diff --git a/process_implementations/hkust/steps_dry.pdf b/process_implementations/hkust/steps_dry.pdf
index ffc16923c96234df38d348395c6a283b6051d98a..31c7acd8ab58b3a22c49f339d7768fa3b9243472 100644
Binary files a/process_implementations/hkust/steps_dry.pdf and b/process_implementations/hkust/steps_dry.pdf differ
diff --git a/process_implementations/hkust/steps_dry.yaml b/process_implementations/hkust/steps_dry.yaml
index dd8a0f6cdc5b14c12753dd322012cd0c1e6fd78f..bb223650d2b388112ede241abf6c593cd28bf671 100644
--- a/process_implementations/hkust/steps_dry.yaml
+++ b/process_implementations/hkust/steps_dry.yaml
@@ -346,6 +346,11 @@
                         process: "Planarize oxide",
                         requirement: "1 minute",
                 },
+                {
+                        equipment: WET-J,
+                        process: "RCA-1",
+                        requirement: "Clean after CMP",
+                },
                 normal_exposure,
                 {
                         equipment: DRY-RIE-2,
@@ -407,6 +412,11 @@
                         process: "Planarize oxide",
                         requirement: "1 minute",
                 },
+                {
+                        equipment: WET-J,
+                        process: "RCA-1",
+                        requirement: "Clean after CMP",
+                },
                 normal_exposure,
                 {
                         equipment: DRY-RIE-2,
@@ -468,6 +478,11 @@
                         process: "Planarize oxide",
                         requirement: "1 minute",
                 },
+                {
+                        equipment: WET-J,
+                        process: "RCA-1",
+                        requirement: "Clean after CMP",
+                },
                 normal_exposure,
                 {
                         equipment: DRY-RIE-2,
@@ -529,6 +544,11 @@
                         process: "Planarize oxide",
                         requirement: "1 minute",
                 },
+                {
+                        equipment: WET-J,
+                        process: "RCA-1",
+                        requirement: "Clean after CMP",
+                },
                 normal_exposure,
                 {
                         equipment: DRY-RIE-2,
diff --git a/process_implementations/hkust/steps_wet.pdf b/process_implementations/hkust/steps_wet.pdf
index 0522e1b0c6ecc3f92b1c82d763fbb528a4f43be6..577b8331bdaffe9e68db801b874d0a203e6ff56d 100644
Binary files a/process_implementations/hkust/steps_wet.pdf and b/process_implementations/hkust/steps_wet.pdf differ