diff --git a/process_steps/process_hightech/tikz_process_steps/metal1.tex b/process_steps/process_hightech/tikz_process_steps/metal1.tex index 46436ab0c809067dcc3e75e9d5ed174f7ba96f5c..28d8e9e30627e699757dbf0ecfbde8f1b25593e2 100644 --- a/process_steps/process_hightech/tikz_process_steps/metal1.tex +++ b/process_steps/process_hightech/tikz_process_steps/metal1.tex @@ -1,5 +1,8 @@ \fill[isolationoxide] (0.0,2.0) rectangle (55.0,\LowerMetal); +\paintscaledmetal{nitride}{0.0}{0.5} +\paintscaledmetal{isolationoxide}{0.0}{0.25} + \paintcontacts{brown}{gray}{brown} \input{tikz_process_steps/silicification.a.tex} diff --git a/process_steps/process_hightech/tikz_process_steps/metal2.a.tex b/process_steps/process_hightech/tikz_process_steps/metal2.a.tex index 77f41c3290f0965f6e923265d538ced84c38854c..dc8618f1ac3c2ca31cfc074efeb8e69665823f74 100644 --- a/process_steps/process_hightech/tikz_process_steps/metal2.a.tex +++ b/process_steps/process_hightech/tikz_process_steps/metal2.a.tex @@ -1,3 +1,14 @@ \input{tikz_process_steps/via1.a.tex} -\paintscaledvias{metal2}{\UpperMetal}{\LowerMoreMetal}{0.0} -\paintscaledvias{metal2}{\LowerMoreMetal}{\UpperMoreMetal}{0.25} + +\fill[nitride] (0,\LowerMoreMetal) rectangle (55,\LowerMoreMetal+0.5); +\fill[isolationoxide] (0,\LowerMoreMetal) rectangle (55,\LowerMoreMetal+0.25); + +\paintscaledvias{nitride}{\LowerMoreMetal+0.25}{\UpperMoreMetal+0.5}{0.75} +\paintscaledvias{isolationoxide}{\LowerMoreMetal}{\UpperMoreMetal+0.25}{0.5} + +\paintscaledvias{gray}{\LowerMoreMetal}{\UpperMoreMetal}{0.25} +\paintscaledvias{brown}{\LowerMoreMetal+0.3}{\UpperMoreMetal}{0.25} + +\paintscaledvias{gray}{\UpperMetal}{\LowerMoreMetal}{0.0} +\paintscaledvias{brown}{\UpperMetal+0.2}{\UpperMoreMetal}{-0.2} + diff --git a/process_steps/process_hightech/tikz_process_steps/metal3.a.tex b/process_steps/process_hightech/tikz_process_steps/metal3.a.tex index b07b854761c862e90ee9995e5dc01873623b830a..af82bf3b87485e40f324c1e93bfc8e2a05834b70 100644 --- a/process_steps/process_hightech/tikz_process_steps/metal3.a.tex +++ b/process_steps/process_hightech/tikz_process_steps/metal3.a.tex @@ -1,4 +1,13 @@ \input{tikz_process_steps/via2.a.tex} -\paintscaledvias{metal3}{\UpperMoreMetal}{\LowerMoreMetalTwo}{0.25} -\paintscaledvias{metal3}{\LowerMoreMetalTwo}{\UpperMoreMetalTwo}{0.50} +\fill[nitride] (0,\LowerMoreMetalTwo) rectangle (55,\LowerMoreMetalTwo+0.5); +\fill[isolationoxide] (0,\LowerMoreMetalTwo) rectangle (55,\LowerMoreMetalTwo+0.25); + +\paintscaledvias{nitride}{\LowerMoreMetalTwo+0.25}{\UpperMoreMetalTwo+0.5}{1.00} +\paintscaledvias{isolationoxide}{\LowerMoreMetalTwo}{\UpperMoreMetalTwo+0.25}{0.75} + +\paintscaledvias{gray}{\UpperMoreMetal}{\LowerMoreMetalTwo}{0.25} +\paintscaledvias{gray}{\LowerMoreMetalTwo}{\UpperMoreMetalTwo}{0.50} + +\paintscaledvias{brown}{\UpperMoreMetal+0.25}{\LowerMoreMetalTwo+0.3}{-0.1} +\paintscaledvias{brown}{\LowerMoreMetalTwo+0.3}{\UpperMoreMetalTwo}{0.5} diff --git a/process_steps/process_hightech/tikz_process_steps/paint_functions.tex b/process_steps/process_hightech/tikz_process_steps/paint_functions.tex index e410642e950c12ef838a9f527945569bbcca4518..9efbd438baa011cbb58495eb1fbf6ebbef26f9a2 100644 --- a/process_steps/process_hightech/tikz_process_steps/paint_functions.tex +++ b/process_steps/process_hightech/tikz_process_steps/paint_functions.tex @@ -147,40 +147,40 @@ \fill[#1] (53.00-#4, #2) rectangle (53.50+#4, #3); } -\newcommand{\paintscaledmetal}[2]{ +\newcommand{\paintscaledmetal}[3]{ %pfet -\fill[#1] ( 0.00, \LowerMetal+#2) rectangle (2.40, \UpperMetal); -\fill[#1] ( 2.80, \LowerMetal+#2) rectangle (4.30, \UpperMetal); -\fill[#1] ( 4.70, \LowerMetal+#2) rectangle (6.30, \UpperMetal); -\fill[#1] ( 6.70, \LowerMetal+#2) rectangle (8.40, \UpperMetal); +\fill[#1] ( 0.50-#3, \LowerMetal+#2) rectangle (2.40+#3, \UpperMetal+#3); +\fill[#1] ( 2.80-#3, \LowerMetal+#2) rectangle (4.30+#3, \UpperMetal+#3); +\fill[#1] ( 4.70-#3, \LowerMetal+#2) rectangle (6.30+#3, \UpperMetal+#3); +\fill[#1] ( 6.70-#3, \LowerMetal+#2) rectangle (8.40+#3, \UpperMetal+#3); %nfet -\fill[#1] ( 9.60, \LowerMetal+#2) rectangle (11.30, \UpperMetal); -\fill[#1] (11.70, \LowerMetal+#2) rectangle (13.30, \UpperMetal); -\fill[#1] (13.80, \LowerMetal+#2) rectangle (15.20, \UpperMetal); -\fill[#1] (15.40, \LowerMetal+#2) rectangle (17.00, \UpperMetal); +\fill[#1] ( 9.60-#3, \LowerMetal+#2) rectangle (11.30+#3, \UpperMetal+#3); +\fill[#1] (11.70-#3, \LowerMetal+#2) rectangle (13.30+#3, \UpperMetal+#3); +\fill[#1] (13.80-#3, \LowerMetal+#2) rectangle (15.20+#3, \UpperMetal+#3); +\fill[#1] (15.40-#3, \LowerMetal+#2) rectangle (17.00+#3, \UpperMetal+#3); %sonos -\fill[#1] (18.80, \LowerMetal+#2) rectangle (20.30, \UpperMetal); -\fill[#1] (20.50, \LowerMetal+#2) rectangle (21.50, \UpperMetal); -\fill[#1] (21.80, \LowerMetal+#2) rectangle (23.00, \UpperMetal); -\fill[#1] (23.30, \LowerMetal+#2) rectangle (25.00, \UpperMetal); +\fill[#1] (18.80-#3, \LowerMetal+#2) rectangle (20.30+#3, \UpperMetal+#3); +\fill[#1] (20.50-#3, \LowerMetal+#2) rectangle (21.50+#3, \UpperMetal+#3); +\fill[#1] (21.80-#3, \LowerMetal+#2) rectangle (23.00+#3, \UpperMetal+#3); +\fill[#1] (23.30-#3, \LowerMetal+#2) rectangle (25.00+#3, \UpperMetal+#3); %npn -\fill[#1] (26.00, \LowerMetal+#2) rectangle (27.80, \UpperMetal); -\fill[#1] (28.00, \LowerMetal+#2) rectangle (29.45, \UpperMetal); -\fill[#1] (29.70, \LowerMetal+#2) rectangle (30.90, \UpperMetal); -\fill[#1] (31.15, \LowerMetal+#2) rectangle (32.25, \UpperMetal); -\fill[#1] (32.50, \LowerMetal+#2) rectangle (34.00, \UpperMetal); +\fill[#1] (26.00-#3, \LowerMetal+#2) rectangle (27.80+#3, \UpperMetal+#3); +\fill[#1] (28.00-#3, \LowerMetal+#2) rectangle (29.45+#3, \UpperMetal+#3); +\fill[#1] (29.70-#3, \LowerMetal+#2) rectangle (30.90+#3, \UpperMetal+#3); +\fill[#1] (31.15-#3, \LowerMetal+#2) rectangle (32.25+#3, \UpperMetal+#3); +\fill[#1] (32.50-#3, \LowerMetal+#2) rectangle (34.00+#3, \UpperMetal+#3); %pnp -\fill[#1] (35.00, \LowerMetal+#2) rectangle (36.60, \UpperMetal); -\fill[#1] (36.75, \LowerMetal+#2) rectangle (38.00, \UpperMetal); -\fill[#1] (38.15, \LowerMetal+#2) rectangle (39.35, \UpperMetal); -\fill[#1] (39.50, \LowerMetal+#2) rectangle (40.70, \UpperMetal); -\fill[#1] (40.85, \LowerMetal+#2) rectangle (42.50, \UpperMetal); +\fill[#1] (35.00-#3, \LowerMetal+#2) rectangle (36.60+#3, \UpperMetal+#3); +\fill[#1] (36.75-#3, \LowerMetal+#2) rectangle (38.00+#3, \UpperMetal+#3); +\fill[#1] (38.15-#3, \LowerMetal+#2) rectangle (39.35+#3, \UpperMetal+#3); +\fill[#1] (39.50-#3, \LowerMetal+#2) rectangle (40.70+#3, \UpperMetal+#3); +\fill[#1] (40.85-#3, \LowerMetal+#2) rectangle (42.50+#3, \UpperMetal+#3); %zener -\fill[#1] (42.80, \LowerMetal+#2) rectangle (45.50, \UpperMetal); -\fill[#1] (46.50, \LowerMetal+#2) rectangle (48.10, \UpperMetal); +\fill[#1] (42.80-#3, \LowerMetal+#2) rectangle (45.50+#3, \UpperMetal+#3); +\fill[#1] (46.50-#3, \LowerMetal+#2) rectangle (48.10+#3, \UpperMetal+#3); %resistor -\fill[#1] (48.40, \LowerMetal+#2) rectangle (51.00, \UpperMetal); -\fill[#1] (52.00, \LowerMetal+#2) rectangle (55.00, \UpperMetal); +\fill[#1] (48.40-#3, \LowerMetal+#2) rectangle (51.00+#3, \UpperMetal+#3); +\fill[#1] (52.00-#3, \LowerMetal+#2) rectangle (54.50+#3, \UpperMetal+#3); } \newcommand{\paintscaledcontacts}[2]{ @@ -220,10 +220,10 @@ } \newcommand{\paintcontacts}[3]{ -\paintscaledmetal{#1}{0} +\paintscaledmetal{#1}{0}{0} \paintscaledcontacts{#1}{0} -\paintscaledmetal{#2}{0.1} +\paintscaledmetal{#2}{0.1}{0} \paintscaledcontacts{#2}{0.1} -\paintscaledmetal{#3}{0.35} +\paintscaledmetal{#3}{0.35}{0} \paintscaledcontacts{#3}{0.35} } diff --git a/process_steps/process_hightech/tikz_process_steps/via1.a.tex b/process_steps/process_hightech/tikz_process_steps/via1.a.tex index 2400e443007450c9d3138f099b4d088ab8a75fbc..e8d9502da7cd92671d72a69f850e90b5b18ec195 100644 --- a/process_steps/process_hightech/tikz_process_steps/via1.a.tex +++ b/process_steps/process_hightech/tikz_process_steps/via1.a.tex @@ -1,5 +1,6 @@ \fill[isolationoxide] (0,\LowerMetal) rectangle (55,\LowerMoreMetal); +\input{tikz_process_steps/metal1.tex} + \paintscaledvias{white}{\UpperMetal}{\LowerMoreMetal}{0} -\input{tikz_process_steps/metal1.tex}