From 5fbb3423a37c4bb44d928224cb059edfc07935c4 Mon Sep 17 00:00:00 2001
From: =?UTF-8?q?David=20Lanzend=C3=B6rfer?= <david.lanzendoerfer@o2s.ch>
Date: Mon, 5 Aug 2019 14:20:40 +0800
Subject: [PATCH] Updating the graphics
According to the actual process spec, there needs to be pad oxide and
a layer of nitride as CMP end stop below the thick LTO.
Updated the graphics accordingly
---
.../tikz_process_steps/contact.a.tex | 4 +--
.../tikz_process_steps/metal1.tex | 9 ++++---
.../tikz_process_steps/paint_functions.tex | 26 +++++++++++++++++--
.../tikz_process_steps/silicification.a.tex | 4 +++
.../silicification.metal_deposition.b.tex | 26 +------------------
5 files changed, 36 insertions(+), 33 deletions(-)
diff --git a/process_steps/process_hightech/tikz_process_steps/contact.a.tex b/process_steps/process_hightech/tikz_process_steps/contact.a.tex
index ae8d2f2..96860f9 100644
--- a/process_steps/process_hightech/tikz_process_steps/contact.a.tex
+++ b/process_steps/process_hightech/tikz_process_steps/contact.a.tex
@@ -1,5 +1,5 @@
\fill[isolationoxide] (0,0) rectangle (55.0,\LowerMetal);
-\paintcontacts{white}{white}{white}
-
\input{tikz_process_steps/silicification.a.tex}
+
+\paintcontacts{white}{white}{white}
diff --git a/process_steps/process_hightech/tikz_process_steps/metal1.tex b/process_steps/process_hightech/tikz_process_steps/metal1.tex
index 28d8e9e..9e6354a 100644
--- a/process_steps/process_hightech/tikz_process_steps/metal1.tex
+++ b/process_steps/process_hightech/tikz_process_steps/metal1.tex
@@ -1,8 +1,9 @@
-\fill[isolationoxide] (0.0,2.0) rectangle (55.0,\LowerMetal);
+\fill[nitride] (0.0,\LowerMetal) rectangle (55.0,\LowerMetal+0.5);
+\fill[isolationoxide] (0.0,2.0) rectangle (55.0,\LowerMetal+0.25);
-\paintscaledmetal{nitride}{0.0}{0.5}
+\paintscaledmetal{nitride}{0.25}{0.5}
\paintscaledmetal{isolationoxide}{0.0}{0.25}
-\paintcontacts{brown}{gray}{brown}
-
\input{tikz_process_steps/silicification.a.tex}
+
+\paintcontacts{brown}{gray}{brown}
diff --git a/process_steps/process_hightech/tikz_process_steps/paint_functions.tex b/process_steps/process_hightech/tikz_process_steps/paint_functions.tex
index 9efbd43..166c487 100644
--- a/process_steps/process_hightech/tikz_process_steps/paint_functions.tex
+++ b/process_steps/process_hightech/tikz_process_steps/paint_functions.tex
@@ -11,7 +11,7 @@
\genericstopper{\STIIslandSurface+#2}{24.20-#2}{2.50+#2+#2}{0.10}{0.75}{#1}
\genericstopper{\STIIslandSurface+#2}{27.90-#2}{0.25+#2+#2}{0.10}{0.75}{#1}
-\genericstopper{\STIIslandSurface+#2}{29.25-#2}{0.25+#2+#2}{0.10}{0.75}{#1}
+\genericstopper{\STIIslandSurface+#2}{29.35-#2}{0.25+#2+#2}{0.10}{0.75}{#1}
\genericstopper{\STIIslandSurface+#2}{30.80-#2}{0.25+#2+#2}{0.10}{0.75}{#1}
\genericstopper{\STIIslandSurface+#2}{32.15-#2}{0.25+#2+#2}{0.10}{0.75}{#1}
@@ -20,7 +20,7 @@
\genericstopper{\STIIslandSurface+#2}{36.50-#2}{0.25+#2+#2}{0.10}{0.75}{#1}
\genericstopper{\STIIslandSurface+#2}{37.85-#2}{0.25+#2+#2}{0.10}{0.75}{#1}
\genericstopper{\STIIslandSurface+#2}{39.20-#2}{0.25+#2+#2}{0.10}{0.75}{#1}
-\genericstopper{\STIIslandSurface+#2}{40.50-#2}{0.25+#2+#2}{0.10}{0.75}{#1}
+\genericstopper{\STIIslandSurface+#2}{40.55-#2}{0.25+#2+#2}{0.10}{0.75}{#1}
\filldraw[line width=0, #1] (41.90-#2,\STIIslandSurface+#2) -- (42.00-#2,\STIIslandSurface+#2) -- (42.00-#2,\STIIslandSurface+0.75+#2);
\fill[#1] (42.00-#2,\STIIslandSurface) rectangle (55.0,\STIIslandSurface+0.75+#2);
@@ -147,6 +147,28 @@
\fill[#1] (53.00-#4, #2) rectangle (53.50+#4, #3);
}
+\newcommand{\paintactivecover}[2]{
+\coveringlayer{#1}{#2}{#2}
+\filldraw[line width=0, #1] ( 5.00-#2,\STIIslandSurface+#2) -- ( 4.50-#2,\STIIslandSurface+#2) -- ( 5.00-#2,\STIIslandSurface+1.4+#2);
+\filldraw[line width=0, #1] ( 6.50+#2,\STIIslandSurface+#2) -- ( 6.00+#2,\STIIslandSurface+#2) -- ( 6.00+#2,\STIIslandSurface+1.4+#2);
+
+\filldraw[line width=0, #1] (11.50-#2,\STIIslandSurface+#2) -- (12.00-#2,\STIIslandSurface+#2) -- (12.00-#2,\STIIslandSurface+1.4+#2);
+\filldraw[line width=0, #1] (13.50+#2,\STIIslandSurface+#2) -- (13.00+#2,\STIIslandSurface+#2) -- (13.00+#2,\STIIslandSurface+1.4+#2);
+
+\filldraw[line width=0, #1] (21.40-#2,\STIIslandSurface+#2) -- (21.90-#2,\STIIslandSurface+#2) -- (21.90-#2,\STIIslandSurface+1.6+#2);
+\filldraw[line width=0, #1] (23.40+#2,\STIIslandSurface+#2) -- (22.90+#2,\STIIslandSurface+#2) -- (22.90+#2,\STIIslandSurface+1.6+#2);
+
+\filldraw[line width=0, #1] ( 5.00-#2,\STIIslandSurface) rectangle ( 6.00+#2,\STIIslandSurface+1.4+#2);
+\filldraw[line width=0, #1] (12.00-#2,\STIIslandSurface) rectangle (13.00+#2,\STIIslandSurface+1.4+#2);
+\filldraw[line width=0, #1] (21.90-#2,\STIIslandSurface) rectangle (22.90+#2,\STIIslandSurface+1.6+#2);
+
+\fill[#1] (43.00-#2,\STIIslandSurface+0.75) rectangle (48.00+#2,\polytop+#2+0.75);
+\fill[#1] (44.00-#2,\STIIslandSurface+0.75) rectangle (47.00+#2,\polytop+#2+1.25);
+\fill[#1] (44.50-#2,\STIIslandSurface+0.75) rectangle (46.50+#2,\polytop+#2+2.25);
+\fill[#1] (48.50-#2,\STIIslandSurface+0.75) rectangle (54.50+#2,\polytop+#2+0.75);
+\fill[#1] (49.50-#2,\polytop+0.75) rectangle (53.5+#2,\polytop+#2+1.25);
+}
+
\newcommand{\paintscaledmetal}[3]{
%pfet
\fill[#1] ( 0.50-#3, \LowerMetal+#2) rectangle (2.40+#3, \UpperMetal+#3);
diff --git a/process_steps/process_hightech/tikz_process_steps/silicification.a.tex b/process_steps/process_hightech/tikz_process_steps/silicification.a.tex
index 798236f..890d176 100644
--- a/process_steps/process_hightech/tikz_process_steps/silicification.a.tex
+++ b/process_steps/process_hightech/tikz_process_steps/silicification.a.tex
@@ -1,3 +1,6 @@
+\paintactivecover{nitride}{0.5}
+\paintactivecover{isolationoxide}{0.25}
+
\filldraw[line width=0, nitride] (5.00,\STIIslandSurface) -- (4.50,\STIIslandSurface) -- (5.00,\STIIslandSurface+1.4);
\filldraw[line width=0, nitride] (6.00,\STIIslandSurface) -- (6.50,\STIIslandSurface) -- (6.00,\STIIslandSurface+1.4);
@@ -50,3 +53,4 @@
\fill[silicide] (48.50,\STIIslandSurface+2.0) rectangle (49.50,\STIIslandSurface+2.15);
\fill[silicide] (53.50,\STIIslandSurface+2.0) rectangle (54.50,\STIIslandSurface+2.15);
+
diff --git a/process_steps/process_hightech/tikz_process_steps/silicification.metal_deposition.b.tex b/process_steps/process_hightech/tikz_process_steps/silicification.metal_deposition.b.tex
index 244078c..7a626b0 100644
--- a/process_steps/process_hightech/tikz_process_steps/silicification.metal_deposition.b.tex
+++ b/process_steps/process_hightech/tikz_process_steps/silicification.metal_deposition.b.tex
@@ -1,26 +1,2 @@
-\coveringlayer{titanium}{0.5}{0.5}
-
-\filldraw[line width=0, titanium] (4.50,\STIIslandSurface+0.5) -- (4.00,\STIIslandSurface+0.5) -- (4.50,\STIIslandSurface+1.9);
-\filldraw[line width=0, titanium] (6.50,\STIIslandSurface+0.5) -- (7.00,\STIIslandSurface+0.5) -- (6.50,\STIIslandSurface+1.9);
-
-\filldraw[line width=0, titanium] (11.50,\STIIslandSurface+0.5) -- (11.00,\STIIslandSurface+0.5) -- (11.50,\STIIslandSurface+1.9);
-\filldraw[line width=0, titanium] (14.00,\STIIslandSurface+0.5) -- (13.50,\STIIslandSurface+0.5) -- (13.50,\STIIslandSurface+1.9);
-
-\filldraw[line width=0, titanium] (20.90,\STIIslandSurface+0.5) -- (21.40,\STIIslandSurface+0.5) -- (21.40,\STIIslandSurface+2.1);
-\filldraw[line width=0, titanium] (23.40,\STIIslandSurface+0.5) -- (23.90,\STIIslandSurface+0.5) -- (23.40,\STIIslandSurface+2.1);
-
-\filldraw[line width=0, titanium] ( 4.50,\STIIslandSurface) rectangle ( 6.50,\STIIslandSurface+1.9);
-\filldraw[line width=0, titanium] (11.50,\STIIslandSurface) rectangle (13.50,\STIIslandSurface+1.9);
-\filldraw[line width=0, titanium] (21.40,\STIIslandSurface) rectangle (23.40,\STIIslandSurface+2.1);
-
-\fill[titanium] (42.50,\STIIslandSurface+0.75) rectangle (48.50,\polytop+1.25);
-\fill[titanium] (43.50,\STIIslandSurface+0.75) rectangle (47.50,\polytop+1.75);
-\fill[titanium] (44.00,\STIIslandSurface+0.75) rectangle (47.00,\polytop+2.75);
-
-\fill[titanium] (48.00,\STIIslandSurface+0.75) rectangle (55.00,\polytop+1.25);
-
-
-\fill[titanium] (49.00,\polytop+0.75) rectangle (54.0,\polytop+1.75);
-
-
+\paintactivecover{titanium}{0.5}
\input{tikz_process_steps/silicification.sputter_etching.b.tex}
--
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