diff --git a/process_steps/process_hightech/tikz_process_steps/contact.a.tex b/process_steps/process_hightech/tikz_process_steps/contact.a.tex index ae8d2f24c32f519918fa1f3024e353267ca94c93..96860f913b422e1327581cdf687ba3b5a743d318 100644 --- a/process_steps/process_hightech/tikz_process_steps/contact.a.tex +++ b/process_steps/process_hightech/tikz_process_steps/contact.a.tex @@ -1,5 +1,5 @@ \fill[isolationoxide] (0,0) rectangle (55.0,\LowerMetal); -\paintcontacts{white}{white}{white} - \input{tikz_process_steps/silicification.a.tex} + +\paintcontacts{white}{white}{white} diff --git a/process_steps/process_hightech/tikz_process_steps/metal1.tex b/process_steps/process_hightech/tikz_process_steps/metal1.tex index 28d8e9e30627e699757dbf0ecfbde8f1b25593e2..9e6354a629cce41906e05a226b1da15778968baa 100644 --- a/process_steps/process_hightech/tikz_process_steps/metal1.tex +++ b/process_steps/process_hightech/tikz_process_steps/metal1.tex @@ -1,8 +1,9 @@ -\fill[isolationoxide] (0.0,2.0) rectangle (55.0,\LowerMetal); +\fill[nitride] (0.0,\LowerMetal) rectangle (55.0,\LowerMetal+0.5); +\fill[isolationoxide] (0.0,2.0) rectangle (55.0,\LowerMetal+0.25); -\paintscaledmetal{nitride}{0.0}{0.5} +\paintscaledmetal{nitride}{0.25}{0.5} \paintscaledmetal{isolationoxide}{0.0}{0.25} -\paintcontacts{brown}{gray}{brown} - \input{tikz_process_steps/silicification.a.tex} + +\paintcontacts{brown}{gray}{brown} diff --git a/process_steps/process_hightech/tikz_process_steps/paint_functions.tex b/process_steps/process_hightech/tikz_process_steps/paint_functions.tex index 9efbd438baa011cbb58495eb1fbf6ebbef26f9a2..166c4872fb8ccaea84a23e08a594344431389203 100644 --- a/process_steps/process_hightech/tikz_process_steps/paint_functions.tex +++ b/process_steps/process_hightech/tikz_process_steps/paint_functions.tex @@ -11,7 +11,7 @@ \genericstopper{\STIIslandSurface+#2}{24.20-#2}{2.50+#2+#2}{0.10}{0.75}{#1} \genericstopper{\STIIslandSurface+#2}{27.90-#2}{0.25+#2+#2}{0.10}{0.75}{#1} -\genericstopper{\STIIslandSurface+#2}{29.25-#2}{0.25+#2+#2}{0.10}{0.75}{#1} +\genericstopper{\STIIslandSurface+#2}{29.35-#2}{0.25+#2+#2}{0.10}{0.75}{#1} \genericstopper{\STIIslandSurface+#2}{30.80-#2}{0.25+#2+#2}{0.10}{0.75}{#1} \genericstopper{\STIIslandSurface+#2}{32.15-#2}{0.25+#2+#2}{0.10}{0.75}{#1} @@ -20,7 +20,7 @@ \genericstopper{\STIIslandSurface+#2}{36.50-#2}{0.25+#2+#2}{0.10}{0.75}{#1} \genericstopper{\STIIslandSurface+#2}{37.85-#2}{0.25+#2+#2}{0.10}{0.75}{#1} \genericstopper{\STIIslandSurface+#2}{39.20-#2}{0.25+#2+#2}{0.10}{0.75}{#1} -\genericstopper{\STIIslandSurface+#2}{40.50-#2}{0.25+#2+#2}{0.10}{0.75}{#1} +\genericstopper{\STIIslandSurface+#2}{40.55-#2}{0.25+#2+#2}{0.10}{0.75}{#1} \filldraw[line width=0, #1] (41.90-#2,\STIIslandSurface+#2) -- (42.00-#2,\STIIslandSurface+#2) -- (42.00-#2,\STIIslandSurface+0.75+#2); \fill[#1] (42.00-#2,\STIIslandSurface) rectangle (55.0,\STIIslandSurface+0.75+#2); @@ -147,6 +147,28 @@ \fill[#1] (53.00-#4, #2) rectangle (53.50+#4, #3); } +\newcommand{\paintactivecover}[2]{ +\coveringlayer{#1}{#2}{#2} +\filldraw[line width=0, #1] ( 5.00-#2,\STIIslandSurface+#2) -- ( 4.50-#2,\STIIslandSurface+#2) -- ( 5.00-#2,\STIIslandSurface+1.4+#2); +\filldraw[line width=0, #1] ( 6.50+#2,\STIIslandSurface+#2) -- ( 6.00+#2,\STIIslandSurface+#2) -- ( 6.00+#2,\STIIslandSurface+1.4+#2); + +\filldraw[line width=0, #1] (11.50-#2,\STIIslandSurface+#2) -- (12.00-#2,\STIIslandSurface+#2) -- (12.00-#2,\STIIslandSurface+1.4+#2); +\filldraw[line width=0, #1] (13.50+#2,\STIIslandSurface+#2) -- (13.00+#2,\STIIslandSurface+#2) -- (13.00+#2,\STIIslandSurface+1.4+#2); + +\filldraw[line width=0, #1] (21.40-#2,\STIIslandSurface+#2) -- (21.90-#2,\STIIslandSurface+#2) -- (21.90-#2,\STIIslandSurface+1.6+#2); +\filldraw[line width=0, #1] (23.40+#2,\STIIslandSurface+#2) -- (22.90+#2,\STIIslandSurface+#2) -- (22.90+#2,\STIIslandSurface+1.6+#2); + +\filldraw[line width=0, #1] ( 5.00-#2,\STIIslandSurface) rectangle ( 6.00+#2,\STIIslandSurface+1.4+#2); +\filldraw[line width=0, #1] (12.00-#2,\STIIslandSurface) rectangle (13.00+#2,\STIIslandSurface+1.4+#2); +\filldraw[line width=0, #1] (21.90-#2,\STIIslandSurface) rectangle (22.90+#2,\STIIslandSurface+1.6+#2); + +\fill[#1] (43.00-#2,\STIIslandSurface+0.75) rectangle (48.00+#2,\polytop+#2+0.75); +\fill[#1] (44.00-#2,\STIIslandSurface+0.75) rectangle (47.00+#2,\polytop+#2+1.25); +\fill[#1] (44.50-#2,\STIIslandSurface+0.75) rectangle (46.50+#2,\polytop+#2+2.25); +\fill[#1] (48.50-#2,\STIIslandSurface+0.75) rectangle (54.50+#2,\polytop+#2+0.75); +\fill[#1] (49.50-#2,\polytop+0.75) rectangle (53.5+#2,\polytop+#2+1.25); +} + \newcommand{\paintscaledmetal}[3]{ %pfet \fill[#1] ( 0.50-#3, \LowerMetal+#2) rectangle (2.40+#3, \UpperMetal+#3); diff --git a/process_steps/process_hightech/tikz_process_steps/silicification.a.tex b/process_steps/process_hightech/tikz_process_steps/silicification.a.tex index 798236f68dfaf40c28693e4793b50cd2c9317216..890d1769f19937ecfbf8fc0d028964c4dfb94c94 100644 --- a/process_steps/process_hightech/tikz_process_steps/silicification.a.tex +++ b/process_steps/process_hightech/tikz_process_steps/silicification.a.tex @@ -1,3 +1,6 @@ +\paintactivecover{nitride}{0.5} +\paintactivecover{isolationoxide}{0.25} + \filldraw[line width=0, nitride] (5.00,\STIIslandSurface) -- (4.50,\STIIslandSurface) -- (5.00,\STIIslandSurface+1.4); \filldraw[line width=0, nitride] (6.00,\STIIslandSurface) -- (6.50,\STIIslandSurface) -- (6.00,\STIIslandSurface+1.4); @@ -50,3 +53,4 @@ \fill[silicide] (48.50,\STIIslandSurface+2.0) rectangle (49.50,\STIIslandSurface+2.15); \fill[silicide] (53.50,\STIIslandSurface+2.0) rectangle (54.50,\STIIslandSurface+2.15); + diff --git a/process_steps/process_hightech/tikz_process_steps/silicification.metal_deposition.b.tex b/process_steps/process_hightech/tikz_process_steps/silicification.metal_deposition.b.tex index 244078c7dd676e3ecfcc61cd7007fc08d3042bfb..7a626b0ae237ee59e0c6c8d47acc13f6c1211f5a 100644 --- a/process_steps/process_hightech/tikz_process_steps/silicification.metal_deposition.b.tex +++ b/process_steps/process_hightech/tikz_process_steps/silicification.metal_deposition.b.tex @@ -1,26 +1,2 @@ -\coveringlayer{titanium}{0.5}{0.5} - -\filldraw[line width=0, titanium] (4.50,\STIIslandSurface+0.5) -- (4.00,\STIIslandSurface+0.5) -- (4.50,\STIIslandSurface+1.9); -\filldraw[line width=0, titanium] (6.50,\STIIslandSurface+0.5) -- (7.00,\STIIslandSurface+0.5) -- (6.50,\STIIslandSurface+1.9); - -\filldraw[line width=0, titanium] (11.50,\STIIslandSurface+0.5) -- (11.00,\STIIslandSurface+0.5) -- (11.50,\STIIslandSurface+1.9); -\filldraw[line width=0, titanium] (14.00,\STIIslandSurface+0.5) -- (13.50,\STIIslandSurface+0.5) -- (13.50,\STIIslandSurface+1.9); - -\filldraw[line width=0, titanium] (20.90,\STIIslandSurface+0.5) -- (21.40,\STIIslandSurface+0.5) -- (21.40,\STIIslandSurface+2.1); -\filldraw[line width=0, titanium] (23.40,\STIIslandSurface+0.5) -- (23.90,\STIIslandSurface+0.5) -- (23.40,\STIIslandSurface+2.1); - -\filldraw[line width=0, titanium] ( 4.50,\STIIslandSurface) rectangle ( 6.50,\STIIslandSurface+1.9); -\filldraw[line width=0, titanium] (11.50,\STIIslandSurface) rectangle (13.50,\STIIslandSurface+1.9); -\filldraw[line width=0, titanium] (21.40,\STIIslandSurface) rectangle (23.40,\STIIslandSurface+2.1); - -\fill[titanium] (42.50,\STIIslandSurface+0.75) rectangle (48.50,\polytop+1.25); -\fill[titanium] (43.50,\STIIslandSurface+0.75) rectangle (47.50,\polytop+1.75); -\fill[titanium] (44.00,\STIIslandSurface+0.75) rectangle (47.00,\polytop+2.75); - -\fill[titanium] (48.00,\STIIslandSurface+0.75) rectangle (55.00,\polytop+1.25); - - -\fill[titanium] (49.00,\polytop+0.75) rectangle (54.0,\polytop+1.75); - - +\paintactivecover{titanium}{0.5} \input{tikz_process_steps/silicification.sputter_etching.b.tex}