diff --git a/process_steps/process_hightech/tikz_process_steps/contsts.tex b/process_steps/process_hightech/tikz_process_steps/contsts.tex index a2488f893bf631c5babafce08b0134f844816281..1336a432e67d3d9047e9f3e1674e1504a1c28987 100644 --- a/process_steps/process_hightech/tikz_process_steps/contsts.tex +++ b/process_steps/process_hightech/tikz_process_steps/contsts.tex @@ -10,8 +10,11 @@ \def\SONOStopTHREE{\SONOStopTWO+0.2} \def\SONOSHeight{\SONOStopTHREE-\SONOStopONE} -\def\LowerMetal{\implantstoptop+0.75} +%\def\LowerMetal{\implantstoptop+0.75} +\def\LowerMetal{\implantstoptop+1.00} + \def\UpperMetal{\LowerMetal+0.5} + \def\LowerMoreMetal{\UpperMetal+0.5} \def\UpperMoreMetal{\LowerMoreMetal+0.5} \def\LowerMoreMetalTwo{\UpperMoreMetal+0.5} diff --git a/process_steps/process_hightech/tikz_process_steps/silicification.metal_removal.b.tex b/process_steps/process_hightech/tikz_process_steps/silicification.metal_removal.b.tex index 4949c46e85bd6c25893da402cf795527e892f4ac..919ff7157e63a8ec54c818612681594f4b7f48a3 100644 --- a/process_steps/process_hightech/tikz_process_steps/silicification.metal_removal.b.tex +++ b/process_steps/process_hightech/tikz_process_steps/silicification.metal_removal.b.tex @@ -1 +1,47 @@ -\input{tikz_process_steps/silicification.a.tex} +\filldraw[line width=0, nitride] (5.00,\STIIslandSurface) -- (4.50,\STIIslandSurface) -- (5.00,\STIIslandSurface+1.4); +\filldraw[line width=0, nitride] (6.00,\STIIslandSurface) -- (6.50,\STIIslandSurface) -- (6.00,\STIIslandSurface+1.4); + +\filldraw[line width=0, nitride] (12.00,\STIIslandSurface) -- (11.50,\STIIslandSurface) -- (12.00,\STIIslandSurface+1.4); +\filldraw[line width=0, nitride] (13.50,\STIIslandSurface) -- (13.00,\STIIslandSurface) -- (13.00,\STIIslandSurface+1.4); + +\filldraw[line width=0, nitride] (21.40,\STIIslandSurface) -- (21.90,\STIIslandSurface) -- (21.90,\STIIslandSurface+1.6); +\filldraw[line width=0, nitride] (22.90,\STIIslandSurface) -- (23.40,\STIIslandSurface) -- (22.90,\STIIslandSurface+1.6); + +\fill[nitride] (44.0,\polytop+0.75) rectangle (44.8,\polytop+1.25); +\fill[nitride] (44.5,\polytop+0.75) rectangle (46.5,\implantstoptop+0.5); +\fill[nitride] (46.2,\polytop+0.75) rectangle (47.0,\polytop+1.25); + +\fill[nitride] (49.5,\polytop+0.75) rectangle (53.5,\polytop+1.25); + +\input{tikz_process_steps/pimplant.a.tex} + +\fill[silicide] ( 1.35,\STIIslandSurface-0.1) rectangle ( 2.35,\STIIslandSurface); +\fill[silicide] ( 2.70,\STIIslandSurface-0.1) rectangle ( 4.50,\STIIslandSurface); +\fill[silicide] ( 5.00,\STIIslandSurface+1.3) rectangle ( 6.00,\STIIslandSurface+1.4); +\fill[silicide] ( 6.50,\STIIslandSurface-0.1) rectangle ( 8.15,\STIIslandSurface); + +\fill[silicide] ( 9.85,\STIIslandSurface-0.1) rectangle (11.50,\STIIslandSurface); +\fill[silicide] (12.00,\STIIslandSurface+1.3) rectangle (13.00,\STIIslandSurface+1.4); +\fill[silicide] (13.50,\STIIslandSurface-0.1) rectangle (15.25,\STIIslandSurface); +\fill[silicide] (15.60,\STIIslandSurface-0.1) rectangle (16.60,\STIIslandSurface); + +\fill[silicide] (19.20,\STIIslandSurface-0.1) rectangle (20.20,\STIIslandSurface); +\fill[silicide] (20.60,\STIIslandSurface-0.1) rectangle (21.40,\STIIslandSurface); +\fill[silicide] (21.90,\STIIslandSurface+1.5) rectangle (22.90,\STIIslandSurface+1.6); +\fill[silicide] (23.40,\STIIslandSurface-0.1) rectangle (24.20,\STIIslandSurface); + +\fill[silicide] (26.90,\STIIslandSurface-0.1) rectangle (27.90,\STIIslandSurface); +\fill[silicide] (28.35,\STIIslandSurface-0.1) rectangle (29.35,\STIIslandSurface); +\fill[silicide] (29.80,\STIIslandSurface-0.1) rectangle (30.80,\STIIslandSurface); +\fill[silicide] (31.25,\STIIslandSurface-0.1) rectangle (32.15,\STIIslandSurface); +\fill[silicide] (32.60,\STIIslandSurface-0.1) rectangle (33.60,\STIIslandSurface); + +\fill[silicide] (35.60,\STIIslandSurface-0.1) rectangle (36.50,\STIIslandSurface); +\fill[silicide] (36.95,\STIIslandSurface-0.1) rectangle (37.85,\STIIslandSurface); +\fill[silicide] (38.30,\STIIslandSurface-0.1) rectangle (39.20,\STIIslandSurface); +\fill[silicide] (39.65,\STIIslandSurface-0.1) rectangle (40.55,\STIIslandSurface); +\fill[silicide] (41.00,\STIIslandSurface-0.1) rectangle (41.90,\STIIslandSurface); + +% diode contacts +\fill[silicide] (43.00,\STIIslandSurface+2.0) rectangle (44.00,\STIIslandSurface+2.15); +\fill[silicide] (47.00,\STIIslandSurface+2.0) rectangle (48.00,\STIIslandSurface+2.15);