tikz_process_steps/sti.end_stop.a.tex 2 additions, 0 deletions...ps/process_hightech/tikz_process_steps/sti.end_stop.a.tex
- process_steps/process_hightech/tikz_process_steps/sti.end_stop.b.tex 5 additions, 0 deletions...ps/process_hightech/tikz_process_steps/sti.end_stop.b.tex
- process_steps/process_hightech/tikz_process_steps/sti.liner_oxide.a.tex 27 additions, 0 deletions...process_hightech/tikz_process_steps/sti.liner_oxide.a.tex
- process_steps/process_hightech/tikz_process_steps/sti.liner_oxide.b.tex 8 additions, 0 deletions...process_hightech/tikz_process_steps/sti.liner_oxide.b.tex
- process_steps/process_hightech/tikz_process_steps/sti.lto.a.tex 1 addition, 0 deletions...s_steps/process_hightech/tikz_process_steps/sti.lto.a.tex
- process_steps/process_hightech/tikz_process_steps/sti.lto.b.tex 3 additions, 23 deletions...s_steps/process_hightech/tikz_process_steps/sti.lto.b.tex
- process_steps/process_hightech/tikz_process_steps/sti.patterning.b.tex 0 additions, 8 deletions.../process_hightech/tikz_process_steps/sti.patterning.b.tex
- process_steps/process_hightech/tikz_process_steps/sti.silicon_etch.a.tex 7 additions, 1 deletion...rocess_hightech/tikz_process_steps/sti.silicon_etch.a.tex
- process_steps/process_hightech/tikz_process_steps/sti.silicon_etch.b.tex 20 additions, 5 deletions...rocess_hightech/tikz_process_steps/sti.silicon_etch.b.tex
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