diff --git a/process_implementations/hkust/steps_dry.pdf b/process_implementations/hkust/steps_dry.pdf index e277cdebd51526e2f3dc23b9305f8e420504b7a7..c0f092c5d22b790a0144f062e31923a768660751 100644 Binary files a/process_implementations/hkust/steps_dry.pdf and b/process_implementations/hkust/steps_dry.pdf differ diff --git a/process_implementations/hkust/steps_dry.yaml b/process_implementations/hkust/steps_dry.yaml index 947c0848f097a134bdefd1fd159da7ecad9bf291..13a8d1f5fe9b529e84d535c6b594186ee7466afd 100644 --- a/process_implementations/hkust/steps_dry.yaml +++ b/process_implementations/hkust/steps_dry.yaml @@ -380,13 +380,6 @@ process: "Resist strip", requirement: "10 minutes", }, - ], -} -- { - name: Via 1, - cross_tikz: tikz_process_steps/via1.a.tex, - mask: via1, - steps: [ { equipment: CVD-F4, process: "Pad oxide deposition", @@ -397,6 +390,13 @@ process: "CMP end stop deposition, Silicon nitride", requirement: "100nm", }, + ], +} +- { + name: Via 1, + cross_tikz: tikz_process_steps/via1.a.tex, + mask: via1, + steps: [ { equipment: CVD-F4, process: "Oxide deposition", @@ -441,13 +441,6 @@ process: "Resist strip", requirement: "10 minutes", }, - ], -} -- { - name: Via 2, - cross_tikz: tikz_process_steps/via2.a.tex, - mask: via2, - steps: [ { equipment: CVD-F4, process: "Pad oxide deposition", @@ -458,6 +451,13 @@ process: "CMP end stop deposition, Silicon nitride", requirement: "100nm", }, + ], +} +- { + name: Via 2, + cross_tikz: tikz_process_steps/via2.a.tex, + mask: via2, + steps: [ { equipment: CVD-F4, process: "Oxide deposition", @@ -502,13 +502,6 @@ process: "Resist strip", requirement: "10 minutes", }, - ], -} -- { - name: Glass, - cross_tikz: tikz_process_steps/glass.a.tex, - mask: glass, - steps: [ { equipment: CVD-F4, process: "Pad oxide deposition", @@ -519,6 +512,13 @@ process: "CMP end stop deposition, Silicon nitride", requirement: "100nm", }, + ], +} +- { + name: Glass, + cross_tikz: tikz_process_steps/glass.a.tex, + mask: glass, + steps: [ { equipment: CVD-F4, process: "Oxide deposition", diff --git a/process_implementations/hkust/steps_wet.pdf b/process_implementations/hkust/steps_wet.pdf index dba62d19c4bcb23d424a99ff27c269a46f2e9434..aef0e2d3af7c82aa9f8c64250f2dd2e706e10437 100644 Binary files a/process_implementations/hkust/steps_wet.pdf and b/process_implementations/hkust/steps_wet.pdf differ