diff --git a/process_design_rules/design_rules_overview.tex b/process_design_rules/design_rules_overview.tex index b994010f05543d32274b8a3660f34ce462d312ac..83fd519ae3b7274f1d57b55e6495921e15e3dcb5 100644 --- a/process_design_rules/design_rules_overview.tex +++ b/process_design_rules/design_rules_overview.tex @@ -83,7 +83,7 @@ \begin{tabular}{c l c} 2.2.1 & Minimum Width of NWELL is & $10 \lambda$. \\ 2.2.2 & Minimum Spacing to NWELL at different potential is & $9 \lambda$. \\ - 2.2.3 & Minimum Spacing to NWELL at same potential is & $0 (6?) \lambda$. \\ + 2.2.3 & Minimum Spacing to NWELL at same potential is & $0 \lambda$. \\ \end{tabular} \end{flushleft} @@ -141,7 +141,7 @@ \begin{flushleft} \begin{tabular}{c l c} - 2.6.1 & Exact Width of CONTACT is & $2x2 \lambda$. \\ + 2.6.1 & Exact Width/Height of CONTACT is & $ 2 \lambda \times 2 \lambda$. \\ 2.6.2 & Minimum Overlap by POLY or ACTIVE is & $1 \lambda$. \\ 2.6.3 & Minimum Spacing to CONTACT is & $2 \lambda$. \\ 2.6.4 & Minimum Spacing to Gate is & $2 \lambda$. \\ @@ -179,7 +179,7 @@ \begin{flushleft} \begin{tabular}{c l c} - 2.8.1 & Exact Width of VIA1 is & $2x2 \lambda$. \\ + 2.8.1 & Exact Width/Height of VIA1 is & $ 2 \lambda \times 2 \lambda$. \\ 2.8.2 & Minimum Spacing to VIA1 is & $3 \lambda$. \\ 2.8.3 & Minimum Spacing to CONTACT is & $2 \lambda$. \\ 2.8.4 & Minimum Spacing to POLY or ACTIVE is & $2 \lambda$. \\ @@ -215,7 +215,7 @@ \begin{flushleft} \begin{tabular}{c l c} - 2.10.1 & Exact Width of VIA2 is & $2x2 \lambda$. \\ + 2.10.1 & Exact Width/Height of VIA2 is $ 2 \lambda \times 2 \lambda$. \\ 2.10.2 & Minimum Spacing to VIA2 is & $3 \lambda$. \\ \end{tabular} \end{flushleft} @@ -249,8 +249,8 @@ \begin{flushleft} \begin{tabular}{c l c} - 2.12.1 & Minimum Width of GLASS opening is & $60 \mu m$. \\ - 2.12.2 & Minimum METAL3 Overlap of GLASS opening is & $6 \mu m$. \\ + 2.12.1 & Exact Width/Height of GLASS is & $ 120 \lambda \times 120 \lambda$. \\ + 2.12.2 & Minimum METAL3 Overlap of GLASS opening is & $ 12 \lambda $. \\ 2.12.3 & Minimum Spacing of pad METAL3 to unrelated METAL is & $30 \mu m$. \\ 2.12.4 & Minimum Spacing of pad METAL3 to ACTIVE or POLY is & $15 \mu m$. \\ \end{tabular} diff --git a/process_design_rules/process_design_rules.pdf b/process_design_rules/process_design_rules.pdf index 7ec75c14a6c926e8b8ab61066992526a3544a7d1..6fea4d9847181cc85deb855305a50df066676c3c 100644 Binary files a/process_design_rules/process_design_rules.pdf and b/process_design_rules/process_design_rules.pdf differ diff --git a/process_design_rules/tikz_process_steps b/process_design_rules/tikz_process_steps deleted file mode 120000 index b398b0186c20b7d1d2919932dd6959b8d0b43766..0000000000000000000000000000000000000000 --- a/process_design_rules/tikz_process_steps +++ /dev/null @@ -1 +0,0 @@ -../process_steps/tikz_process_steps \ No newline at end of file