diff --git a/process_implementations/hkust/steps_dry.pdf b/process_implementations/hkust/steps_dry.pdf index 73a25fc260f9163419b9bbaaa89cc3644571ca64..3bf751be6746e1019ffbd1d0c425c8a47ce52e01 100644 Binary files a/process_implementations/hkust/steps_dry.pdf and b/process_implementations/hkust/steps_dry.pdf differ diff --git a/process_implementations/hkust/steps_dry.yaml b/process_implementations/hkust/steps_dry.yaml index bb223650d2b388112ede241abf6c593cd28bf671..da585f7ce966628d775ea9530051284a4c240ab3 100644 --- a/process_implementations/hkust/steps_dry.yaml +++ b/process_implementations/hkust/steps_dry.yaml @@ -56,16 +56,16 @@ process: "RCA-1", requirement: "10 minutes", }, - { - equipment: WET-C1, - process: "Nitride strip", - requirement: "Remove CMP endstop", - }, { equipment: DIF-A1, process: "Densify LTO", requirement: "30 minutes @ 850\\degreesC in inert atmosphere", }, + { + equipment: WET-C1, + process: "Nitride strip", + requirement: "Remove CMP endstop", + }, { equipment: WET-A2, process: "Pad oxide removal/smoothening", diff --git a/process_implementations/hkust/steps_wet.pdf b/process_implementations/hkust/steps_wet.pdf index 5f27025a1a851adfd5cae420190a31a0ff737a77..7a21e35885ccd2c596b9b1b1997ad82ec94135f0 100644 Binary files a/process_implementations/hkust/steps_wet.pdf and b/process_implementations/hkust/steps_wet.pdf differ