diff --git a/process_steps/process_hightech/process_hightech_interconnect.tex b/process_steps/process_hightech/process_hightech_interconnect.tex index 31ec03f5908089df3a82a38a1c76ed48b856f7f6..f138929043586fe11f38e2df0f08ff31f8ea6148 100644 --- a/process_steps/process_hightech/process_hightech_interconnect.tex +++ b/process_steps/process_hightech/process_hightech_interconnect.tex @@ -30,7 +30,7 @@ except that the glass layer is the top oxide opening and doesn't get any more me An example of the general flow can be seen in \autoref{chapter_silicide_and_cmp} where it already has been performed for the interface area between back end and front end process. -We deposit 150nm LTO and etch holes into it, in order to contact through to the lower layer. +We deposit 1\um LTO, CMP it and etch holes into it, in order to contact through to the lower layer. For the first metal layer (\autoref{chapter_metal1}), the etch stop is silicide and we have to sputter Nickel, as a diffusion barrier, before we sputter any Aluminum, because the $Ti Si_2$ would react with the Aluminum to an high resistivity material. diff --git a/process_steps/process_hightech/process_hightech_silicification.tex b/process_steps/process_hightech/process_hightech_silicification.tex index bf32ef505f4d58294dfaa1ba38e171a13f0343cf..b485113213fc1e1be1758beff8bbf1bd127f3ecc 100644 --- a/process_steps/process_hightech/process_hightech_silicification.tex +++ b/process_steps/process_hightech/process_hightech_silicification.tex @@ -135,6 +135,11 @@ The unreacted titanium film on the dielectric layer such as $SiO_2$ or $SiN$ is After 2-3 minutes in APM, at room temperature, with a bit mechanical help, all the unreacted Titanium should be gone and the oxide should become visible again. Under \textbf{no circumstance} use a solvent containing HF, since $Ti Si_2$ dissolves in HF or any other Fluoride containing solutions. +Better cleaning results can be achieved by adding mechanical stress to the unreacted metal while having it inside the RCA-1 solution, +so if you can put it into an ultrasonic bath, the RCA-1 cleaning results can be improved by this. + +\newpage + \subsection{CMP}\label{chapter_silicide_and_cmp} After we formed all the active devices and added the silicide in order to reduce the sheet resistance of junctions and contacts we have to make sure that diff --git a/process_steps/process_hightech/process_hightech_steps.pdf b/process_steps/process_hightech/process_hightech_steps.pdf index 0a9aadc491cf01f9356121cf8a3924782814620b..1e83c95f0dde8f4a75442b1e8751da1d804587de 100644 Binary files a/process_steps/process_hightech/process_hightech_steps.pdf and b/process_steps/process_hightech/process_hightech_steps.pdf differ diff --git a/process_steps/process_hightech/tikz_process_steps/contsts.tex b/process_steps/process_hightech/tikz_process_steps/contsts.tex index 1336a432e67d3d9047e9f3e1674e1504a1c28987..761297f57f7164a6981d2ef396db181f329d4ca2 100644 --- a/process_steps/process_hightech/tikz_process_steps/contsts.tex +++ b/process_steps/process_hightech/tikz_process_steps/contsts.tex @@ -26,7 +26,7 @@ \def\UpperMetalResist{9.0} \def\UpperMoreMetalResist{16.0} -\def\CrossSectionOnly{0.2} +\def\CrossSectionOnly{0.3} \def\CrossAndTopSection{0.2} \def\CrossAndTopSectionBig{0.3} diff --git a/process_steps/process_hightech/tikz_process_steps/tripple_well.layout.tex b/process_steps/process_hightech/tikz_process_steps/tripple_well.layout.tex index 618d7fd2924055e945da9f356112f27bae75c94f..a2f43c58d2dd20c4c9627a72a42e342b72e2e45d 100644 --- a/process_steps/process_hightech/tikz_process_steps/tripple_well.layout.tex +++ b/process_steps/process_hightech/tikz_process_steps/tripple_well.layout.tex @@ -14,9 +14,9 @@ \fill[nwell,opacity=\OpacityLayout] (35.25,1.00) rectangle (42.25,7.25); -\fill[pbase,opacity=\OpacityLayout] (35.50,2.0) rectangle (36.60,6.25); +\fill[pbase,opacity=\OpacityLayout] (35.50,2.0) rectangle (36.60,5.00); \fill[pbase,opacity=\OpacityLayout] (35.50,5.0) rectangle (42.00,6.25); -\fill[pbase,opacity=\OpacityLayout] (40.90,2.0) rectangle (42.00,6.25); +\fill[pbase,opacity=\OpacityLayout] (40.90,2.0) rectangle (42.00,5.00); \fill[pbase,opacity=\OpacityLayout] (38.20,2.0) rectangle (39.30,4.00);