diff --git a/scmos.tech b/scmos.tech
index 6655aea968cf2546111fce5b73873225181eeed7..7fa2348755a46a30217962cecd0356bf8b2a3fe2 100644
--- a/scmos.tech
+++ b/scmos.tech
@@ -12,10 +12,21 @@ end
+
+
+
+
version
- version 0.1
- description "LibreSilicon process (1um)"
-# 382 "scmos.tech.out"
+ version 8.2.8
+# 374 "scmos.tech.out"
+ description "MOSIS Scalable CMOS Technology for Standard Rules"
+
+
+
+
+
+
+
end
planes
@@ -69,6 +80,9 @@ types
active doubleptransistor,pfloating-gate,pfloatg,pfg,pffet
active highvoltntransistor,hvnfet,hnfet
active highvoltptransistor,hvpfet,hpfet
+ active rntransistor,rnfet
+ active rptransistor,rpfet
+
@@ -223,14 +237,20 @@ styles
pdop 4
pdop 38
+ rnfet 6
+ rpfet 6
snfet 6
spfet 6
nbsfet 6
pbsfet 6
nfet 6
nfet 7
+ rnfet 6
+ rnfet 7
pfet 8
pfet 9
+ rpfet 8
+ rpfet 9
enfet 6
enfet 30
@@ -379,8 +399,13 @@ styles
error_s 42
error_ps 42
res poly_resist poly_resist_stripes
- rnd ndiffusion poly_resist_stripes
- rpd pdiffusion poly_resist_stripes
+
+ rnd ntransistor_stripes
+ rpd ptransistor_stripes
+
+ rnfet polysilicon poly_resist_stripes
+ rpfet polysilicon ptransistor_stripes
+
plpdiff polysilicon ptransistor_stripes
plndiff polysilicon ntransistor_stripes
pbpoly polysilicon ptransistor_stripes
@@ -531,7 +556,7 @@ compose
paint ndiff hnwell hpdiff
paint psd hnwell hnsd
paint psc hnwell hnsc
-# 905 "scmos.tech.out"
+# 919 "scmos.tech.out"
paint nfet cwell wcap
paint poly wcap wcap
paint ndiff wcap wcap
@@ -628,41 +653,1079 @@ connect
pad m3,m3c/m3
end
-# 1010 "scmos.tech.out"
+# 1024 "scmos.tech.out"
cifoutput
+# 1035 "scmos.tech.out"
+# 1 "cif_template/objs/CIFout" 1
+style lambda=1.0(gen)
+ scalefactor 100 50
+ layer CWC cwell
+ calma 59 1
+ layer CWN nwell
+ bloat-or pbase,pbc/act * 600
+ bloat-or pdiff,pdc/a,pfet,epfet,pffet * 500
+ bloat-or nsd,nsc/a * 300
+ bloat-or clc/a * 100
+ or col
+ grow 300
+ shrink 300
+ calma 42 1
+ layer CWP pwell
+ bloat-or ndiff,ndc/a,nfet,enfet,nffet * 500
+ bloat-or psd,psc/a * 300
+ and-not CWC
+ shrink 300
+ grow 300
+ grow 300
+ shrink 300
+ calma 41 1
+ layer CMS m2,m2c/m2,m3c/m2,pad
+ labels m2
+ calma 51 1
+ layer CMF pad
+ grow 100
+ or pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,nbdc/m1,m1,m2c/m1,gc
+ labels pdc,ndc,psc,nsc,pbnc,pbpc,nbnc,nbpc,hpdc,hndc,hpsc,hnsc,pc,ec,capc,nbdc,m1,m2c,gc
+ calma 49 1
+ layer CPG cap,cc
+ or poly,pc/a,nfet,pfet,wcap,snfet,spfet,pbpoly,nbpoly,cap,capc/a,nffet,pffet
+ labels poly,nfet,pfet
+ calma 46 1
+ layer CAA clc
+ grow 100
+ or em,emc,col,pbase,pbc
+ or ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a
+ or hndiff,hndc/a,hpdiff,hpdc/a
+ or bd,nbd
+
+ or open,pstop
+
+ labels ndiff,pdiff
+ calma 43 1
+
+ layer CX col,clc
+ grow 100
+ calma 60 1
+ layer CVA pad
+ shrink 500
+
+ or open
+
+ calma 50 1
+ layer CVA m2c
+ squares 100 200 300
+ calma 50 1
+ layer CEL poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet
+ calma 56 1
+ layer CCE capc,ec
+ squares 200
+ calma 55 1
+
+
+ layer CCC gc
+ calma 48 1
+
+ layer CCA ndc,pdc,clc,emc,pbc,nbdc
+ squares 200
+
+ or open
+
+ calma 48 1
+ layer CCA nsc,psc
+ squares 200
+ calma 48 1
+ layer CCP pc
+ squares 200
+ calma 47 1
+ layer CBA emc,emit
+ grow 400
+ bloat-or pbc * 100
+ or pbase
+ calma 58 1
+
+ templayer XTN clc
+ grow 100
+ or em,emc,col
+ grow 200
+ bloat-or ndiff,ndc/a,ndop * 200 psd,psc/a,pdiff,pdc/a,pdop 0
+ bloat-or nbd,nbdc,wcap * 200
+ grow 100
+ shrink 100
+ shrink 50
+ grow 50
+ templayer XTP pbc
+ grow 100
+ bloat-or pdiff,pdc/a,pdop * 200 nsd,nsc/a,ndiff,ndc/a,ndop 0
+ grow 100
+ shrink 100
+ shrink 50
+ grow 50
+ layer CSN clc
+ grow 100
+ or em,emc,col
+ grow 200
+ bloat-or ndiff,ndc/a * 200 psd,psc/a 0
+ bloat-or nfet,enfet,nffet * 200 ndiff 300 psd,psc/a 0
+ bloat-or nsd,nsc/a * 200 pdiff,pdc/a 0
+ bloat-or nbd,nbdc,wcap * 200
+ bloat-or ndop * 200 psd,psc/a,pdiff,pdc/a,pdop 0
+ grow 100
+ shrink 100
+ shrink 50
+ grow 50
+ and-not XTP
+ calma 45 1
+ layer CSP pbc
+ grow 100
+ bloat-or pdiff,pdc/a * 200 nsd,nsc/a 0
+ bloat-or pfet,epfet,pffet * 200 pdiff 300 nsd,nsc/a 0
+ bloat-or psd,psc/a * 200 ndiff,ndc/a 0
+ bloat-or pdop * 200 nsd,nsc/a,ndiff,ndc/a,ndop 0
+ grow 100
+ shrink 100
+ shrink 50
+ grow 50
+
+ bloat-min pstop * 200 open 0
+
+ and-not XTN
+ and-not CSN
+ calma 44 1
+ layer CCD bd,nbd
+ grow 200
+ calma 57 1
+ layer COP open
+ calma 23 1
+ layer CPS pstop
+ calma 24 1
+ layer COG pad
+ shrink 600
+ or glass
+
+ or open
+
+ labels pad
+ calma 52 1
+ layer XP pad
+ shrink 600
+ calma 26 1
+
+ render CWN 12 -0.2 0.2
+ render CAA 2 -0.15 0.15
+ render CPG 1 0.025 0.05
+ render CEL 14 0.1 0.05
+ render CCC 19 0.0 0.2
+ render CCA 19 0.0 0.2
+ render CCP 19 0.075 0.125
+ render CMF 20 0.2 0.05
+ render CVA 19 0.25 0.05
+ render CMS 21 0.3 0.05
+style lambda=1.0(nwell)
+ scalefactor 100 50
+ layer CWC cwell
+ calma 59 1
+ layer CWN nwell
+ bloat-or pbase,pbc/a * 600
+ bloat-or pdiff,pdc/a,pfet,epfet,pffet * 500
+ bloat-or nsd,nsc/a * 300
+ bloat-or clc/a * 100
+ or col
+ grow 300
+ shrink 300
+ calma 42 1
+ layer CMS m2,m2c/m2,m3c/m2,pad
+ labels m2
+ calma 51 1
+ layer CMF pad
+ grow 100
+ or pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,nbdc/m1,m1,m2c/m1,gc
+ labels pdc,ndc,psc,nsc,pbnc,pbpc,nbnc,nbpc,hpdc,hndc,hpsc,hnsc,pc,ec,capc,nbdc,m1,m2c,gc
+ calma 49 1
+ layer CPG cap,cc
+ or poly,pc/a,nfet,pfet,wcap,snfet,spfet,pbpoly,nbpoly,cap,capc/a,nffet,pffet
+ labels poly,nfet,pfet
+ calma 46 1
+ layer CAA clc
+ grow 100
+ or em,emc,col,pbase,pbc
+ or ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a
+ or hndiff,hndc/a,hpdiff,hpdc/a
+ or bd,nbd
+
+ or open,pstop
+
+ labels ndiff,pdiff
+ calma 43 1
+
+ layer CX col,clc
+ grow 100
+ calma 60 1
+ layer CVA pad
+ shrink 500
+
+ or open
+
+ calma 50 1
+ layer CVA m2c
+ squares 100 200 300
+ calma 50 1
+ layer CEL poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet
+ calma 56 1
+ layer CCE capc,ec
+ squares 200
+ calma 55 1
+
+
+ layer CCC gc
+ calma 63 1
+
+ layer CCA ndc,pdc,clc,emc,pbc,nbdc
+ squares 200
+
+ or open
+
+ calma 48 1
+ layer CCA nsc,psc
+ squares 200
+ calma 48 1
+ layer CCP pc
+ squares 200
+ calma 47 1
+ layer CBA emc,emit
+ grow 400
+ bloat-or pbc * 100
+ or pbase
+ calma 58 1
+
+ templayer XTN clc
+ grow 100
+ or em,emc,col
+ grow 200
+ bloat-or ndiff,ndc/a * 200 psd,psc/a 0
+ bloat-or nbd,nbdc,ndop,wcap * 200
+ templayer XTP pbc
+ grow 100
+ bloat-or pdiff,pdc/a * 200 nsd,nsc/a 0
+ layer CSN clc
+ grow 100
+ or emc,emit,col
+ grow 200
+ bloat-or ndiff,ndc/a * 200 psd,psc/a 0
+ bloat-or nfet,enfet,nffet * 200 ndiff 300 psd,psc/a 0
+ bloat-or nsd,nsc/a * 200 pdiff,pdc/a 0
+ bloat-or nbd,nbdc,ndop,wcap * 200
+ grow 100
+ shrink 100
+ shrink 50
+ grow 50
+ and-not XTP
+ calma 45 1
+ layer CSP pbc
+ grow 100
+ bloat-or pdiff,pdc/a * 200 nsd,nsc/a 0
+ bloat-or pfet,epfet,pffet * 200 pdiff 300 nsd,nsc/a 0
+ bloat-or psd,psc/a * 200 ndiff,ndc/a 0
+ bloat-or pdop * 200
+ grow 100
+ shrink 100
+ shrink 50
+ grow 50
+
+ bloat-min pstop * 200 open 0
+
+ and-not XTN
+ and-not CSN
+ calma 44 1
+ layer CCD bd,nbd
+ grow 200
+ calma 57 1
+ layer COP open
+ calma 23 1
+ layer CPS pstop
+ calma 24 1
+ layer COG pad
+ shrink 600
+ or glass
+
+ or open
+
+ labels pad
+ calma 52 1
+ layer XP pad
+ shrink 600
+ calma 26 1
+
+
+
+
+
+
+
+style lambda=1.0(pwell)
+ scalefactor 100 50
+ layer CWP pwell
+ bloat-or ndiff,ndc/a,nfet,enfet,nffet * 500
+ bloat-or psd,psc/a * 300
+ grow 300
+ shrink 300
+ calma 41 1
+ layer CMS m2,m2c/m2,m3c/m2,pad
+ labels m2
+ calma 51 1
+ layer CMF pad
+ grow 100
+ or pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,nbdc/m1,m1,m2c/m1,gc
+ labels pdc,ndc,psc,nsc,pbnc,pbpc,nbnc,nbpc,hpdc,hndc,hpsc,hnsc,pc,ec,capc,nbdc,m1,m2c,gc
+ calma 49 1
+ layer CPG cap,cc
+ or poly,pc/a,nfet,pfet,wcap,snfet,spfet,pbpoly,nbpoly,cap,capc/a,nffet,pffet
+ labels poly,nfet,pfet
+ calma 46 1
+
+ layer CAA clc
+ grow 100
+ or em,emc,col
+ or ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a
+ or hndiff,hndc/a,hpdiff,hpdc/a
+
+ or open,pstop
+
+ labels ndiff,pdiff
+ calma 43 1
+
+ layer CX col,clc
+ grow 100
+ calma 60 1
+ layer CVA pad
+ shrink 500
+
+ or open
+
+ calma 50 1
+ layer CVA m2c
+ squares 100 200 300
+ calma 50 1
+ layer CEL poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet
+ calma 56 1
+ layer CCE capc,ec
+ squares 200
+ calma 55 1
+
+
+ layer CCC gc
+ calma 63 1
+
+ layer CCA ndc,pdc,clc,emc,pbc
+ squares 200
+
+ or open
+
+ calma 48 1
+ layer CCA nsc,psc
+ squares 200
+ calma 48 1
+ layer CCP pc
+ squares 200
+ calma 47 1
+ layer CBA emc,emit
+ grow 400
+ bloat-or pbc * 100
+ or pbase
+ calma 58 1
+
+ templayer XTN
+ bloat-or ndiff,ndc/a * 200 psd,psc/a 0
+ templayer XTP
+ bloat-or pdiff,pdc/a * 200 nsd,nsc/a 0
+ layer CSP
+ bloat-or pdiff,pdc/a * 200 nsd,nsc/a 0
+ bloat-or pfet,epfet,pffet * 200 pdiff 300 nsd,nsc/a 0
+ bloat-or psd,psc/a * 200 ndiff,ndc/a 0
+ bloat-or pdop * 200
+ grow 100
+ shrink 100
+ shrink 50
+ grow 50
+
+ bloat-min pstop * 200 open 0
+
+ and-not XTN
+ calma 44 1
+ layer CSN
+ bloat-or ndiff,ndc/a * 200 psd,psc/a 0
+ bloat-or nfet,enfet,nffet * 200 ndiff 300 psd,psc/a 0
+ bloat-or nsd,nsc/a * 200 pdiff,pdc/a 0
+ bloat-or ndop * 200
+ grow 100
+ shrink 100
+ shrink 50
+ grow 50
+ and-not XTP
+ and-not CSP
+ calma 45 1
+ layer COP open
+ calma 23 1
+ layer CPS pstop
+ calma 24 1
+ layer COG pad
+ shrink 600
+ or glass
+
+ or open
+
+ labels pad
+ calma 52 1
+ layer XP pad
+ shrink 600
+ calma 26 1
+
+
+
+
+
+
+style lambda=0.8(gen)
+ scalefactor 80 40
+ layer CVN hnwell
+ bloat-or hpdiff,hpdc/a,hpfet * 560
+ bloat-or hnsd,hnsc/a * 240
+ calma 40 1
+ layer CVP hpwell
+ bloat-or hndiff,hndc/a,hnfet * 560
+ bloat-or hpsd,hpsc/a * 240
+ calma 39 1
+ layer CWN nwell
+ bloat-or pbase,pbc/act * 480
+ bloat-or pdiff,pdc/a,pfet,epfet,pffet * 400
+ bloat-or nsd,nsc/a * 240
+ bloat-or clc/a * 80
+ or col
+ grow 240
+ shrink 240
+ calma 42 1
+ layer CWP pwell
+ bloat-or ndiff,ndc/a,nfet,enfet,nffet * 400
+ bloat-or psd,psc/a * 240
+ grow 240
+ shrink 240
+ calma 41 1
+ layer CMS m2,m2c/m2,m3c/m2,pad
+ labels m2
+ calma 51 1
+ layer CMF pad
+ grow 80
+ or pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,nbdc/m1,m1,m2c/m1,gc
+ labels pdc,ndc,psc,nsc,pbnc,pbpc,nbnc,nbpc,hpdc,hndc,hpsc,hnsc,pc,ec,capc,nbdc,m1,m2c,gc
+ calma 49 1
+ layer CPG cap,cc
+ or poly,pc/a,nfet,pfet,wcap,snfet,spfet,pbpoly,nbpoly,cap,capc/a,nffet,pffet
+ labels poly,nfet,pfet
+ calma 46 1
+ layer CAA clc
+ grow 80
+ or em,emc,col
+ or ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a
+ or hndiff,hndc/a,hpdiff,hpdc/a,hnsd,hnsc/a,hpsd,hpsc/a,hnfet,hpfet
+
+ or open,pstop
+
+ labels ndiff,pdiff
+ calma 43 1
+
+
+ layer CX col,clc
+ grow 80
+
+
+ calma 60 1
+ layer CVA pad
+ shrink 560
+
+ or open
+
+ calma 50 1
+ layer CVA m2c
+ squares 80 160 240
+ calma 50 1
+ layer CEL poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet
+ calma 56 1
+ layer CCE capc,ec
+ squares 160
+ calma 55 1
+
+
+ layer CCC gc
+ calma 63 1
+
+ layer CCA ndc,pdc,clc,emc,pbc
+ squares 160
+
+ or open
+
+ calma 48 1
+ layer CCA nsc,psc
+ squares 160
+ calma 48 1
+ layer CCA hndc,hpdc
+ squares 160 160 160
+ calma 48 1
+ layer CCA hnsc,hpsc
+ squares 160 160 160
+ calma 48 1
+ layer CCP pc
+ squares 160
+ calma 47 1
+ layer CBA emc,emit
+ grow 320
+ bloat-or pbc * 80
+ or pbase
+ calma 58 1
+
+ templayer XTN clc
+ grow 80
+ or em,emc,col
+ grow 160
+ bloat-or ndiff,ndc/a * 160 psd,psc/a 0
+ bloat-or hndiff,hndc/a * 160 hpsd,hpsc/a 0
+ grow 80
+ shrink 80
+ shrink 40
+ grow 40
+ templayer XTP pbc
+ grow 80
+ bloat-or pdiff,pdc/a * 160 nsd,nsc/a 0
+ bloat-or hpdiff,hpdc/a * 160 hnsd,hnsc/a 0
+ grow 80
+ shrink 80
+ shrink 40
+ grow 40
+ layer CSN clc
+ grow 80
+ or em,emc,col
+ grow 160
+ bloat-or ndiff,ndc/a * 160 psd,psc/a 0
+ bloat-or hndiff,hndc/a * 160 hpsd,hpsc/a 0
+ bloat-or nfet,enfet,nffet * 160 ndiff 240 psd,psc/a 0
+ bloat-or hnfet * 160 hndiff 240 hpsd,hpsc/a 0
+ bloat-or nsd,nsc/a * 160 pdiff,pdc/a 0
+ bloat-or hnsd,hnsc/a * 160 hpdiff,hpdc/a 0
+ bloat-or ndop * 160 psd,psc/a,pdiff,pdc/a,pdop 0
+ grow 80
+ shrink 80
+ shrink 40
+ grow 40
+ and-not XTP
+ calma 45 1
+ layer CSP pbc
+ grow 80
+ bloat-or pdiff,pdc/a * 160 nsd,nsc/a 0
+ bloat-or hpdiff,hpdc/a * 160 hnsd,hnsc/a 0
+ bloat-or pfet,epfet,pffet * 160 pdiff 240 nsd,nsc/a 0
+ bloat-or hpfet * 160 hpdiff 240 hnsd,hnsc/a 0
+ bloat-or psd,psc/a * 160 ndiff,ndc/a 0
+ bloat-or hpsd,hpsc/a * 160 hndiff,hndc/a 0
+ bloat-or pdop * 160 nsd,nsc/a,ndiff,ndc/a,ndop 0
+ grow 80
+ shrink 80
+ shrink 40
+ grow 40
+
+ bloat-min pstop * 160 open 0
+
+ and-not XTN
+ and-not CSN
+ calma 44 1
+ layer COP open
+ calma 23 1
+ layer CPS pstop
+ calma 24 1
+ layer COG pad
+ shrink 640
+ or glass
+
+ or open
+
+ labels pad
+ calma 52 1
+ layer XP pad
+ shrink 640
+ calma 26 1
+
+
+
+
+
+
+
+style lambda=0.6(gen)
+ scalefactor 60 30
+ layer CWC cwell
+ calma 59 1
+ layer CWN nwell
+ bloat-or pbase,pbc/act * 360
+ bloat-or pdiff,pdc/a,pfet,epfet,pffet * 300
+ bloat-or nsd,nsc/a * 180
+ bloat-or clc/a * 60
+ or col
+ grow 180
+ shrink 180
+ calma 42 1
+ layer CWP pwell
+ bloat-or ndiff,ndc/a,nfet,enfet,nffet * 300
+ bloat-or psd,psc/a * 180
+ and-not CWC
+ shrink 180
+ grow 180
+ grow 180
+ shrink 180
+ calma 41 1
+ layer CMS m2,m2c/m2,m3c/m2,pad
+ labels m2
+ calma 51 1
+ layer CMF pad
+ grow 60
+ or pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,nbdc/m1,m1,m2c/m1,gc
+ labels pdc,ndc,psc,nsc,pbnc,pbpc,nbnc,nbpc,hpdc,hndc,hpsc,hnsc,pc,ec,capc,nbdc,m1,m2c,gc
+ calma 49 1
+ layer CPG cap,cc
+ or poly,pc/a,nfet,pfet,wcap,snfet,spfet,pbpoly,nbpoly,cap,capc/a,nffet,pffet
+ labels poly,nfet,pfet
+ calma 46 1
+ layer CAA clc
+ grow 60
+ or em,emc,col,pbase,pbc
+ or ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a
+ or hndiff,hndc/a,hpdiff,hpdc/a
+ or bd,nbd
+
+ or open,pstop
+
+ labels ndiff,pdiff
+ calma 43 1
+
+ layer CX col,clc
+ grow 60
+ calma 60 1
+ layer CVA pad
+ shrink 300
+
+ or open
+
+ calma 50 1
+ layer CVA m2c
+ squares 60 120 180
+ calma 50 1
+ layer CEL poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet
+ calma 56 1
+ layer CCE capc,ec
+ squares 120
+ calma 55 1
+
+
+ layer CCC gc
+ calma 48 1
+
+ layer CCA ndc,pdc,clc,emc,pbc,nbdc
+ squares 120
+
+ or open
+
+ calma 48 1
+ layer CCA nsc,psc
+ squares 120
+ calma 48 1
+ layer CCP pc
+ squares 120
+ calma 47 1
+ layer CBA emc,emit
+ grow 240
+ bloat-or pbc * 60
+ or pbase
+ calma 58 1
+
+ templayer XTN clc
+ grow 60
+ or em,emc,col
+ grow 120
+ bloat-or ndiff,ndc/a,ndop * 120 psd,psc/a,pdiff,pdc/a,pdop 0
+ bloat-or nbd,nbdc,wcap * 120
+ grow 60
+ shrink 60
+ shrink 30
+ grow 30
+ templayer XTP pbc
+ grow 60
+ bloat-or pdiff,pdc/a,pdop * 120 nsd,nsc/a,ndiff,ndc/a,ndop 0
+ grow 60
+ shrink 60
+ shrink 30
+ grow 30
+ layer CSN clc
+ grow 60
+ or em,emc,col
+ grow 120
+ bloat-or ndiff,ndc/a * 120 psd,psc/a 0
+ bloat-or nfet,enfet,nffet * 120 ndiff 180 psd,psc/a 0
+ bloat-or nsd,nsc/a * 120 pdiff,pdc/a 0
+ bloat-or nbd,nbdc,wcap * 120
+ bloat-or ndop * 120 psd,psc/a,pdiff,pdc/a,pdop 0
+ grow 60
+ shrink 60
+ shrink 30
+ grow 30
+ and-not XTP
+ calma 45 1
+ layer CSP pbc
+ grow 60
+ bloat-or pdiff,pdc/a * 120 nsd,nsc/a 0
+ bloat-or pfet,epfet,pffet * 120 pdiff 180 nsd,nsc/a 0
+ bloat-or psd,psc/a * 120 ndiff,ndc/a 0
+ bloat-or pdop * 120 nsd,nsc/a,ndiff,ndc/a,ndop 0
+ grow 60
+ shrink 60
+ shrink 30
+ grow 30
+
+ bloat-min pstop * 120 open 0
+
+ and-not XTN
+ and-not CSN
+ calma 44 1
+ layer CCD bd,nbd
+ grow 120
+ calma 57 1
+ layer COP open
+ calma 23 1
+ layer CPS pstop
+ calma 24 1
+ layer COG pad
+ shrink 600
+ or glass
+
+ or open
+
+ labels pad
+ calma 52 1
+ layer XP pad
+ shrink 600
+ calma 26 1
+
+ render CWN 12 -0.2 0.2
+ render CAA 2 -0.15 0.15
+ render CPG 1 0.025 0.05
+ render CEL 14 0.1 0.05
+ render CCC 19 0.0 0.2
+ render CCA 19 0.0 0.2
+ render CCP 19 0.075 0.125
+ render CMF 20 0.2 0.05
+ render CVA 19 0.25 0.05
+ render CMS 21 0.3 0.05
+style lambda=0.6(nwell)
+ scalefactor 60 30
+ layer CWC cwell
+ calma 59 1
+ layer CWN nwell
+ bloat-or pbase,pbc/a * 360
+ bloat-or pdiff,pdc/a,pfet,epfet,pffet * 300
+ bloat-or nsd,nsc/a * 180
+ bloat-or clc/a * 60
+ or col
+ grow 180
+ shrink 180
+ calma 42 1
+ layer CMS m2,m2c/m2,m3c/m2,pad
+ labels m2
+ calma 51 1
+ layer CMF pad
+ grow 60
+ or pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,nbdc/m1,m1,m2c/m1,gc
+ labels pdc,ndc,psc,nsc,pbnc,pbpc,nbnc,nbpc,hpdc,hndc,hpsc,hnsc,pc,ec,capc,nbdc,m1,m2c,gc
+ calma 49 1
+ layer CPG cap,cc
+ or poly,pc/a,nfet,pfet,wcap,snfet,spfet,pbpoly,nbpoly,cap,capc/a,nffet,pffet
+ labels poly,nfet,pfet
+ calma 46 1
+ layer CAA clc
+ grow 60
+ or em,emc,col,pbase,pbc
+ or ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a
+ or hndiff,hndc/a,hpdiff,hpdc/a
+ or bd,nbd
+
+ or open,pstop
+
+ labels ndiff,pdiff
+ calma 43 1
+
+ layer CX col,clc
+ grow 60
+ calma 60 1
+ layer CVA pad
+ shrink 300
+
+ or open
+
+ calma 50 1
+ layer CVA m2c
+ squares 60 120 180
+ calma 50 1
+ layer CEL poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet
+ calma 56 1
+ layer CCE capc,ec
+ squares 120
+ calma 55 1
+
+
+ layer CCC gc
+ calma 63 1
+
+ layer CCA ndc,pdc,clc,emc,pbc,nbdc
+ squares 120
+
+ or open
+
+ calma 48 1
+ layer CCA nsc,psc
+ squares 120
+ calma 48 1
+ layer CCP pc
+ squares 120
+ calma 47 1
+ layer CBA emc,emit
+ grow 240
+ bloat-or pbc * 60
+ or pbase
+ calma 58 1
+
+ templayer XTN clc
+ grow 60
+ or em,emc,col
+ grow 120
+ bloat-or ndiff,ndc/a * 120 psd,psc/a 0
+ bloat-or nbd,nbdc,ndop,wcap * 120
+ templayer XTP pbc
+ grow 60
+ bloat-or pdiff,pdc/a * 120 nsd,nsc/a 0
+ layer CSN clc
+ grow 60
+ or emc,emit,col
+ grow 120
+ bloat-or ndiff,ndc/a * 120 psd,psc/a 0
+ bloat-or nfet,enfet,nffet * 120 ndiff 180 psd,psc/a 0
+ bloat-or nsd,nsc/a * 120 pdiff,pdc/a 0
+ bloat-or nbd,nbdc,ndop,wcap * 120
+ grow 60
+ shrink 60
+ shrink 30
+ grow 30
+ and-not XTP
+ calma 45 1
+ layer CSP pbc
+ grow 60
+ bloat-or pdiff,pdc/a * 120 nsd,nsc/a 0
+ bloat-or pfet,epfet,pffet * 120 pdiff 180 nsd,nsc/a 0
+ bloat-or psd,psc/a * 120 ndiff,ndc/a 0
+ bloat-or pdop * 120
+ grow 60
+ shrink 60
+ shrink 30
+ grow 30
+
+ bloat-min pstop * 120 open 0
+
+ and-not XTN
+ and-not CSN
+ calma 44 1
+ layer CCD bd,nbd
+ grow 120
+ calma 57 1
+ layer COP open
+ calma 23 1
+ layer CPS pstop
+ calma 24 1
+ layer COG pad
+ shrink 600
+ or glass
+
+ or open
+
+ labels pad
+ calma 52 1
+ layer XP pad
+ shrink 600
+ calma 26 1
+
+
+style lambda=0.6(pwell)
+ scalefactor 60 30
+ layer CWP pwell
+ bloat-or ndiff,ndc/a,nfet,enfet,nffet * 300
+ bloat-or psd,psc/a * 180
+ grow 180
+ shrink 180
+ calma 41 1
+ layer CMS m2,m2c/m2,m3c/m2,pad
+ labels m2
+ calma 51 1
+ layer CMF pad
+ grow 60
+ or pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,nbdc/m1,m1,m2c/m1,gc
+ labels pdc,ndc,psc,nsc,pbnc,pbpc,nbnc,nbpc,hpdc,hndc,hpsc,hnsc,pc,ec,capc,nbdc,m1,m2c,gc
+ calma 49 1
+ layer CPG cap,cc
+ or poly,pc/a,nfet,pfet,wcap,snfet,spfet,pbpoly,nbpoly,cap,capc/a,nffet,pffet
+ labels poly,nfet,pfet
+ calma 46 1
+
+ layer CAA clc
+ grow 60
+ or em,emc,col
+ or ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a
+ or hndiff,hndc/a,hpdiff,hpdc/a
+
+ or open,pstop
+
+ labels ndiff,pdiff
+ calma 43 1
+
+ layer CX col,clc
+ grow 60
+ calma 60 1
+ layer CVA pad
+ shrink 300
+
+ or open
+
+ calma 50 1
+ layer CVA m2c
+ squares 60 120 180
+ calma 50 1
+ layer CEL poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet
+ calma 56 1
+ layer CCE capc,ec
+ squares 120
+ calma 55 1
+
+
+ layer CCC gc
+ calma 63 1
+
+ layer CCA ndc,pdc,clc,emc,pbc
+ squares 120
+
+ or open
+
+ calma 48 1
+ layer CCA nsc,psc
+ squares 120
+ calma 48 1
+ layer CCP pc
+ squares 120
+ calma 47 1
+ layer CBA emc,emit
+ grow 240
+ bloat-or pbc * 60
+ or pbase
+ calma 58 1
+
+ templayer XTN
+ bloat-or ndiff,ndc/a * 120 psd,psc/a 0
+ templayer XTP
+ bloat-or pdiff,pdc/a * 120 nsd,nsc/a 0
+ layer CSP
+ bloat-or pdiff,pdc/a * 120 nsd,nsc/a 0
+ bloat-or pfet,epfet,pffet * 120 pdiff 180 nsd,nsc/a 0
+ bloat-or psd,psc/a * 120 ndiff,ndc/a 0
+ bloat-or pdop * 120
+ grow 60
+ shrink 60
+ shrink 30
+ grow 30
+
+ bloat-min pstop * 120 open 0
+
+ and-not XTN
+ calma 44 1
+ layer CSN
+ bloat-or ndiff,ndc/a * 120 psd,psc/a 0
+ bloat-or nfet,enfet,nffet * 120 ndiff 180 psd,psc/a 0
+ bloat-or nsd,nsc/a * 120 pdiff,pdc/a 0
+ bloat-or ndop * 120
+ grow 60
+ shrink 60
+ shrink 30
+ grow 30
+ and-not XTP
+ and-not CSP
+ calma 45 1
+ layer COP open
+ calma 23 1
+ layer CPS pstop
+ calma 24 1
+ layer COG pad
+ shrink 600
+ or glass
-# 1 "cif_template/objs/LSACIFout" 1
+ or open
+
+ labels pad
+ calma 52 1
+ layer XP pad
+ shrink 600
+ calma 26 1
style lambda=0.5(gen)(libresilicon)
scalefactor 50 5
- templayer poly_parts polysilicon,polycontact,nfet,pfet,rpoly,polypdiff,polyndiff,ndpolycontact,pdpolycontact,rpdiffusion,rndiffusion,nbsfet,pbsfet,spfet,snfet,pbpoly,nbpoly,hnfet,hpfet
- templayer silicide_stop rpoly,rpdiffusion,rndiffusion
- templayer nimplant ndiff,nfet,ndc,nnd,nnc,pbnc,pbnd,nbnc,nbnd,snfet,pbsfet,hnfet,hndc,hndiff
+ templayer poly_parts polysilicon,polycontact,nfet,pfet,rpoly,polypdiff,polyndiff,ndpolycontact,pdpolycontact,nbsfet,pbsfet,spfet,snfet,pbpoly,nbpoly,hnfet,hpfet,rnfet,rpfet
+
+ templayer silicide_stop rpoly,rnfet,rpfet
+
+ templayer silicide_stop_unscaled rpdiffusion,rndiffusion
+
+ templayer silicide_stop_scaled silicide_stop
+ grow 100
+
+ templayer nimplant ndiff,nfet,ndc,nnd,nnc,pbnc,pbnd,nbnc,nbnd,snfet,pbsfet,hnfet,hndc,hndiff,rndiff,rpdiff,rpfet,rnfet
+
templayer nimplant_only rnd,plndiff,ndpc
grow 100
+
templayer pimplant pdiff,pfet,pdc,ppd,ppc,pbpc,pbpd,nbpc,nbpd,spfet,nbsfet,hpfet,hpdc,hpdiff
+
templayer pimplant_only rpd,plpdiff,pdpc
grow 100
+
templayer contacts pc,pdc,ndc,ppc,nnc,pbc,ndpc,pdpc,pbnc,pbpc,nbnc,nbpc,hpdc,hndc,pc,pdc,ndc,ppc,nnc,pbc,hpdc,hndc
+
templayer first_metal m1,contacts,m2c
+
templayer first_via m2c
shrink 50
+
templayer second_metal m2,m2c,m3c
+
templayer second_via m3c
shrink 50
+
templayer third_metal m3,m3c,pad,silk
+
templayer pbase_parts pb,pbnc,pbpc,pbnd,pbpd,pbpoly,pbsfet,nwpnbase,nwpbase,pnbase,pbase
+
templayer nbase_parts nb,nbnc,nbpc,nbnd,nbpd,nbpoly,nbsfet,nwpnbase,pnbase,nbase
+
templayer sonos_parts snfet,spfet,nbsfet,pbsfet
+
templayer nwell_parts nwell,pnbase,nwpnbase,nwpbase
+
templayer pwell_parts pwell
+
templayer implant_stop_parts rpoly
grow 100
@@ -714,8 +1777,7 @@ style lambda=0.5(gen)(libresilicon)
layer CSP fox_pimplant,pimplant_only
calma 12 0
- layer CRG silicide_stop
- grow 100
+ layer CRG silicide_stop_scaled,silicide_stop_unscaled
calma 13 0
layer CCA contacts
@@ -739,8 +1801,8 @@ style lambda=0.5(gen)(libresilicon)
layer COG glass
calma 20 0
-# 1018 "scmos.tech.out" 2
-# 1036 "scmos.tech.out"
+# 1036 "scmos.tech.out" 2
+# 1050 "scmos.tech.out"
style plot
scalefactor 100 50
layer CM2 m2,m2c/m2,pad/m2
@@ -773,9 +1835,2941 @@ style plot
end
-# 1079 "scmos.tech.out"
+# 1093 "scmos.tech.out"
cifinput
-# 1097 "scmos.tech.out"
+
+
+# 1 "cif_template/objs/CIFin" 1
+style lambda=1.0(gen)
+ scalefactor 100
+
+ layer nwell CWN
+ labels CWN
+ layer pwell CWP
+ labels CWP
+
+ layer poly CPG
+ labels CPG
+ layer pdiff CSP
+ and CAA
+ and CWN
+ layer ndiff CWP
+ or CWC
+ and CAA
+ and CSN
+ and-not CCD
+ layer nsd CWN
+ and CSN
+ and CAA
+ layer psd CWP
+ and CSP
+ and CAA
+ layer pbase CBA
+ labels CBA
+ layer nfet CPG
+ and CAA
+ and CSN
+ and-not CCD
+ layer pfet CAA
+ and CPG
+ and CSP
+ layer enfet CEL
+ and CAA
+ and CSN
+ and-not CCD
+ layer epfet CAA
+ and CEL
+ and CSP
+ layer nffet CAA
+ and CEL
+ and CPG
+ and CSN
+ and CWP
+ layer pffet CAA
+ and CEL
+ and CPG
+ and CSP
+ and CWN
+ layer ndc CWP
+ or CWC
+ and CCA
+ grow 100
+ and CAA
+ and CSN
+ and CMF
+ layer pdc CCA
+ grow 100
+ and CAA
+ and CWN
+ and CSP
+ and CMF
+ layer nsc CCA
+ grow 100
+ and CAA
+ and CSN
+ and CWN
+ and CMF
+ layer psc CCA
+ grow 100
+ and CAA
+ and CSP
+ and CWP
+ and CMF
+ layer gc CCC
+ layer m2c CVA
+ grow 100
+ and CMS
+ and CMF
+ labels CMS
+ layer m3c CVS
+ grow 100
+ and CMT
+ and CMS
+ and-not XP
+ layer electrode CEL
+ labels CEL
+ layer ec CCE
+ grow 100
+ and CMF
+ and CEL
+ labels CMF
+ layer cc CCE
+ grow 100
+ and CMF
+ and CEL
+ and CPG
+ labels CMF
+ layer cap CPG
+ and CEL
+ and-not CAA
+ labels CEL
+ layer pbc CCA
+ grow 100
+ and CBA
+ and CMF
+ labels CBA
+ layer col CX
+ and CAA
+ and CSN
+ and CWN
+ labels CAA
+ layer clc CCA
+ grow 100
+ and CX
+ and CAA
+ and CSN
+ and CWN
+ and CMF
+ labels CCA
+ layer emit CBA
+ and CSN
+ shrink 200
+ labels CBA
+ layer emc CCA
+ grow 100
+ and CBA
+ and CSN
+ and CMF
+ labels CBA
+ layer pc CCP
+ grow 100
+ and CPG
+ and CMF
+ layer nbd CSN
+ shrink 200
+ and CCD
+ and CAA
+ and-not CPG
+ layer nbdc CCA
+ grow 100
+ and CCD
+ and CSN
+ and CAA
+ layer bd CPG
+ or CEL
+ and CCD
+ and CAA
+ labels CCD
+
+
+ layer cwell CWC
+ labels CWC
+ layer glass COG
+
+ layer open CAA
+ and CCA
+ and CVA
+ and COG
+ and COP
+ layer pstop CAA
+ and CPS
+ and CSP
+ and-not CWP
+ and-not CWN
+
+ layer pad CMF
+ shrink 100
+ and CMS
+ shrink 500
+ and CVA
+ shrink 100
+ and XP
+ and COG
+ grow 600
+ layer m1 CMF
+ labels CMF
+ layer m2 CMS
+ labels CMS
+ layer m3 CMT
+
+ and-not XP
+ labels CMT
+
+
+ calma COP 23 *
+ calma CPS 24 *
+
+ calma CCC 25 *
+ calma XP 26 *
+ calma CWP 41 *
+ calma CWN 42 *
+ calma CAA 43 *
+ calma CSP 44 *
+ calma CSN 45 *
+ calma CPG 46 *
+ calma CCP 47 *
+ calma CCA 48 *
+ calma CMF 49 *
+ calma CVA 50 *
+ calma CMS 51 *
+ calma COG 52 *
+ calma CCE 55 *
+ calma CEL 56 *
+ calma CCD 57 *
+ calma CBA 58 *
+ calma CWC 59 *
+ calma CVS 61 *
+ calma CMT 62 *
+ calma CX 63 *
+style lambda=1.0(nwell)
+ scalefactor 100
+ layer nwell CWN
+ labels CWN
+ layer m3 CMT
+
+ and-not XP
+ labels CMT
+ layer m2 CMS
+ labels CMS
+ layer m1 CMF
+ labels CMF
+ layer poly CPG
+ labels CPG
+ layer psd CAA
+ and CSP
+ and-not CPS
+ layer pdiff CWN
+ and CAA
+ and CSP
+ labels CSP
+ layer ndiff CAA
+ and CSN
+ and-not CCD
+ labels CSN
+ layer nsd CWN
+ and CSN
+ and CAA
+ layer pbase CBA
+ labels CBA
+ layer nfet CPG
+ and CAA
+ and CSN
+ and-not CCD
+ layer pfet CAA
+ and CPG
+ and CSP
+ and CWN
+ layer enfet CEL
+ and CAA
+ and CSN
+ and-not CCD
+ layer epfet CAA
+ and CEL
+ and CSP
+ and CWN
+ layer nffet CAA
+ and CEL
+ and CPG
+ and CSN
+ layer pffet CAA
+ and CEL
+ and CPG
+ and CSP
+ and CWN
+ layer m3c CVS
+ grow 100
+ and CMT
+ and CMS
+ and-not XP
+ layer m2c CVA
+ grow 100
+ and CMS
+ and CMF
+ layer electrode CEL
+ labels CEL
+ layer ec CCE
+ or CCC
+ grow 100
+ and CMF
+ and CEL
+ layer cc CCE
+ grow 100
+ and CMF
+ and CEL
+ and CPG
+ labels CCE
+ layer cap CPG
+ and CEL
+ and-not CAA
+ layer psc CCA
+ grow 100
+ and CAA
+ and CSP
+ and CMF
+ layer ndc CCA
+ or CCC
+ grow 100
+ and CAA
+ and CSN
+ and CMF
+ layer pdc CCA
+ or CCC
+ grow 100
+ and CAA
+ and CWN
+ and CSP
+ and CMF
+ layer nsc CCA
+ or CCC
+ grow 100
+ and CAA
+ and CSN
+ and CWN
+ and CMF
+ layer pbc CCA
+ or CCC
+ grow 100
+ and CBA
+ and CMF
+ layer emit CBA
+ and CSN
+ shrink 200
+ layer emc CCA
+ grow 100
+ and CBA
+ and CSN
+ and CMF
+ layer col CX
+ and CAA
+ and CSN
+ and CWN
+ layer clc CCA
+ grow 100
+ and CX
+ and CAA
+ and CSN
+ and CWN
+ and CMF
+ layer pc CCP
+ or CCC
+ grow 100
+ and CPG
+ and CMF
+ labels CCP
+ layer nbd CSN
+ shrink 200
+ and CCD
+ and CAA
+ and-not CPG
+ layer nbdc CCA
+ grow 100
+ and CCD
+ and CSN
+ and CAA
+ layer bd CPG
+ or CEL
+ and CCD
+ and CAA
+ labels CCD
+
+
+ layer cwell CWC
+ labels CWC
+ layer glass COG
+ labels COG
+
+ layer open CAA
+ and CCA
+ and CVA
+ and COG
+ and COP
+ layer pstop CAA
+ and CPS
+ and CSP
+ and-not CWN
+
+ layer pad CMF
+ shrink 100
+ and CMS
+ shrink 500
+ and CVA
+ shrink 100
+ and XP
+ and COG
+ grow 600
+
+
+ calma COP 23 *
+ calma CPS 24 *
+
+ calma XP 26 *
+ calma CWN 42 *
+ calma CAA 43 *
+ calma CSP 44 *
+ calma CSN 45 *
+ calma CPG 46 *
+ calma CCP 47 *
+ calma CCA 48 *
+ calma CMF 49 *
+ calma CVA 50 *
+ calma CMS 51 *
+ calma COG 52 *
+ calma CCE 55 *
+ calma CEL 56 *
+ calma CCD 57 *
+ calma CBA 58 *
+ calma CWC 59 *
+ calma CVS 61 *
+ calma CMT 62 *
+ calma CX 63 *
+style lambda=1.0(oldnwell)
+ scalefactor 100
+ layer cwell CWC
+ layer nwell CWN
+ labels CWN
+ layer m3 CMT
+
+ and-not XP
+ labels CMT
+ layer m2 CMS
+ labels CMS
+ layer m1 CMF
+ labels CMF
+ layer poly CPG
+ labels CPG
+ layer psd CAA
+ layer pdiff CWN
+ and CAA
+ layer ndiff CAA
+ and CSN
+ and-not CCD
+ layer nsd CWN
+ and CSN
+ and CAA
+ layer pbase CBA
+ labels CBA
+ layer nfet CPG
+ and CAA
+ and CSN
+ and-not CCD
+ layer pfet CAA
+ and CPG
+ and CWN
+ layer enfet CEL
+ and CAA
+ and CSN
+ and-not CCD
+ layer epfet CAA
+ and CEL
+ and CWN
+ layer nffet CAA
+ and CEL
+ and CPG
+ and CSN
+ labels CEL
+ layer pffet CAA
+ and CEL
+ and CPG
+ and CWN
+ labels CEL
+ layer m2c CVA
+ grow 150
+ shrink 50
+ and CMS
+ and CMF
+ layer electrode CEL
+ labels CEL
+ layer ec CCE
+ grow 100
+ and CMF
+ and CEL
+ layer cc CCE
+ grow 100
+ and CMF
+ and CEL
+ and CPG
+ layer cap CPG
+ and CEL
+ and-not CAA
+ labels CEL
+ layer psc CCA
+ grow 100
+ and CAA
+ and CMF
+ layer ndc CCA
+ grow 100
+ and CAA
+ and CSN
+ and CMF
+ layer pdc CCA
+ grow 100
+ and CAA
+ and CWN
+ and CMF
+ layer nsc CCA
+ grow 100
+ and CAA
+ and CSN
+ and CWN
+ and CMF
+ layer m3c CVS
+ grow 100
+ and CMT
+ and CMS
+ and-not XP
+ layer gc CCC
+ layer pbc CCA
+ grow 100
+ and CBA
+ and CMF
+ layer col CX
+ and CAA
+ and CSN
+ and CWN
+ labels CAA
+ layer clc CCA
+ grow 100
+ and CX
+ and CAA
+ and CSN
+ and CWN
+ and CMF
+ labels CCA
+ layer emit CBA
+ and CSN
+ shrink 200
+ layer emc CCA
+ grow 100
+ and CBA
+ and CSN
+ and CMF
+ layer pc CCP
+ grow 100
+ and CPG
+ and CMF
+ layer nbd CSN
+ shrink 200
+ and CCD
+ and CAA
+ and-not CPG
+ layer nbdc CCA
+ grow 100
+ and CCD
+ and CSN
+ and CAA
+ layer bd CPG
+ or CEL
+ and CCD
+ and CAA
+ labels CCD
+ layer glass COG
+ layer pad CMF
+ shrink 100
+ and CMS
+ shrink 500
+ and CVA
+ shrink 100
+ and COG
+ grow 600
+ and XP
+
+ calma CWN 42 *
+ calma CAA 43 *
+
+ calma CSN 45 *
+ calma CPG 46 *
+ calma CCP 47 *
+ calma CCA 48 *
+ calma CMF 49 *
+ calma CVA 50 *
+ calma CMS 51 *
+ calma COG 52 *
+ calma CCE 55 *
+ calma CEL 56 *
+ calma CCD 57 *
+ calma CBA 58 *
+ calma CWC 59 *
+ calma CX 60 *
+
+
+
+
+
+style lambda=1.0(pwell)
+ scalefactor 100
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+
+ and-not XP
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+
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+
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+
+
+
+ calma COP 23 *
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+
+ calma XP 26 *
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+ calma COG 52 *
+ calma CCE 55 *
+ calma CEL 56 *
+ calma CVS 61 *
+ calma CMT 62 *
+
+style lambda=1.0(nowell)
+ scalefactor 100
+
+
+
+
+
+
+ layer poly CPG
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+
+
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+
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+
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+
+ and-not XP
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+
+
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+
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+
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+
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+
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+
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+
+
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+
+ calma XP 26 *
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+
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+
+ calma CWN 42 *
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+
+ calma CSN 45 *
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+ calma COG 52 *
+ calma CCE 55 *
+ calma CEL 56 *
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+ calma CWC 59 *
+ calma CX 60 *
+
+
+
+
+
+style lambda=0.8(pwell)
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+
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+
+
+
+ calma COP 23 *
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+
+ calma XP 26 *
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+
+style lambda=0.8(nowell)
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+
+
+
+
+
+
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+
+
+ layer cwell CWC
+ labels CWC
+ layer glass COG
+
+ layer open CAA
+ and CCA
+ and CVA
+ and COG
+ and COP
+ layer pstop CAA
+ and CPS
+ and CSP
+ and-not CWP
+ and-not CWN
+
+ layer pad CMF
+ shrink 80
+ and CMS
+ shrink 400
+ and CVA
+ shrink 80
+ and XP
+ and COG
+ grow 480
+ layer m1 CMF
+ labels CMF
+ layer m2 CMS
+ labels CMS
+ layer m3 CMT
+
+ and-not XP
+ labels CMT
+
+
+ calma COP 23 *
+ calma CPS 24 *
+
+ calma CCC 25 *
+ calma XP 26 *
+ calma CWP 41 *
+ calma CWN 42 *
+ calma CAA 43 *
+ calma CSP 44 *
+ calma CSN 45 *
+ calma CPG 46 *
+ calma CCP 47 *
+ calma CCA 48 *
+ calma CMF 49 *
+ calma CVA 50 *
+ calma CMS 51 *
+ calma COG 52 *
+ calma CCE 55 *
+ calma CEL 56 *
+ calma CCD 57 *
+ calma CBA 58 *
+ calma CWC 59 *
+ calma CVS 61 *
+ calma CMT 62 *
+ calma CX 63 *
+
+
+
+
+style lambda=0.6(gen)
+ scalefactor 60
+
+ layer nwell CWN
+ labels CWN
+ layer pwell CWP
+ labels CWP
+
+ layer poly CPG
+ labels CPG
+ layer pdiff CSP
+ and CAA
+ and CWN
+ layer ndiff CWP
+ or CWC
+ and CAA
+ and CSN
+ and-not CCD
+ layer nsd CWN
+ and CSN
+ and CAA
+ layer psd CWP
+ and CSP
+ and CAA
+ layer pbase CBA
+ labels CBA
+ layer nfet CPG
+ and CAA
+ and CSN
+ and-not CCD
+ layer pfet CAA
+ and CPG
+ and CSP
+ layer enfet CEL
+ and CAA
+ and CSN
+ and-not CCD
+ layer epfet CAA
+ and CEL
+ and CSP
+ layer nffet CAA
+ and CEL
+ and CPG
+ and CSN
+ and CWP
+ layer pffet CAA
+ and CEL
+ and CPG
+ and CSP
+ and CWN
+ layer ndc CWP
+ or CWC
+ and CCA
+ grow 60
+ and CAA
+ and CSN
+ and CMF
+ layer pdc CCA
+ grow 60
+ and CAA
+ and CWN
+ and CSP
+ and CMF
+ layer nsc CCA
+ grow 60
+ and CAA
+ and CSN
+ and CWN
+ and CMF
+ layer psc CCA
+ grow 60
+ and CAA
+ and CSP
+ and CWP
+ and CMF
+ layer gc CCC
+ layer m2c CVA
+ grow 60
+ and CMS
+ and CMF
+ labels CMS
+ layer m3c CVS
+ grow 60
+ and CMT
+ and CMS
+ and-not XP
+ layer electrode CEL
+ labels CEL
+ layer ec CCE
+ grow 60
+ and CMF
+ and CEL
+ labels CMF
+ layer cc CCE
+ grow 60
+ and CMF
+ and CEL
+ and CPG
+ labels CMF
+ layer cap CPG
+ and CEL
+ and-not CAA
+ labels CEL
+ layer pbc CCA
+ grow 60
+ and CBA
+ and CMF
+ labels CBA
+ layer col CX
+ and CAA
+ and CSN
+ and CWN
+ labels CAA
+ layer clc CCA
+ grow 60
+ and CX
+ and CAA
+ and CSN
+ and CWN
+ and CMF
+ labels CCA
+ layer emit CBA
+ and CSN
+ shrink 120
+ labels CBA
+ layer emc CCA
+ grow 60
+ and CBA
+ and CSN
+ and CMF
+ labels CBA
+ layer pc CCP
+ grow 60
+ and CPG
+ and CMF
+ layer nbd CSN
+ shrink 120
+ and CCD
+ and CAA
+ and-not CPG
+ layer nbdc CCA
+ grow 60
+ and CCD
+ and CSN
+ and CAA
+ layer bd CPG
+ or CEL
+ and CCD
+ and CAA
+ labels CCD
+
+
+ layer cwell CWC
+ labels CWC
+ layer glass COG
+
+ layer open CAA
+ and CCA
+ and CVA
+ and COG
+ and COP
+ layer pstop CAA
+ and CPS
+ and CSP
+ and-not CWP
+ and-not CWN
+
+ layer pad CMF
+ shrink 60
+ and CMS
+ shrink 300
+ and CVA
+ shrink 60
+ and XP
+ and COG
+ grow 360
+ layer m1 CMF
+ labels CMF
+ layer m2 CMS
+ labels CMS
+ layer m3 CMT
+
+ and-not XP
+ labels CMT
+
+
+ calma COP 23 *
+ calma CPS 24 *
+
+ calma CCC 25 *
+ calma XP 26 *
+ calma CWP 41 *
+ calma CWN 42 *
+ calma CAA 43 *
+ calma CSP 44 *
+ calma CSN 45 *
+ calma CPG 46 *
+ calma CCP 47 *
+ calma CCA 48 *
+ calma CMF 49 *
+ calma CVA 50 *
+ calma CMS 51 *
+ calma COG 52 *
+ calma CCE 55 *
+ calma CEL 56 *
+ calma CCD 57 *
+ calma CBA 58 *
+ calma CWC 59 *
+ calma CVS 61 *
+ calma CMT 62 *
+ calma CX 63 *
+style lambda=0.6(nwell)
+ scalefactor 60
+ layer nwell CWN
+ labels CWN
+ layer m3 CMT
+
+ and-not XP
+ labels CMT
+ layer m2 CMS
+ labels CMS
+ layer m1 CMF
+ labels CMF
+ layer poly CPG
+ labels CPG
+ layer psd CAA
+ and CSP
+ and-not CPS
+ layer pdiff CWN
+ and CAA
+ and CSP
+ labels CSP
+ layer ndiff CAA
+ and CSN
+ and-not CCD
+ labels CSN
+ layer nsd CWN
+ and CSN
+ and CAA
+ layer pbase CBA
+ labels CBA
+ layer nfet CPG
+ and CAA
+ and CSN
+ and-not CCD
+ layer pfet CAA
+ and CPG
+ and CSP
+ and CWN
+ layer enfet CEL
+ and CAA
+ and CSN
+ and-not CCD
+ layer epfet CAA
+ and CEL
+ and CSP
+ and CWN
+ layer nffet CAA
+ and CEL
+ and CPG
+ and CSN
+ layer pffet CAA
+ and CEL
+ and CPG
+ and CSP
+ and CWN
+ layer m3c CVS
+ grow 60
+ and CMT
+ and CMS
+ and-not XP
+ layer m2c CVA
+ grow 60
+ and CMS
+ and CMF
+ layer electrode CEL
+ labels CEL
+ layer ec CCE
+ or CCC
+ grow 60
+ and CMF
+ and CEL
+ layer cc CCE
+ grow 60
+ and CMF
+ and CEL
+ and CPG
+ labels CCE
+ layer cap CPG
+ and CEL
+ and-not CAA
+ layer psc CCA
+ grow 60
+ and CAA
+ and CSP
+ and CMF
+ layer ndc CCA
+ or CCC
+ grow 60
+ and CAA
+ and CSN
+ and CMF
+ layer pdc CCA
+ or CCC
+ grow 60
+ and CAA
+ and CWN
+ and CSP
+ and CMF
+ layer nsc CCA
+ or CCC
+ grow 60
+ and CAA
+ and CSN
+ and CWN
+ and CMF
+ layer pbc CCA
+ or CCC
+ grow 60
+ and CBA
+ and CMF
+ layer emit CBA
+ and CSN
+ shrink 120
+ layer emc CCA
+ grow 60
+ and CBA
+ and CSN
+ and CMF
+ layer col CX
+ and CAA
+ and CSN
+ and CWN
+ layer clc CCA
+ grow 60
+ and CX
+ and CAA
+ and CSN
+ and CWN
+ and CMF
+ layer pc CCP
+ or CCC
+ grow 60
+ and CPG
+ and CMF
+ labels CCP
+ layer nbd CSN
+ shrink 120
+ and CCD
+ and CAA
+ and-not CPG
+ layer nbdc CCA
+ grow 60
+ and CCD
+ and CSN
+ and CAA
+ layer bd CPG
+ or CEL
+ and CCD
+ and CAA
+ labels CCD
+
+
+ layer cwell CWC
+ labels CWC
+ layer glass COG
+ labels COG
+
+ layer open CAA
+ and CCA
+ and CVA
+ and COG
+ and COP
+ layer pstop CAA
+ and CPS
+ and CSP
+ and-not CWN
+
+ layer pad CMF
+ shrink 60
+ and CMS
+ shrink 300
+ and CVA
+ shrink 60
+ and XP
+ and COG
+ grow 360
+
+
+ calma COP 23 *
+ calma CPS 24 *
+
+ calma XP 26 *
+ calma CWN 42 *
+ calma CAA 43 *
+ calma CSP 44 *
+ calma CSN 45 *
+ calma CPG 46 *
+ calma CCP 47 *
+ calma CCA 48 *
+ calma CMF 49 *
+ calma CVA 50 *
+ calma CMS 51 *
+ calma COG 52 *
+ calma CCE 55 *
+ calma CEL 56 *
+ calma CCD 57 *
+ calma CBA 58 *
+ calma CWC 59 *
+ calma CVS 61 *
+ calma CMT 62 *
+ calma CX 63 *
+style lambda=0.6(oldnwell)
+ scalefactor 60
+ layer cwell CWC
+ layer nwell CWN
+ labels CWN
+ layer m3 CMT
+
+ and-not XP
+ labels CMT
+ layer m2 CMS
+ labels CMS
+ layer m1 CMF
+ labels CMF
+ layer poly CPG
+ labels CPG
+ layer psd CAA
+ layer pdiff CWN
+ and CAA
+ layer ndiff CAA
+ and CSN
+ and-not CCD
+ layer nsd CWN
+ and CSN
+ and CAA
+ layer pbase CBA
+ labels CBA
+ layer nfet CPG
+ and CAA
+ and CSN
+ and-not CCD
+ layer pfet CAA
+ and CPG
+ and CWN
+ layer enfet CEL
+ and CAA
+ and CSN
+ and-not CCD
+ layer epfet CAA
+ and CEL
+ and CWN
+ layer nffet CAA
+ and CEL
+ and CPG
+ and CSN
+ labels CEL
+ layer pffet CAA
+ and CEL
+ and CPG
+ and CWN
+ labels CEL
+ layer m2c CVA
+ grow 150
+ shrink 50
+ and CMS
+ and CMF
+ layer electrode CEL
+ labels CEL
+ layer ec CCE
+ grow 60
+ and CMF
+ and CEL
+ layer cc CCE
+ grow 60
+ and CMF
+ and CEL
+ and CPG
+ layer cap CPG
+ and CEL
+ and-not CAA
+ labels CEL
+ layer psc CCA
+ grow 60
+ and CAA
+ and CMF
+ layer ndc CCA
+ grow 60
+ and CAA
+ and CSN
+ and CMF
+ layer pdc CCA
+ grow 60
+ and CAA
+ and CWN
+ and CMF
+ layer nsc CCA
+ grow 60
+ and CAA
+ and CSN
+ and CWN
+ and CMF
+ layer m3c CVS
+ grow 60
+ and CMT
+ and CMS
+ and-not XP
+ layer gc CCC
+ layer pbc CCA
+ grow 60
+ and CBA
+ and CMF
+ layer col CX
+ and CAA
+ and CSN
+ and CWN
+ labels CAA
+ layer clc CCA
+ grow 60
+ and CX
+ and CAA
+ and CSN
+ and CWN
+ and CMF
+ labels CCA
+ layer emit CBA
+ and CSN
+ shrink 120
+ layer emc CCA
+ grow 60
+ and CBA
+ and CSN
+ and CMF
+ layer pc CCP
+ grow 60
+ and CPG
+ and CMF
+ layer nbd CSN
+ shrink 120
+ and CCD
+ and CAA
+ and-not CPG
+ layer nbdc CCA
+ grow 60
+ and CCD
+ and CSN
+ and CAA
+ layer bd CPG
+ or CEL
+ and CCD
+ and CAA
+ labels CCD
+ layer glass COG
+ layer pad CMF
+ shrink 60
+ and CMS
+ shrink 300
+ and CVA
+ shrink 60
+ and COG
+ grow 360
+ and XP
+
+ calma CWN 42 *
+ calma CAA 43 *
+
+ calma CSN 45 *
+ calma CPG 46 *
+ calma CCP 47 *
+ calma CCA 48 *
+ calma CMF 49 *
+ calma CVA 50 *
+ calma CMS 51 *
+ calma COG 52 *
+ calma CCE 55 *
+ calma CEL 56 *
+ calma CCD 57 *
+ calma CBA 58 *
+ calma CWC 59 *
+ calma CX 60 *
+
+
+
+
+
+style lambda=0.6(pwell)
+ scalefactor 60
+ layer pwell CWP
+ labels CWP
+ layer m3 CMT
+
+ and-not XP
+ labels CMT
+ layer m2 CMS
+ labels CMS
+ layer m1 CMF
+ labels CMF
+ layer poly CPG
+ labels CPG
+ layer nsd CAA
+ and CSN
+ layer ndiff CWP
+ and CSN
+ and CAA
+ layer pdiff CAA
+ and CSP
+ and-not CPS
+ layer psd CWP
+ and CSP
+ and CAA
+ layer pfet CPG
+ and CAA
+ and CSP
+ layer nfet CAA
+ and CPG
+ and CSN
+ and CWP
+ layer epfet CEL
+ and CAA
+ and CSP
+ layer enfet CAA
+ and CEL
+ and CSN
+ and CWP
+ layer m2c CVA
+ grow 60
+ and CMS
+ and CMF
+ labels CMS
+ layer electrode CEL
+ labels CEL
+ layer ec CCE
+ grow 60
+ and CMF
+ and CEL
+ labels CMF
+ layer cc CCE
+ grow 60
+ and CMF
+ and CEL
+ and CPG
+ labels CMF
+ layer cap CPG
+ and CEL
+ and-not CAA
+ labels CEL
+ layer nsc CCA
+ grow 60
+ and CAA
+ and CSN
+ and CMF
+ layer pdc CCA
+ grow 60
+ and CAA
+ and CSP
+ and CMF
+ layer ndc CCA
+ grow 60
+ and CSN
+ and CAA
+ and CWP
+ and CMF
+ layer psc CCA
+ grow 60
+ and CAA
+ and CSP
+ and CWP
+ and CMF
+ layer pc CCP
+ grow 60
+ and CPG
+ and CMF
+ layer m3c CVS
+ grow 60
+ and CMT
+ and CMS
+ and-not XP
+ layer glass COG
+
+ layer open CAA
+ and CCA
+ and CVA
+ and COG
+ and COP
+ layer pstop CAA
+ and CPS
+ and CSP
+ and-not CWP
+
+ layer pad CMF
+ shrink 60
+ and CMS
+ shrink 300
+ and CVA
+ shrink 60
+ and XP
+ and COG
+ grow 360
+
+
+
+ calma COP 23 *
+ calma CPS 24 *
+
+ calma XP 26 *
+ calma CWP 41 *
+ calma CAA 43 *
+ calma CSP 44 *
+ calma CSN 45 *
+ calma CPG 46 *
+ calma CCP 47 *
+ calma CCA 48 *
+ calma CMF 49 *
+ calma CVA 50 *
+ calma CMS 51 *
+ calma COG 52 *
+ calma CCE 55 *
+ calma CEL 56 *
+ calma CVS 61 *
+ calma CMT 62 *
+
+style lambda=0.6(nowell)
+ scalefactor 60
+
+
+
+
+
+
+ layer poly CPG
+ labels CPG
+ layer pdiff CSP
+ and CAA
+ and CWN
+ layer ndiff CWP
+ or CWC
+ and CAA
+ and CSN
+ and-not CCD
+ layer nsd CWN
+ and CSN
+ and CAA
+ layer psd CWP
+ and CSP
+ and CAA
+ layer pbase CBA
+ labels CBA
+ layer nfet CPG
+ and CAA
+ and CSN
+ and-not CCD
+ layer pfet CAA
+ and CPG
+ and CSP
+ layer enfet CEL
+ and CAA
+ and CSN
+ and-not CCD
+ layer epfet CAA
+ and CEL
+ and CSP
+ layer nffet CAA
+ and CEL
+ and CPG
+ and CSN
+ and CWP
+ layer pffet CAA
+ and CEL
+ and CPG
+ and CSP
+ and CWN
+ layer ndc CWP
+ or CWC
+ and CCA
+ grow 60
+ and CAA
+ and CSN
+ and CMF
+ layer pdc CCA
+ grow 60
+ and CAA
+ and CWN
+ and CSP
+ and CMF
+ layer nsc CCA
+ grow 60
+ and CAA
+ and CSN
+ and CWN
+ and CMF
+ layer psc CCA
+ grow 60
+ and CAA
+ and CSP
+ and CWP
+ and CMF
+ layer gc CCC
+ layer m2c CVA
+ grow 60
+ and CMS
+ and CMF
+ labels CMS
+ layer m3c CVS
+ grow 60
+ and CMT
+ and CMS
+ and-not XP
+ layer electrode CEL
+ labels CEL
+ layer ec CCE
+ grow 60
+ and CMF
+ and CEL
+ labels CMF
+ layer cc CCE
+ grow 60
+ and CMF
+ and CEL
+ and CPG
+ labels CMF
+ layer cap CPG
+ and CEL
+ and-not CAA
+ labels CEL
+ layer pbc CCA
+ grow 60
+ and CBA
+ and CMF
+ labels CBA
+ layer col CX
+ and CAA
+ and CSN
+ and CWN
+ labels CAA
+ layer clc CCA
+ grow 60
+ and CX
+ and CAA
+ and CSN
+ and CWN
+ and CMF
+ labels CCA
+ layer emit CBA
+ and CSN
+ shrink 120
+ labels CBA
+ layer emc CCA
+ grow 60
+ and CBA
+ and CSN
+ and CMF
+ labels CBA
+ layer pc CCP
+ grow 60
+ and CPG
+ and CMF
+ layer nbd CSN
+ shrink 120
+ and CCD
+ and CAA
+ and-not CPG
+ layer nbdc CCA
+ grow 60
+ and CCD
+ and CSN
+ and CAA
+ layer bd CPG
+ or CEL
+ and CCD
+ and CAA
+ labels CCD
+
+
+ layer cwell CWC
+ labels CWC
+ layer glass COG
+
+ layer open CAA
+ and CCA
+ and CVA
+ and COG
+ and COP
+ layer pstop CAA
+ and CPS
+ and CSP
+ and-not CWP
+ and-not CWN
+
+ layer pad CMF
+ shrink 60
+ and CMS
+ shrink 300
+ and CVA
+ shrink 60
+ and XP
+ and COG
+ grow 360
+ layer m1 CMF
+ labels CMF
+ layer m2 CMS
+ labels CMS
+ layer m3 CMT
+
+ and-not XP
+ labels CMT
+
+
+ calma COP 23 *
+ calma CPS 24 *
+
+ calma CCC 25 *
+ calma XP 26 *
+ calma CWP 41 *
+ calma CWN 42 *
+ calma CAA 43 *
+ calma CSP 44 *
+ calma CSN 45 *
+ calma CPG 46 *
+ calma CCP 47 *
+ calma CCA 48 *
+ calma CMF 49 *
+ calma CVA 50 *
+ calma CMS 51 *
+ calma COG 52 *
+ calma CCE 55 *
+ calma CEL 56 *
+ calma CCD 57 *
+ calma CBA 58 *
+ calma CWC 59 *
+ calma CVS 61 *
+ calma CMT 62 *
+ calma CX 63 *
+
+
+
+
+
+style lambda=1.0(cmosn)
+ scalefactor 100
+ layer nwell NWN
+ labels NWN
+ layer pwell NWP
+ labels NWP
+ layer m2 NMS
+ labels NMS
+ layer m1 NMF
+ labels NMF
+ layer poly NPG
+ labels NPG
+ layer pdiff NSP
+ and NAA
+ and NWN
+ layer ndiff NSN
+ and NAA
+ layer nsd NWN
+ and NSN
+ and NAA
+ layer psd NSP
+ and NAA
+ and-not NWN
+ layer nfet NPG
+ and NAA
+ and NSN
+ layer pfet NAA
+ and NPG
+ and NSP
+ layer enfet NEL
+ and NAA
+ and NSN
+ layer epfet NAA
+ and NEL
+ and NSP
+ layer electrode NEL
+ labels NEL
+ layer cap NPG
+ and NEL
+ and-not NAA
+ labels NEL
+ layer gc NCT
+ layer m2c NVA
+ and NMS
+ and NMF
+ labels NMS
+ layer open NAA
+ and NCT
+ and NVA
+ and NOG
+ and NOP
+ layer pstop NAA
+ and NPS
+ and NSP
+ and-not NWP
+ and-not NWN
+ layer pad NMF
+ shrink 100
+ and NMS
+ shrink 500
+ and NVA
+ shrink 100
+ and NOG
+ grow 600
+ and XP
+
+ calma NWN 1 *
+ calma NWP 2 *
+ calma NAA 3 *
+ calma NPG 4 *
+ calma NEL 5 *
+ calma NSN 7 *
+ calma NSP 8 *
+ calma NCT 9 *
+ calma NMF 10 *
+ calma NVA 11 *
+ calma NMS 12 *
+ calma NOG 13 *
+# 1097 "scmos.tech.out" 2
+# 1111 "scmos.tech.out"
end
mzrouter
@@ -795,24 +4789,26 @@ end
drc
-# 1129 "scmos.tech.out"
+# 1143 "scmos.tech.out"
edge4way (~nwell)/w nwell 10 nwell nwell 10\
"N-Well width must be at least 10 (MOSIS rule #1.1)"
edge4way (~pwell)/w pwell 10 pwell pwell 10\
"P-Well width must be at least 10 (MOSIS rule #1.1)"
-# 1149 "scmos.tech.out"
+# 1163 "scmos.tech.out"
edge4way nwell (~nwell)/w 9 (~nwell)/w (~nwell)/w 9\
"N-Well spacing must be at least 9 (MOSIS rule #1.2)"
edge4way pwell (~pwell)/w 9 (~pwell)/w (~pwell)/w 9\
"P-Well spacing must be at least 9 (MOSIS rule #1.2)"
-# 1188 "scmos.tech.out"
- width ndiff,ndc/a,nfet,enfet,nffet,wcap 2 \
- "N-type Diffusion width must be at least 2"
- width pdiff,pdc/a,pfet,epfet,pffet 2 \
- "P-type Diffusion width must be at least 2"
- width nsd,nsc/a,psd,psc/a 2 \
- "Ohmic diffusion width must be at least 2"
-# 1204 "scmos.tech.out"
+# 1209 "scmos.tech.out"
+ width ndiff,ndc/a,nfet,enfet,nffet,wcap 3 \
+ "N-type Diffusion width must be at least 3 (MOSIS rule #2.1a)"
+ width pdiff,pdc/a,pfet,epfet,pffet 3 \
+ "P-type Diffusion width must be at least 3 (MOSIS rule #2.1b)"
+ width nsd,nsc/a,psd,psc/a 3 \
+ "Ohmic diffusion width must be at least 3 (MOSIS rule #2.1c)"
+
+
+
spacing ndiff,ndc/a,nfet,enfet,nffet,wcap ndiff,ndc/a,nfet,enfet,nffet,wcap 3 touching_ok \
"Diffusion spacing must be at least 3 (MOSIS rule #2.2)"
spacing pdiff,pdc/a,pfet,epfet,pffet pdiff,pdc/a,pfet,epfet,pffet 3 touching_ok \
@@ -829,7 +4825,7 @@ drc
spacing ndiff,ndc/a pdiff,pdc/a 10 touching_illegal \
"P-type diffusion must be 10 away from N-type diffusion (MOSIS rule #2.3a)"
-# 1229 "scmos.tech.out"
+# 1243 "scmos.tech.out"
spacing ndiff,ndc/a nsd,nsc/a 8 touching_illegal \
"N-type diffusion must be 8 away from N-substrate contact (MOSIS rule #2.3a,4a)"
spacing pdiff,pdc/a psd,psc/a 8 touching_illegal \
@@ -839,7 +4835,7 @@ drc
spacing nsd,nsc/a psd,psc/a 6 touching_illegal \
"Opposite well contacts must be separated by 6 (MOSIS rule #2.4)"
-# 1246 "scmos.tech.out"
+# 1260 "scmos.tech.out"
spacing ndiff,ndc/a,nfet,enfet,nffet,wcap nwell 5 touching_illegal \
"N-diffusion and N-well must be separated by 5 (MOSIS rule #2.3a)"
spacing pdiff,pdc/a,pfet,epfet,pffet pwell 5 touching_illegal \
@@ -906,7 +4902,7 @@ drc
"Poly and diffusion must be separated by at least 1 (MOSIS rule #3.5)"
edge nsd,nsc/a,psd,psc/a,ndiff,ndc/a,pdiff,pdc/a space/a 1 space/a space/a 1 \
"Poly and diffusion must be separated by at least 1 (MOSIS rule #3.5)"
-# 1335 "scmos.tech.out"
+# 1349 "scmos.tech.out"
spacing pfet,epfet,pffet nsd,nsc/a 3 touching_illegal \
"Transistors must be separated from substrate contacts by 3 (MOSIS rule #4.1.a)"
spacing nfet,enfet,nffet psd,psc/a 3 touching_illegal \
@@ -930,7 +4926,7 @@ drc
"Backedge of diffusion must be 4 from substrate diff (MOSIS rule #4.2.a)"
edge4way ~(ndiff,ndc/a,nfet,enfet,nffet,wcap)/act ndiff,ndc,nfet 4 ~(psd,psc/a)/act ndiff,ndc/a,nfet,enfet,nffet,wcap 2 \
"Backedge of diffusion must be 4 from substrate diff (MOSIS rule #4.2.b)"
-# 1369 "scmos.tech.out"
+# 1383 "scmos.tech.out"
width pc 4 \
"Poly contact width must be at least 4 (MOSIS rule #5B.1,2,3)"
@@ -949,12 +4945,12 @@ drc
spacing pc ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a 1 touching_illegal \
"Poly contact must be 1 unit from diffusion (MOSIS rule #5B.6)"
-# 1395 "scmos.tech.out"
+# 1409 "scmos.tech.out"
width ndc,pdc 4 \
"Diffusion contact width must be at least 4 (MOSIS rule #6B.1,2,3)"
width nsc,psc 4 \
"Substrate contact width must be at least 4 (MOSIS rule #6B.1,2,3)"
-# 1419 "scmos.tech.out"
+# 1433 "scmos.tech.out"
edge4way ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a ~(ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a)/act 4 ~(ndc,pdc,nsc,psc)/act \
~(ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a)/act 4 \
"Diffusion contacts must be 4 from other diffusions (MOSIS rule #6B.4,5)"
@@ -972,7 +4968,7 @@ drc
spacing pdc,ndc,psc,nsc,pbnc,pbpc,nbnc,nbpc pc/act 2 touching_illegal \
"Poly contacts must be 2 away from diffusion contacts (MOSIS rule #6B.9)"
-# 1444 "scmos.tech.out"
+# 1458 "scmos.tech.out"
edge4way m3c/m3 ~m3c/m3 1 ~m3c/m3 (~m3c,m3c)/m3 1 \
"Metal3 contacts must be rectangular (Magic rules)"
edge4way m2c/m2 ~m2c/m2 1 ~m2c/m2 (~m2c,m2c)/m2 1 \
@@ -1015,16 +5011,42 @@ drc
spacing pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,nbdc/m1,m1,m2c/m1,gc,pad/m1 pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,nbdc/m1,m1,m2c/m1,gc,pad/m1 3 touching_ok \
"First-level metal spacing must be at least 3 (MOSIS rule #7.2)"
-# 1497 "scmos.tech.out"
+# 1511 "scmos.tech.out"
width m2c 4 \
"Contact width must be at least 4 (MOSIS rule #8.1,2,3)"
-# 1526 "scmos.tech.out"
+
+
+
+
+
+
+
+ edge4way poly,pc/a,nfet,pfet,wcap,snfet,spfet,pbpoly,nbpoly,cap,capc/a,nffet,pffet ~(poly,pc/a,nfet,pfet,wcap,snfet,spfet,pbpoly,nbpoly,cap,capc/a,nffet,pffet)/a 1 ~m2c/m2 ~(poly,pc/a,nfet,pfet,wcap,snfet,spfet,pbpoly,nbpoly,cap,capc/a,nffet,pffet)/a 1 \
+ "Via must be on a flat surface (MOSIS rule #8.4,5)" metal2
+ edge4way poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet ~(poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet)/a 1 ~m2c/m2 ~(poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet)/a 1 \
+ "Via must be on a flat surface (MOSIS rule #8.4,5)" metal2
+ edge4way ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a ~(ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a)/a 1 ~m2c/m2 ~(ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a)/a 1 \
+ "Via must be on a flat surface (MOSIS rule #8.4,5)" metal2
+
+ edge4way ~(poly,pc/a,nfet,pfet,wcap,snfet,spfet,pbpoly,nbpoly,cap,capc/a,nffet,pffet)/a poly,pc/a,nfet,pfet,wcap,snfet,spfet,pbpoly,nbpoly,cap,capc/a,nffet,pffet 1 ~m2c/m2 poly,pc/a,nfet,pfet,wcap,snfet,spfet,pbpoly,nbpoly,cap,capc/a,nffet,pffet 1 \
+ "Via must be on a flat surface (MOSIS rule #8.4,5)" metal2
+ edge4way ~(poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet)/a poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet 1 ~m2c/m2 poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet 1 \
+ "Via must be on a flat surface (MOSIS rule #8.4,5)" metal2
+ edge4way ~(ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a)/a ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a 1 ~m2c/m2 ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a 1 \
+ "Via must be on a flat surface (MOSIS rule #8.4,5)" metal2
+
+
+
+
+
+
+
width m2,m2c/m2,m3c/m2,pad 3 \
"Second-level metal width must be at least 3 (MOSIS rule #9.1)"
-# 1538 "scmos.tech.out"
+# 1552 "scmos.tech.out"
spacing m2,m2c/m2,m3c/m2,pad m2,m2c/m2,m3c/m2,pad 4 touching_ok \
"Second-level metal spacing must be at least 4 (MOSIS rule #9.2a)"
-# 1596 "scmos.tech.out"
+# 1610 "scmos.tech.out"
width cap,capc/a 2 \
"Electrode capacitor width must be at least 3 (MOSIS rule #11.1)"
@@ -1047,7 +5069,7 @@ drc
"Cap must be on a flat surface (MOSIS rule #11.4)" active
edge4way cap ~(cap)/a 2 nfet,enfet,nffet,pfet,epfet,pffet,poly,poly2,space/a,cc/a \
ndiff,ndc/a,pdiff,pdc/a,poly 2 "Cap must be on a flat surface (MOSIS rule #11.4)" active
-# 1627 "scmos.tech.out"
+# 1641 "scmos.tech.out"
width poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet 2 \
"Electrode width must be at least 2 (MOSIS rule #12.1)"
@@ -1073,7 +5095,7 @@ drc
spacing poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet pc,ndc,pdc 2 touching_illegal \
"Poly2 spacing to poly or diffusion contact must be at least 3 (MOSIS rule #12.6)"
-# 1668 "scmos.tech.out"
+# 1682 "scmos.tech.out"
width ec,capc 4 \
"Electrode contact width must be at least 4 (MOSIS rule #13.1)"
@@ -1098,10 +5120,10 @@ drc
width m3c 4 \
"Third-level metal contact width must be at least 4 (MOSIS rule #14.1,2,3)"
-# 1703 "scmos.tech.out"
- width m3,m3c/m3 4 \
- "Third-level metal width must be at least 4"
-# 1720 "scmos.tech.out"
+# 1724 "scmos.tech.out"
+ width m3,m3c/m3 6 \
+ "Third-level metal width must be at least 6 (MOSIS rule #15.1a)"
+# 1734 "scmos.tech.out"
spacing m3,m3c/m3 m3,m3c/m3 4 touching_ok \
"Third-level metal spacing must be at least 4 from other third-level metal (MOSIS rule #15.2a)"
@@ -1109,10 +5131,10 @@ drc
edge4way m3c/m3 ~m3c/m3 1 m3 m3 1 \
"Mimimum metal3 overlap of via must be at least 1 (MOSIS rule #15.3)"
-# 1735 "scmos.tech.out"
+# 1749 "scmos.tech.out"
width clc,pbc,emc 4 \
"Transistor contact width must be at least 4 (MOSIS rule #16.1)"
-# 1746 "scmos.tech.out"
+# 1760 "scmos.tech.out"
edge4way emc/a,emit pbase 4 pbase pbase 4 \
"Pbase overlap of emitter must be at least 4 (MOSIS rule #16.3)"
@@ -1127,7 +5149,7 @@ drc
edge4way pbc (~pbc)/a 3 pb,pbc/a pb,pbc/a 3 \
"Pbase overlap of base contact must be at least 3 (MOSIS rule #16.5)"
-# 1768 "scmos.tech.out"
+# 1782 "scmos.tech.out"
width col,clc/a 6 \
"Collector width must be at least 6 (MOSIS rule #16.6)"
@@ -1172,7 +5194,7 @@ drc
spacing pbase,pbc/a pbase,pbc/a 2 surround_ok \
"Pbase spacing must be at least 2 (MOSIS extension rule)"
-# 1821 "scmos.tech.out"
+# 1835 "scmos.tech.out"
width cwell 10 \
"Cap-well width must be at least 10 (MOSIS rule #17.1)"
@@ -1194,7 +5216,7 @@ drc
edge4way space cwell 3 (space,poly,pc)/a 0 0 \
"Cap-well overlap of diffusion must be at least 3 (MOSIS rule #17.4)" active
-# 1851 "scmos.tech.out"
+# 1865 "scmos.tech.out"
width wcap 3 \
"Well-capacitor must be at least 3 (MOSIS rule #18.1)"
@@ -1230,7 +5252,7 @@ drc
"CCD channel width must be at least 4 (MOSIS rule #19.1)"
width nbdc 4 \
"CCD contact width must be at least 4 (MOSIS rule #19.1)"
-# 1896 "scmos.tech.out"
+# 1910 "scmos.tech.out"
edge4way nbd,nbdc ~(bd,nbd,nbdc)/a 4 (bd,space)/i 0 0 \
"CCD channel spacing must be at least 4 (MOSIS rule #19.2)" implant
edge4way nbd,nbdc ~(poly,nbd,nbdc)/a 4 ~(poly,nbd,nbdc)/a ~(poly,nbd,nbdc)/a 4 \
@@ -1251,7 +5273,7 @@ drc
"CCD-diffusion contact spacing to poly must be at least 1 (MOSIS CCD rule)"
edge4way nbd poly,el 1 bd 0 0 \
"Missing Buried CCD Difussion layer (MOSIS CCD rule)" implant
-# 1928 "scmos.tech.out"
+# 1942 "scmos.tech.out"
edge (~hnwell)/w hnwell 10 hnwell hnwell 10\
"High-Voltage N-Well width must be at least 10 (MOSIS rule #1.1)"
edge (~hpwell)/w hpwell 10 hpwell hpwell 10\
@@ -1298,7 +5320,7 @@ drc
"N-substrate diffusion and HVP-well must be separated by 3 (MOSIS rule #2.4+20.3)"
spacing psd,psc/a hnwell 3 touching_illegal \
"P-substrate diffusion and HVN-well must be separated by 3 (MOSIS rule #2.4+20.3)"
-# 1982 "scmos.tech.out"
+# 1996 "scmos.tech.out"
edge (~hndc)/a hndc/a 6 hndc/a hndc/a 6\
"High-Voltage Diffusion contact width must be at least 6 (MOSIS rule #20.5)"
edge (~hpdc)/a hpdc/a 6 hpdc/a hpdc/a 6\
@@ -1331,6 +5353,656 @@ extract
# 1 "./extract_template/scmosExt.tech.in" 1
+# 79 "./extract_template/scmosExt.tech.in"
+# 1 "./extract_template/scmosExt100.tech.in" 1
+# 9 "./extract_template/scmosExt100.tech.in"
+style lambda=1.0(scna20_orb)
+
+
+
+
+ cscale 1
+ lambda 100
+ step 100
+ sidehalo 0
+
+
+
+
+
+
+
+ areacap (ndiff,nsd,ndc,nsc)/a 0
+ perimc (ndiff,nsd,ndc,nsc)/a space,pwell 0
+
+ areacap (pdiff,psd,pdc,psc)/a 0
+ perimc (pdiff,psd,pdc,psc)/a space,nwell 0
+# 40 "./extract_template/scmosExt100.tech.in"
+ areacap (poly,pc)/a 39
+ areacap cc/a,cap 39
+ overlap (poly,pc)/a nwell,pwell 39
+ areacap poly2,ec/a 50
+
+ perimc (poly,pc)/a ~(poly,pc)/a 80
+ sideoverlap (poly,pc)/a ~(poly,pc)/a nwell,pwell 80
+
+
+
+
+
+ areacap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 47
+ overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 nwell,pwell 47 (poly,pc)/a,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a
+ overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 47
+ overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (poly,pc)/a 30
+ overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 poly2,cap 40
+
+
+
+
+
+ areacap (m2,m2c,m3c,pad)/m2 19
+ overlap (m2,m2c,m3c,pad)/m2 nwell,pwell 19 (poly,pc)/a,(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a
+ overlap (m2,m2c,m3c,pad)/m2 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 22 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1
+ overlap (m2,m2c,m3c,pad)/m2 (poly,pc)/a 19 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1
+ overlap (m2,m2c,m3c,pad)/m2 poly2 40 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1
+ overlap (m2,m2c,m3c,pad)/m2 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 45
+
+
+
+
+
+
+
+ device mosfet pfet pfet pdiff,pdc nwell Vdd! 204 450
+ device mosfet nfet nfet ndiff,ndc pwell Gnd! 150 450
+ device mosfet epfet epfet pdiff,pdc nwell Vdd! 204 450
+ device mosfet enfet enfet ndiff,ndc pwell Gnd! 150 450
+
+
+
+
+ device capacitor None cap,capc/a poly,pc 120 745
+
+
+
+ device bjt npn pbase,pbc/a emit,emc/a nwell
+
+ fetresis nfet linear 14100
+ fetresis pfet linear 48100
+ fetresis nfet saturation 14100
+ fetresis pfet saturation 48100
+
+ fetresis enfet linear 14100
+ fetresis epfet linear 48100
+ fetresis enfet saturation 14100
+ fetresis epfet saturation 48100
+
+
+
+
+
+ resist (ndiff,nsd,ndc/act,nsc/act) 26670
+ resist (pdiff,psd,pdc/act,psc/act) 59550
+ resist (poly,pc/act,pfet,nfet) 23860
+ resist poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet 19690
+ resist em,emc/a 27260
+ resist pbase,pbc/a 2000000
+ resist (metal1,m2c/metal1) 49
+ resist (metal2,via/m2,pad) 26
+ resist nwell 2505830
+
+ contact pc 4 11000
+ contact ec/a,capc/a 4 9000
+ contact ndc,pdc,nsc,psc 4 18710
+ contact pdc/a,psc/a 4 100560
+ contact m2c 4 30
+
+
+
+ planeorder implant 0
+ planeorder well 1
+ planeorder active 2
+ planeorder metal1 3
+ planeorder metal2 4
+ planeorder metal3 5
+ planeorder oxide 6
+
+
+
+ height nwell -0.1 0.1
+ height ndiff,pdiff,nndiff,ppdiff -0.075 0.075
+ height poly,pfet,nfet 0.1 0.05
+ height ndc,pdc,nsc,psc 0.001 0.25
+ height pc 0.1 0.15
+ height m1 0.2 0.05
+ height m2c 0.2 0.15
+ height m2 0.3 0.05
+
+
+style lambdaSp=1.0(scpe20_orb)
+
+
+
+
+ lambda 100
+ step 100
+ sidehalo 0
+
+
+
+
+
+
+
+ areacap (ndiff,nsd,ndc,nsc)/a 0
+ perimc (ndiff,nsd,ndc,nsc)/a space,pwell 0
+
+ areacap (pdiff,psd,pdc,psc)/a 0
+ perimc (pdiff,psd,pdc,psc)/a space,nwell 0
+# 171 "./extract_template/scmosExt100.tech.in"
+ areacap (poly,pc)/a 57
+ overlap (poly,pc)/a nwell,pwell 57
+
+ perimc (poly,pc)/a ~(poly,pc)/a 168
+ sideoverlap (poly,pc)/a ~(poly,pc)/a nwell,pwell 168
+
+
+
+
+
+ areacap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 41
+ overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 nwell,pwell 41 (poly,pc)/a,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a
+ overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 41
+ overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (poly,pc)/a 33
+ overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 poly2,cap 45
+
+
+
+
+
+ areacap (m2,m2c,m3c,pad)/m2 21
+ overlap (m2,m2c,m3c,pad)/m2 nwell,pwell 21 (poly,pc)/a,(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a
+ overlap (m2,m2c,m3c,pad)/m2 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 21 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1
+ overlap (m2,m2c,m3c,pad)/m2 (poly,pc)/a 25 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1
+ overlap (m2,m2c,m3c,pad)/m2 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 33
+
+
+
+
+
+ fet pfet pdiff,pdc 2 pfet Vdd! nwell 204 450
+ fet nfet ndiff,ndc 2 nfet Gnd! pwell 150 450
+
+ fetresis nfet linear 14100
+ fetresis pfet linear 48100
+
+ fetresis nfet saturation 14100
+ fetresis pfet saturation 48100
+
+
+
+
+
+ resist (ndiff,nsd,ndc/act,nsc/act) 26670
+ resist (pdiff,psd,pdc/act,psc/act) 72860
+ resist (poly,pc/act,pfet,nfet) 23860
+ resist poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet 18540
+ resist (metal1,m2c/metal1) 49
+ resist (metal2,via/m2,pad) 26
+ resist pwell 2128280
+
+ contact pc 4 12800
+ contact ec/a,capc/a 4 8420
+ contact (ndc,nsc)/a 4 36660
+ contact (psc,pdc)/a 4 56300
+ contact m2c 4 30
+
+
+
+ planeorder implant 0
+ planeorder well 1
+ planeorder active 2
+ planeorder metal1 3
+ planeorder metal2 4
+ planeorder metal3 5
+ planeorder oxide 6
+# 80 "./extract_template/scmosExt.tech.in" 2
+# 1 "./extract_template/scmosExt080.tech.in" 1
+# 9 "./extract_template/scmosExt080.tech.in"
+style lambda=0.8(scna16_ami)
+
+
+
+
+ cscale 1
+ lambda 80
+ step 100
+ sidehalo 0
+
+
+
+
+
+
+
+ areacap (ndiff,nsd,ndc,nsc)/a 0
+ perimc (ndiff,nsd,ndc,nsc)/a space,pwell 0
+
+ areacap (pdiff,psd,pdc,psc)/a 0
+ perimc (pdiff,psd,pdc,psc)/a space,nwell 0
+# 40 "./extract_template/scmosExt080.tech.in"
+ areacap (poly,pc)/a 22
+ overlap (poly,pc)/a nwell,pwell 22
+
+
+
+
+
+ areacap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 20
+ overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 nwell,pwell 20 (poly,pc)/a,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a
+ overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 20
+ overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (poly,pc)/a 25
+
+
+
+
+
+ areacap (m2,m2c,m3c,pad)/m2 10
+ overlap (m2,m2c,m3c,pad)/m2 nwell,pwell 12 (poly,pc)/a,(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a
+ overlap (m2,m2c,m3c,pad)/m2 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 12 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1
+ overlap (m2,m2c,m3c,pad)/m2 (poly,pc)/a 11 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1
+ overlap (m2,m2c,m3c,pad)/m2 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 23
+
+
+
+
+
+ fet pfet pdiff,pdc 2 pfet Vdd! nwell 204 450
+ fet nfet ndiff,ndc 2 nfet Gnd! pwell 150 450
+ fet epfet pdiff,pdc 2 epfet Vdd! nwell 204 450
+ fet enfet ndiff,ndc 2 enfet Gnd! pwell 150 450
+
+ fetresis nfet linear 14100
+ fetresis pfet linear 48100
+ fetresis nfet saturation 14100
+ fetresis pfet saturation 48100
+
+
+
+
+
+ resist (ndiff,nsd,ndc/act,nsc/act) 51680
+ resist (pdiff,psd,pdc/act,psc/act) 74800
+ resist (poly,pc/act,pfet,nfet) 34780
+ resist poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet 22400
+ resist (metal1,m2c/metal1) 48
+ resist (metal2,via/m2,pad) 28
+ resist nwell 1446400
+
+ contact pc 4 61560
+ contact ec/a,capc/a 4 12010
+ contact ndc,pdc,nsc,psc 4 45780
+ contact pdc/a,psc/a 4 32310
+ contact m2c 4 37570
+
+
+
+ planeorder implant 0
+ planeorder well 1
+ planeorder active 2
+ planeorder metal1 3
+ planeorder metal2 4
+ planeorder metal3 5
+ planeorder oxide 6
+# 81 "./extract_template/scmosExt.tech.in" 2
+# 1 "./extract_template/scmosExt060_orb.tech.in" 1
+
+
+
+
+
+
+
+style lambda=0.6(orb_scne12)
+
+
+
+
+ lambda 60
+ step 100
+ sidehalo 0
+
+
+
+
+
+
+ areacap nwell 35
+ perimc nwell ~(nwell) 47
+
+
+ areacap ndiff,nsd,ndc/a,nsc/a 0
+ areacap pdiff,psd,pdc/a,psc/a 0
+
+ perimc ndiff,nsd,ndc/a,nsc/a space,pwell 0
+ perimc pdiff,psd,pdc/a,psc/a space,nwell 0
+# 42 "./extract_template/scmosExt060_orb.tech.in"
+ areacap (poly,pc)/a 29
+ overlap (poly,pc)/a nwell,pwell 29
+
+ perimc (poly,pc)/a ~(poly,pc)/a 37
+
+
+
+ areacap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 16
+ overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 nwell,pwell 16 (poly,pc)/a,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a
+ overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 16
+ overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (poly,pc)/a 19
+
+ perimc (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 41
+ sideoverlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 nwell,pwell 41 ((poly,pc)/a,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a)
+ sideoverlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 41
+
+
+
+
+ areacap (m2,m2c,m3c,pad)/m2 10
+ overlap (m2,m2c,m3c,pad)/m2 nwell,pwell 10 (poly,pc)/a,(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a
+ overlap (m2,m2c,m3c,pad)/m2 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 10 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1
+ overlap (m2,m2c,m3c,pad)/m2 (poly,pc)/a 12 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1
+ overlap (m2,m2c,m3c,pad)/m2 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 14
+
+ perimc (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 42
+ sideoverlap (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 nwell,pwell 42 ((m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(poly,pc)/a,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a)
+ sideoverlap (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 42 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1
+
+
+
+
+
+ device mosfet pfet pfet pdiff,pdc nwell Vdd! 270 623
+ device mosfet nfet nfet ndiff,ndc pwell Gnd! 90 623
+
+
+ device capacitor None cap,capc/a poly,pc 90 730
+ device bjt npn pbase,pbc/a emit,emc/a nwell
+
+
+ fetresis nfet linear 9700
+ fetresis pfet linear 35700
+
+
+
+ contact pc 4 16210
+ contact ec 4 13510
+ contact ndc,nsc, 4 56490
+ contact pdc,psc, 4 181400
+ contact m2c 4 43330
+
+
+ resist ndiff,nsd,ndc/a,nsc/a 43180
+ resist pdiff,psd,pdc/a,psc/a 79770
+ resist (poly,pc/act,pfet,nfet) 22160
+ resist poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet 21140
+ resist (metal1,m2c/metal1) 51
+ resist (metal2,via/m2,pad) 26
+ resist nwell 1195000
+
+
+
+ planeorder implant 0
+ planeorder well 1
+ planeorder active 2
+ planeorder metal1 3
+ planeorder metal2 4
+ planeorder metal3 5
+ planeorder oxide 6
+# 82 "./extract_template/scmosExt.tech.in" 2
+# 1 "./extract_template/scmosExt34.tech.in" 1
+
+
+
+
+
+
+
+style lambda=0.6(hp)
+
+
+
+
+ lambda 60
+ step 100
+ sidehalo 6
+
+
+
+
+
+
+ areacap nwell 35
+ perimc nwell ~(nwell) 47
+
+
+ areacap ndiff,nsd,ndc/a,nsc/a 0
+ areacap pdiff,psd,pdc/a,psc/a 0
+
+ perimc ndiff,nsd,ndc/a,nsc/a space,pwell 0
+ perimc pdiff,psd,pdc/a,psc/a space,nwell 0
+# 42 "./extract_template/scmosExt34.tech.in"
+ areacap (poly,pc)/a 28
+ overlap (poly,pc)/a nwell,pwell 28
+
+ perimc (poly,pc)/a ~(poly,pc)/a 38
+ sideoverlap (poly,pc)/a ~(poly,pc)/a nwell,pwell 38
+ sideoverlap (poly,pc)/a ~(poly,pc)/a (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 34
+ sideoverlap (poly,pc)/a ~(poly,pc)/a (m2,m2c,m3c,pad)/m2 27 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1
+
+ sidewall (poly,pc)/a ~(poly,pc)/a ~(poly,pc)/a (poly,pc)/a 15
+
+
+
+ areacap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 18
+ overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 nwell,pwell 18 (poly,pc)/a,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a
+ overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 46
+ overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (poly,pc)/a 46
+
+ perimc (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 33
+ sideoverlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 nwell,pwell 33 ((poly,pc)/a,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a)
+ sideoverlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 33
+ sideoverlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (poly,pc)/a 33
+ sideoverlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (m2,m2c,m3c,pad)/m2 28
+
+ sidewall (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 27
+
+
+
+
+ areacap (m2,m2c,m3c,pad)/m2 9
+ overlap (m2,m2c,m3c,pad)/m2 nwell,pwell 9 (poly,pc)/a,(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a
+ overlap (m2,m2c,m3c,pad)/m2 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 12 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1
+ overlap (m2,m2c,m3c,pad)/m2 (poly,pc)/a 14 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1
+ overlap (m2,m2c,m3c,pad)/m2 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 30
+
+ perimc (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 22
+ sideoverlap (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 nwell,pwell 22 ((m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(poly,pc)/a,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a)
+ sideoverlap (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 20 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1
+ sideoverlap (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 (poly,pc)/a 22 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1
+ sideoverlap (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 28
+
+ sidewall (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 (m2,m2c,m3c,pad)/m2 33
+
+
+
+
+
+ fet pfet pdiff,pdc 2 pfet Vdd! nwell 270 623
+ fet nfet ndiff,ndc 2 nfet Gnd! pwell 90 623
+ fet wcap ndiff,ndc 1 wcap Gnd! pwell 300 0
+
+
+ fetresis nfet linear 9700
+ fetresis pfet linear 35700
+
+
+
+ contact pc 4 16210
+ contact ndc,nsc, 4 77000
+ contact pdc,psc, 4 44260
+ contact m2c 4 150
+
+
+ resist ndiff,nsd,ndc/a,nsc/a 99630
+ resist pdiff,psd,pdc/a,psc/a 120000
+ resist (poly,pc/act,pfet,nfet) 25000
+ resist (metal1,m2c/metal1) 60
+ resist (metal2,via/m2,pad) 40
+ resist nwell 1500000
+
+
+
+ planeorder implant 0
+ planeorder well 1
+ planeorder active 2
+ planeorder metal1 3
+ planeorder metal2 4
+ planeorder metal3 5
+ planeorder oxide 6
+# 83 "./extract_template/scmosExt.tech.in" 2
+# 1 "./extract_template/scmosExt26b.tech.in" 1
+# 13 "./extract_template/scmosExt26b.tech.in"
+style lambda=0.5
+
+
+
+
+ lambda 50
+ step 100
+ sidehalo 8
+
+
+
+
+
+
+ areacap nwell 40
+ perimc nwell ~(nwell) 100
+
+
+
+ areacap (ndiff,nsd,ndc,nsc)/a 0
+ perimc (ndiff,nsd,ndc,nsc)/a space,pwell 0
+
+ areacap (pdiff,psd,pdc,psc)/a 0
+ perimc (pdiff,psd,pdc,psc)/a space,nwell 0
+# 51 "./extract_template/scmosExt26b.tech.in"
+ areacap (poly,pc)/a 15
+ overlap (poly,pc)/a nwell,pwell 15
+
+ perimc (poly,pc)/a ~(poly,pc)/a 22
+ sideoverlap (poly,pc)/a ~(poly,pc)/a nwell,pwell 22
+ sideoverlap (poly,pc)/a ~(poly,pc)/a (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 10
+ sideoverlap (poly,pc)/a ~(poly,pc)/a (m2,m2c,m3c,pad)/m2 6 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1
+ sideoverlap (poly,pc)/a ~(poly,pc)/a (m3,m3c,pad)/m3 4 ((m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(m2,m2c,m3c,pad)/m2)
+
+ sidewall (poly,pc)/a ~(poly,pc)/a ~(poly,pc)/a (poly,pc)/a 11
+
+
+
+
+ areacap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 8
+ overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 nwell,pwell 8 (poly,pc)/a,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a
+ overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 14
+ overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (poly,pc)/a 14
+
+ perimc (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 22
+ sideoverlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 nwell,pwell 22 ((poly,pc)/a,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a)
+ sideoverlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 25
+ sideoverlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (poly,pc)/a 25
+ sideoverlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (m2,m2c,m3c,pad)/m2 12
+ sideoverlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (m3,m3c,pad)/m3 7 (m2,m2c,m3c,pad)/m2
+
+ sidewall (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 27
+
+
+
+
+ areacap (m2,m2c,m3c,pad)/m2 4
+ overlap (m2,m2c,m3c,pad)/m2 nwell,pwell 4 (poly,pc)/a,(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a
+ overlap (m2,m2c,m3c,pad)/m2 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 5 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1
+ overlap (m2,m2c,m3c,pad)/m2 (poly,pc)/a 6 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1
+ overlap (m2,m2c,m3c,pad)/m2 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 9
+
+ perimc (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 18
+ sideoverlap (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 nwell,pwell 18 ((m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(poly,pc)/a,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a)
+ sideoverlap (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 19 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1
+ sideoverlap (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 (poly,pc)/a 20 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1
+ sideoverlap (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 23
+ sideoverlap (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 (m3,m3c,pad)/m3 10
+
+ sidewall (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 (m2,m2c,m3c,pad)/m2 33
+
+
+
+
+ areacap (m3,m3c,pad)/m3 3
+ overlap (m3,m3c,pad)/m3 nwell,pwell 3 (poly,pc)/a,(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(m2,m2c,m3c,pad)/m2,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a
+ overlap (m3,m3c,pad)/m3 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 3 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(m2,m2c,m3c,pad)/m2
+ overlap (m3,m3c,pad)/m3 (poly,pc)/a 3 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(m2,m2c,m3c,pad)/m2
+ overlap (m3,m3c,pad)/m3 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 4 (m2,m2c,m3c,pad)/m2
+ overlap (m3,m3c,pad)/m3 (m2,m2c,m3c,pad)/m2 9
+
+ perimc (m3,m3c,pad)/m3 ~(m3,m3c,pad)/m3 17
+ sideoverlap (m3,m3c,pad)/m3 ~(m3,m3c,pad)/m3 nwell,pwell 17 ((ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a,(poly,pc)/a,(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(m2,m2c,m3c,pad)/m2)
+ sideoverlap (m3,m3c,pad)/m3 ~(m3,m3c,pad)/m3 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 17 ((m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(m2,m2c,m3c,pad)/m2)
+ sideoverlap (m3,m3c,pad)/m3 ~(m3,m3c,pad)/m3 (poly,pc)/a 17 ((m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(m2,m2c,m3c,pad)/m2)
+ sideoverlap (m3,m3c,pad)/m3 ~(m3,m3c,pad)/m3 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 20 ((m2,m2c,m3c,pad)/m2)
+ sideoverlap (m3,m3c,pad)/m3 ~(m3,m3c,pad)/m3 (m2,m2c,m3c,pad)/m2 25
+
+ sidewall (m3,m3c,pad)/m3 ~(m3,m3c,pad)/m3 ~(m3,m3c,pad)/m3 (m3,m3c,pad)/m3 50
+
+
+
+
+
+ fet pfet pdiff,pdc 2 pfet Vdd! nwell 204 450
+ fet nfet ndiff,ndc 2 nfet Gnd! pwell 150 450
+
+
+
+ fetresis nfet linear 14100
+ fetresis pfet linear 48100
+
+ fetresis nfet saturation 14100
+ fetresis pfet saturation 48100
+
+
+
+
+
+ resist (ndiff,nsd,ndc/act,nsc/act) 3800
+ resist (pdiff,psd,pdc/act,psc/act) 3800
+ resist (poly,pc/act,pfet,nfet) 5000
+ resist (metal1,m2c/metal1) 81
+ resist (metal2,via/m2,pad) 81
+ resist (metal3,pad/m3,via2/m3) 34
+ resist nwell 1980000
+
+ contact pc 4 15000
+ contact ndc,pdc,nsc,psc 4 1500
+ contact m2c 4 500
+ contact m3c 4 500
+
+
+
+ planeorder implant 0
+ planeorder well 1
+ planeorder active 2
+ planeorder metal1 3
+ planeorder metal2 4
+ planeorder metal3 5
+ planeorder oxide 6
+# 84 "./extract_template/scmosExt.tech.in" 2
# 97 "./extract_template/scmosExt.tech.in"
# 1 "./extract_template/scmosExtDiag.tech.in" 1
@@ -1386,8 +6058,8 @@ style check_nsubstr
noplaneordering
# 97 "./extract_template/scmosExt.tech.in" 2
-# 2014 "scmos.tech.out" 2
-# 2819 "scmos.tech.out"
+# 2028 "scmos.tech.out" 2
+# 2833 "scmos.tech.out"
end
@@ -1990,7 +6662,7 @@ plot
pwell 1 4
nwell 2 4
- silk 10 5
+
@@ -1999,11 +6671,11 @@ plot
draw metal1
draw metal2
- draw metal3
- draw pwell
- draw nwell
- draw silk
- map silk metal2
+
+
+
+
+
draw polysilicon
draw ndiffusion