diff --git a/scmos.tech b/scmos.tech index 7fa2348755a46a30217962cecd0356bf8b2a3fe2..dfed65d8bfd6f24ea0335f92ae5a3c063c94bbe7 100644 --- a/scmos.tech +++ b/scmos.tech @@ -1685,11 +1685,7 @@ style lambda=0.5(gen)(libresilicon) templayer poly_parts polysilicon,polycontact,nfet,pfet,rpoly,polypdiff,polyndiff,ndpolycontact,pdpolycontact,nbsfet,pbsfet,spfet,snfet,pbpoly,nbpoly,hnfet,hpfet,rnfet,rpfet - templayer silicide_stop rpoly,rnfet,rpfet - - templayer silicide_stop_unscaled rpdiffusion,rndiffusion - - templayer silicide_stop_scaled silicide_stop + templayer silicide_stop rpoly,rnfet,rpfet,rpdiffusion,rndiffusion grow 100 templayer nimplant ndiff,nfet,ndc,nnd,nnc,pbnc,pbnd,nbnc,nbnd,snfet,pbsfet,hnfet,hndc,hndiff,rndiff,rpdiff,rpfet,rnfet @@ -1777,7 +1773,7 @@ style lambda=0.5(gen)(libresilicon) layer CSP fox_pimplant,pimplant_only calma 12 0 - layer CRG silicide_stop_scaled,silicide_stop_unscaled + layer CRG silicide_stop calma 13 0 layer CCA contacts