diff --git a/tapeout/gf180-large.gds b/tapeout/gf180-large.gds deleted file mode 100644 index d380d7f81864bed8c9a9c2ec2161ffbf7bea0b29..0000000000000000000000000000000000000000 Binary files a/tapeout/gf180-large.gds and /dev/null differ diff --git a/tapeout/gf180-large.pdf b/tapeout/gf180-large.pdf deleted file mode 100644 index 23e1b1f857b27787ed41912424e1f7b3f3bddcd4..0000000000000000000000000000000000000000 Binary files a/tapeout/gf180-large.pdf and /dev/null differ diff --git a/tapeout/gf180-large.tex b/tapeout/gf180-large.tex deleted file mode 100644 index f64e0ea6f00a91f0c199881214b8ed6b05bad960..0000000000000000000000000000000000000000 --- a/tapeout/gf180-large.tex +++ /dev/null @@ -1,979 +0,0 @@ -\documentclass{article}% -\usepackage[T1]{fontenc}% -\usepackage[utf8]{inputenc}% -\usepackage{lmodern}% -\usepackage{textcomp}% -\usepackage{lastpage}% -\usepackage{geometry}% -\geometry{tmargin=0.5in,lmargin=0.5in,bmargin=0.5in,rmargin=0.5in}% -\usepackage{float}% -\usepackage{ragged2e}% -\usepackage{graphicx}% -% -\title{Danube River Test Waver}% -\author{by LibreSilicon}% -% -\begin{document}% -\normalsize% -\maketitle% -This is the automatically generated documentation and guide line for the test structures in the GDSII file, generated by this script.\newline% -% -This is phase two of the reverse engineering/verification of the manufacturing process.\newline% -The structures have been generated assuming basic flags and settings for the pad and size from "configs/gf180{-}large.cfg" as well as variables defined in "configs/gf180.py".\newline% -Those values need to be verified by checking under the microscope, whether the defects have gone away and measuring what the difference between predicted values and measured values is% -\section{Resistors}% -\label{sec:Resistors}% -All the resistor structures for the various available layers, as defined in the configuration are being shown below. They are being measured with a 4 probe station, by applying a constant current over two of the probes, and then measuring the voltage over the other two.\newline% -This is called a Kelvin structure.% -\subsection{Layer: nwell}% -\label{subsec:Layernwell}% -\subsubsection{Structure: NWELL\_V\_50}% -\label{ssubsec:StructureNWELLV50}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/NWELL_V_50.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $1.3953k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 34.884mV% -\newline% -% -The current from the current source should go from pad 2 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: NWELL\_H\_50}% -\label{ssubsec:StructureNWELLH50}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/NWELL_H_50.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $1.3953k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 34.884mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 4 and pad 3% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: NWELL\_V\_100}% -\label{ssubsec:StructureNWELLV100}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/NWELL_V_100.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $697.6744\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 17.442mV% -\newline% -% -The current from the current source should go from pad 2 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: NWELL\_H\_100}% -\label{ssubsec:StructureNWELLH100}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/NWELL_H_100.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $697.6744\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 17.442mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 4 and pad 3% -\newline% -% -\end{minipage} - -% -\subsection{Layer: pwell}% -\label{subsec:Layerpwell}% -\subsubsection{Structure: PWELL\_V\_50}% -\label{ssubsec:StructurePWELLV50}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/PWELL_V_50.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $1.6216k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 40.541mV% -\newline% -% -The current from the current source should go from pad 2 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: PWELL\_H\_50}% -\label{ssubsec:StructurePWELLH50}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/PWELL_H_50.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $1.6216k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 40.541mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 4 and pad 3% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: PWELL\_V\_100}% -\label{ssubsec:StructurePWELLV100}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/PWELL_V_100.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $810.8108\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 20.27mV% -\newline% -% -The current from the current source should go from pad 2 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: PWELL\_H\_100}% -\label{ssubsec:StructurePWELLH100}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/PWELL_H_100.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $810.8108\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 20.27mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 4 and pad 3% -\newline% -% -\end{minipage} - -% -\subsection{Layer: ndiffusion}% -\label{subsec:Layerndiffusion}% -\subsubsection{Structure: NDIFFUSION\_V\_50}% -\label{ssubsec:StructureNDIFFUSIONV50}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/NDIFFUSION_V_50.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $480.0\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 12.0mV% -\newline% -% -The current from the current source should go from pad 2 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: NDIFFUSION\_H\_50}% -\label{ssubsec:StructureNDIFFUSIONH50}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/NDIFFUSION_H_50.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $480.0\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 12.0mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 4 and pad 3% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: NDIFFUSION\_V\_100}% -\label{ssubsec:StructureNDIFFUSIONV100}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/NDIFFUSION_V_100.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $240.0\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 6.0mV% -\newline% -% -The current from the current source should go from pad 2 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: NDIFFUSION\_H\_100}% -\label{ssubsec:StructureNDIFFUSIONH100}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/NDIFFUSION_H_100.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $240.0\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 6.0mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 4 and pad 3% -\newline% -% -\end{minipage} - -% -\subsection{Layer: pdiffusion}% -\label{subsec:Layerpdiffusion}% -\subsubsection{Structure: PDIFFUSION\_V\_50}% -\label{ssubsec:StructurePDIFFUSIONV50}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/PDIFFUSION_V_50.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $788.0\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 19.7mV% -\newline% -% -The current from the current source should go from pad 2 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: PDIFFUSION\_H\_50}% -\label{ssubsec:StructurePDIFFUSIONH50}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/PDIFFUSION_H_50.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $788.0\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 19.7mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 4 and pad 3% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: PDIFFUSION\_V\_100}% -\label{ssubsec:StructurePDIFFUSIONV100}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/PDIFFUSION_V_100.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $394.0\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 9.85mV% -\newline% -% -The current from the current source should go from pad 2 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: PDIFFUSION\_H\_100}% -\label{ssubsec:StructurePDIFFUSIONH100}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/PDIFFUSION_H_100.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $394.0\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 9.85mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 4 and pad 3% -\newline% -% -\end{minipage} - -% -\subsection{Layer: poly}% -\label{subsec:Layerpoly}% -\subsubsection{Structure: POLY\_V\_50}% -\label{ssubsec:StructurePOLYV50}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/POLY_V_50.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $1.1568k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 28.92mV% -\newline% -% -The current from the current source should go from pad 2 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: POLY\_H\_50}% -\label{ssubsec:StructurePOLYH50}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/POLY_H_50.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $1.1568k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 28.92mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 4 and pad 3% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: POLY\_V\_100}% -\label{ssubsec:StructurePOLYV100}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/POLY_V_100.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $578.4\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 14.46mV% -\newline% -% -The current from the current source should go from pad 2 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: POLY\_H\_100}% -\label{ssubsec:StructurePOLYH100}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/POLY_H_100.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $578.4\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 14.46mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 4 and pad 3% -\newline% -% -\end{minipage} - -% -\subsection{Layer: metal1}% -\label{subsec:Layermetal1}% -\subsubsection{Structure: METAL1\_50}% -\label{ssubsec:StructureMETAL150}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL1_50.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $56.1063\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 1.4027mV% -\newline% -% -The current from the current source should go from pad 3 towards pad 4% -\newline% -% -The voltage over the resistor should be measured over pad 2 and pad 1% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: METAL1\_100}% -\label{ssubsec:StructureMETAL1100}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL1_100.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $20.0303\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 500.7583uV% -\newline% -% -The current from the current source should go from pad 3 towards pad 4% -\newline% -% -The voltage over the resistor should be measured over pad 2 and pad 1% -\newline% -% -\end{minipage} - -% -\subsection{Layer: metal2}% -\label{subsec:Layermetal2}% -\subsubsection{Structure: METAL2\_50}% -\label{ssubsec:StructureMETAL250}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL2_50.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $11.855\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 296.375uV% -\newline% -% -The current from the current source should go from pad 3 towards pad 4% -\newline% -% -The voltage over the resistor should be measured over pad 2 and pad 1% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: METAL2\_100}% -\label{ssubsec:StructureMETAL2100}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL2_100.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $5.8968\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 147.4196uV% -\newline% -% -The current from the current source should go from pad 3 towards pad 4% -\newline% -% -The voltage over the resistor should be measured over pad 2 and pad 1% -\newline% -% -\end{minipage} - -% -\subsection{Layer: metal3}% -\label{subsec:Layermetal3}% -\subsubsection{Structure: METAL3\_50}% -\label{ssubsec:StructureMETAL350}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL3_50.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $11.855\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 296.375uV% -\newline% -% -The current from the current source should go from pad 3 towards pad 4% -\newline% -% -The voltage over the resistor should be measured over pad 2 and pad 1% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: METAL3\_100}% -\label{ssubsec:StructureMETAL3100}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL3_100.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $5.8968\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 147.4196uV% -\newline% -% -The current from the current source should go from pad 3 towards pad 4% -\newline% -% -The voltage over the resistor should be measured over pad 2 and pad 1% -\newline% -% -\end{minipage} - -% -\subsection{Layer: metal4}% -\label{subsec:Layermetal4}% -\subsubsection{Structure: METAL4\_50}% -\label{ssubsec:StructureMETAL450}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL4_50.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $11.855\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 296.375uV% -\newline% -% -The current from the current source should go from pad 3 towards pad 4% -\newline% -% -The voltage over the resistor should be measured over pad 2 and pad 1% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: METAL4\_100}% -\label{ssubsec:StructureMETAL4100}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL4_100.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $5.8968\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 147.4196uV% -\newline% -% -The current from the current source should go from pad 3 towards pad 4% -\newline% -% -The voltage over the resistor should be measured over pad 2 and pad 1% -\newline% -% -\end{minipage} - -% -\subsection{Layer: metal5}% -\label{subsec:Layermetal5}% -\subsubsection{Structure: METAL5\_50}% -\label{ssubsec:StructureMETAL550}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL5_50.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $11.8643\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 296.6071uV% -\newline% -% -The current from the current source should go from pad 3 towards pad 4% -\newline% -% -The voltage over the resistor should be measured over pad 2 and pad 1% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: METAL5\_100}% -\label{ssubsec:StructureMETAL5100}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL5_100.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $5.9014\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 147.5357uV% -\newline% -% -The current from the current source should go from pad 3 towards pad 4% -\newline% -% -The voltage over the resistor should be measured over pad 2 and pad 1% -\newline% -% -\end{minipage} - -% -\pagebreak% -\end{document} \ No newline at end of file diff --git a/tapeout/sky130.gds b/tapeout/sky130.gds deleted file mode 100644 index 6151832f56ef09e291496b28a4ee886b63f69a93..0000000000000000000000000000000000000000 Binary files a/tapeout/sky130.gds and /dev/null differ diff --git a/tapeout/sky130.pdf b/tapeout/sky130.pdf deleted file mode 100644 index 44685243af0ae233fc21d6a7d260ab090c454ed4..0000000000000000000000000000000000000000 Binary files a/tapeout/sky130.pdf and /dev/null differ diff --git a/tapeout/sky130.tex b/tapeout/sky130.tex deleted file mode 100644 index b1e02a4d4c8eceb78bcfd242dd6f856c31495347..0000000000000000000000000000000000000000 --- a/tapeout/sky130.tex +++ /dev/null @@ -1,2977 +0,0 @@ -\documentclass{article}% -\usepackage[T1]{fontenc}% -\usepackage[utf8]{inputenc}% -\usepackage{lmodern}% -\usepackage{textcomp}% -\usepackage{lastpage}% -\usepackage{geometry}% -\geometry{tmargin=0.5in,lmargin=0.5in,bmargin=0.5in,rmargin=0.5in}% -\usepackage{float}% -\usepackage{ragged2e}% -\usepackage{graphicx}% -% -\title{Danube River Test Waver}% -\author{by LibreSilicon}% -% -\begin{document}% -\normalsize% -\maketitle% -This is the automatically generated documentation and guide line for the test structures in the GDSII file, generated by this script.\newline% -% -This is phase two of the reverse engineering/verification of the manufacturing process.\newline% -The structures have been generated assuming basic flags and settings for the pad and size from "configs/sky130.cfg" as well as variables defined in "configs/sky130.py".\newline% -Those values need to be verified by checking under the microscope, whether the defects have gone away and measuring what the difference between predicted values and measured values is% -\section{Resistors}% -\label{sec:Resistors}% -All the resistor structures for the various available layers, as defined in the configuration are being shown below. They are being measured with a 4 probe station, by applying a constant current over two of the probes, and then measuring the voltage over the other two.\newline% -This is called a Kelvin structure.% -\subsection{Layer: nwell}% -\label{subsec:Layernwell}% -\subsubsection{Structure: NWELL\_V\_1}% -\label{ssubsec:StructureNWELLV1}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/NWELL_V_1.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $57.0k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 1.425V% -\newline% -% -The current from the current source should go from pad 2 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: NWELL\_H\_1}% -\label{ssubsec:StructureNWELLH1}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/NWELL_H_1.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $57.0k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 1.425V% -\newline% -% -The current from the current source should go from pad 1 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 4 and pad 3% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: NWELL\_V\_2}% -\label{ssubsec:StructureNWELLV2}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/NWELL_V_2.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $28.5k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 712.5mV% -\newline% -% -The current from the current source should go from pad 2 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: NWELL\_H\_2}% -\label{ssubsec:StructureNWELLH2}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/NWELL_H_2.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $28.5k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 712.5mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 4 and pad 3% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: NWELL\_V\_5}% -\label{ssubsec:StructureNWELLV5}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/NWELL_V_5.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $11.4k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 285.0mV% -\newline% -% -The current from the current source should go from pad 2 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: NWELL\_H\_5}% -\label{ssubsec:StructureNWELLH5}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/NWELL_H_5.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $11.4k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 285.0mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 4 and pad 3% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: NWELL\_V\_10}% -\label{ssubsec:StructureNWELLV10}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/NWELL_V_10.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $5.7k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 142.5mV% -\newline% -% -The current from the current source should go from pad 2 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: NWELL\_H\_10}% -\label{ssubsec:StructureNWELLH10}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/NWELL_H_10.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $5.7k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 142.5mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 4 and pad 3% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: NWELL\_V\_20}% -\label{ssubsec:StructureNWELLV20}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/NWELL_V_20.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $2.85k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 71.25mV% -\newline% -% -The current from the current source should go from pad 2 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: NWELL\_H\_20}% -\label{ssubsec:StructureNWELLH20}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/NWELL_H_20.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $2.85k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 71.25mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 4 and pad 3% -\newline% -% -\end{minipage} - -% -\subsection{Layer: pwell}% -\label{subsec:Layerpwell}% -\subsubsection{Structure: PWELL\_V\_1}% -\label{ssubsec:StructurePWELLV1}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/PWELL_V_1.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $217.8571k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 5.4464V% -\newline% -% -The current from the current source should go from pad 2 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: PWELL\_H\_1}% -\label{ssubsec:StructurePWELLH1}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/PWELL_H_1.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $217.8571k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 5.4464V% -\newline% -% -The current from the current source should go from pad 1 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 4 and pad 3% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: PWELL\_V\_2}% -\label{ssubsec:StructurePWELLV2}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/PWELL_V_2.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $108.9286k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 2.7232V% -\newline% -% -The current from the current source should go from pad 2 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: PWELL\_H\_2}% -\label{ssubsec:StructurePWELLH2}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/PWELL_H_2.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $108.9286k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 2.7232V% -\newline% -% -The current from the current source should go from pad 1 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 4 and pad 3% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: PWELL\_V\_5}% -\label{ssubsec:StructurePWELLV5}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/PWELL_V_5.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $43.5714k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 1.0893V% -\newline% -% -The current from the current source should go from pad 2 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: PWELL\_H\_5}% -\label{ssubsec:StructurePWELLH5}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/PWELL_H_5.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $43.5714k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 1.0893V% -\newline% -% -The current from the current source should go from pad 1 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 4 and pad 3% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: PWELL\_V\_10}% -\label{ssubsec:StructurePWELLV10}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/PWELL_V_10.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $21.7857k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 544.643mV% -\newline% -% -The current from the current source should go from pad 2 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: PWELL\_H\_10}% -\label{ssubsec:StructurePWELLH10}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/PWELL_H_10.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $21.7857k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 544.643mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 4 and pad 3% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: PWELL\_V\_20}% -\label{ssubsec:StructurePWELLV20}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/PWELL_V_20.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $10.8929k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 272.321mV% -\newline% -% -The current from the current source should go from pad 2 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: PWELL\_H\_20}% -\label{ssubsec:StructurePWELLH20}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/PWELL_H_20.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $10.8929k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 272.321mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 4 and pad 3% -\newline% -% -\end{minipage} - -% -\subsection{Layer: ndiffusion}% -\label{subsec:Layerndiffusion}% -\subsubsection{Structure: NDIFFUSION\_V\_1}% -\label{ssubsec:StructureNDIFFUSIONV1}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/NDIFFUSION_V_1.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $48.0k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 1.2V% -\newline% -% -The current from the current source should go from pad 2 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: NDIFFUSION\_H\_1}% -\label{ssubsec:StructureNDIFFUSIONH1}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/NDIFFUSION_H_1.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $48.0k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 1.2V% -\newline% -% -The current from the current source should go from pad 1 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 4 and pad 3% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: NDIFFUSION\_V\_2}% -\label{ssubsec:StructureNDIFFUSIONV2}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/NDIFFUSION_V_2.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $24.0k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 600.0mV% -\newline% -% -The current from the current source should go from pad 2 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: NDIFFUSION\_H\_2}% -\label{ssubsec:StructureNDIFFUSIONH2}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/NDIFFUSION_H_2.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $24.0k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 600.0mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 4 and pad 3% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: NDIFFUSION\_V\_5}% -\label{ssubsec:StructureNDIFFUSIONV5}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/NDIFFUSION_V_5.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $9.6k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 240.0mV% -\newline% -% -The current from the current source should go from pad 2 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: NDIFFUSION\_H\_5}% -\label{ssubsec:StructureNDIFFUSIONH5}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/NDIFFUSION_H_5.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $9.6k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 240.0mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 4 and pad 3% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: NDIFFUSION\_V\_10}% -\label{ssubsec:StructureNDIFFUSIONV10}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/NDIFFUSION_V_10.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $4.8k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 120.0mV% -\newline% -% -The current from the current source should go from pad 2 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: NDIFFUSION\_H\_10}% -\label{ssubsec:StructureNDIFFUSIONH10}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/NDIFFUSION_H_10.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $4.8k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 120.0mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 4 and pad 3% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: NDIFFUSION\_V\_20}% -\label{ssubsec:StructureNDIFFUSIONV20}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/NDIFFUSION_V_20.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $2.4k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 60.0mV% -\newline% -% -The current from the current source should go from pad 2 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: NDIFFUSION\_H\_20}% -\label{ssubsec:StructureNDIFFUSIONH20}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/NDIFFUSION_H_20.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $2.4k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 60.0mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 4 and pad 3% -\newline% -% -\end{minipage} - -% -\subsection{Layer: pdiffusion}% -\label{subsec:Layerpdiffusion}% -\subsubsection{Structure: PDIFFUSION\_V\_1}% -\label{ssubsec:StructurePDIFFUSIONV1}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/PDIFFUSION_V_1.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $78.8k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 1.97V% -\newline% -% -The current from the current source should go from pad 2 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: PDIFFUSION\_H\_1}% -\label{ssubsec:StructurePDIFFUSIONH1}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/PDIFFUSION_H_1.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $78.8k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 1.97V% -\newline% -% -The current from the current source should go from pad 1 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 4 and pad 3% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: PDIFFUSION\_V\_2}% -\label{ssubsec:StructurePDIFFUSIONV2}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/PDIFFUSION_V_2.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $39.4k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 985.0mV% -\newline% -% -The current from the current source should go from pad 2 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: PDIFFUSION\_H\_2}% -\label{ssubsec:StructurePDIFFUSIONH2}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/PDIFFUSION_H_2.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $39.4k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 985.0mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 4 and pad 3% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: PDIFFUSION\_V\_5}% -\label{ssubsec:StructurePDIFFUSIONV5}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/PDIFFUSION_V_5.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $15.76k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 394.0mV% -\newline% -% -The current from the current source should go from pad 2 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: PDIFFUSION\_H\_5}% -\label{ssubsec:StructurePDIFFUSIONH5}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/PDIFFUSION_H_5.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $15.76k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 394.0mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 4 and pad 3% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: PDIFFUSION\_V\_10}% -\label{ssubsec:StructurePDIFFUSIONV10}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/PDIFFUSION_V_10.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $7.88k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 197.0mV% -\newline% -% -The current from the current source should go from pad 2 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: PDIFFUSION\_H\_10}% -\label{ssubsec:StructurePDIFFUSIONH10}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/PDIFFUSION_H_10.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $7.88k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 197.0mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 4 and pad 3% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: PDIFFUSION\_V\_20}% -\label{ssubsec:StructurePDIFFUSIONV20}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/PDIFFUSION_V_20.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $3.94k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 98.5mV% -\newline% -% -The current from the current source should go from pad 2 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: PDIFFUSION\_H\_20}% -\label{ssubsec:StructurePDIFFUSIONH20}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/PDIFFUSION_H_20.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $3.94k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 98.5mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 4 and pad 3% -\newline% -% -\end{minipage} - -% -\subsection{Layer: poly}% -\label{subsec:Layerpoly}% -\subsubsection{Structure: POLY\_V\_1}% -\label{ssubsec:StructurePOLYV1}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/POLY_V_1.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $19.28k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 482.0mV% -\newline% -% -The current from the current source should go from pad 2 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: POLY\_H\_1}% -\label{ssubsec:StructurePOLYH1}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/POLY_H_1.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $19.28k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 482.0mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 4 and pad 3% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: POLY\_V\_2}% -\label{ssubsec:StructurePOLYV2}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/POLY_V_2.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $9.64k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 241.0mV% -\newline% -% -The current from the current source should go from pad 2 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: POLY\_H\_2}% -\label{ssubsec:StructurePOLYH2}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/POLY_H_2.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $9.64k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 241.0mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 4 and pad 3% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: POLY\_V\_5}% -\label{ssubsec:StructurePOLYV5}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/POLY_V_5.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $3.856k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 96.4mV% -\newline% -% -The current from the current source should go from pad 2 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: POLY\_H\_5}% -\label{ssubsec:StructurePOLYH5}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/POLY_H_5.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $3.856k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 96.4mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 4 and pad 3% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: POLY\_V\_10}% -\label{ssubsec:StructurePOLYV10}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/POLY_V_10.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $1.928k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 48.2mV% -\newline% -% -The current from the current source should go from pad 2 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: POLY\_H\_10}% -\label{ssubsec:StructurePOLYH10}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/POLY_H_10.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $1.928k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 48.2mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 4 and pad 3% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: POLY\_V\_20}% -\label{ssubsec:StructurePOLYV20}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/POLY_V_20.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $964.0\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 24.1mV% -\newline% -% -The current from the current source should go from pad 2 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: POLY\_H\_20}% -\label{ssubsec:StructurePOLYH20}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/POLY_H_20.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $964.0\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 24.1mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 4 and pad 3% -\newline% -% -\end{minipage} - -% -\subsection{Layer: metal1}% -\label{subsec:Layermetal1}% -\subsubsection{Structure: METAL1\_V\_1}% -\label{ssubsec:StructureMETAL1V1}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL1_V_1.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $451.7647\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 11.294mV% -\newline% -% -The current from the current source should go from pad 2 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: METAL1\_H\_1}% -\label{ssubsec:StructureMETAL1H1}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL1_H_1.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $451.7647\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 11.294mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 4 and pad 3% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: METAL1\_V\_2}% -\label{ssubsec:StructureMETAL1V2}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL1_V_2.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $225.8824\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 5.647mV% -\newline% -% -The current from the current source should go from pad 2 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: METAL1\_H\_2}% -\label{ssubsec:StructureMETAL1H2}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL1_H_2.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $225.8824\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 5.647mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 4 and pad 3% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: METAL1\_H\_5}% -\label{ssubsec:StructureMETAL1H5}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL1_H_5.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $2.4421k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 61.053mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 2 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: METAL1\_V\_5}% -\label{ssubsec:StructureMETAL1V5}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL1_V_5.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $2.4421k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 61.053mV% -\newline% -% -The current from the current source should go from pad 4 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 3% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: METAL1\_H\_10}% -\label{ssubsec:StructureMETAL1H10}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL1_H_10.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $678.1741\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 16.9544mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 2 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: METAL1\_V\_10}% -\label{ssubsec:StructureMETAL1V10}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL1_V_10.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $678.1741\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 16.9544mV% -\newline% -% -The current from the current source should go from pad 4 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 3% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: METAL1\_H\_20}% -\label{ssubsec:StructureMETAL1H20}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL1_H_20.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $160.6852\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 4.0171mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 2 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: METAL1\_V\_20}% -\label{ssubsec:StructureMETAL1V20}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL1_V_20.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $160.6852\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 4.0171mV% -\newline% -% -The current from the current source should go from pad 4 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 3% -\newline% -% -\end{minipage} - -% -\subsection{Layer: metal2}% -\label{subsec:Layermetal2}% -\subsubsection{Structure: METAL2\_H\_1}% -\label{ssubsec:StructureMETAL2H1}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL2_H_1.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $5.4109k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 135.2732mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 2 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: METAL2\_V\_1}% -\label{ssubsec:StructureMETAL2V1}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL2_V_1.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $5.4109k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 135.2732mV% -\newline% -% -The current from the current source should go from pad 4 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 3% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: METAL2\_H\_2}% -\label{ssubsec:StructureMETAL2H2}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL2_H_2.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $1.7949k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 44.8719mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 2 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: METAL2\_V\_2}% -\label{ssubsec:StructureMETAL2V2}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL2_V_2.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $1.7949k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 44.8719mV% -\newline% -% -The current from the current source should go from pad 4 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 3% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: METAL2\_H\_5}% -\label{ssubsec:StructureMETAL2H5}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL2_H_5.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $353.8143\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 8.8454mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 2 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: METAL2\_V\_5}% -\label{ssubsec:StructureMETAL2V5}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL2_V_5.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $353.8143\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 8.8454mV% -\newline% -% -The current from the current source should go from pad 4 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 3% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: METAL2\_10}% -\label{ssubsec:StructureMETAL210}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL2_10.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $235.8286\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 5.8957mV% -\newline% -% -The current from the current source should go from pad 3 towards pad 4% -\newline% -% -The voltage over the resistor should be measured over pad 2 and pad 1% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: METAL2\_20}% -\label{ssubsec:StructureMETAL220}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL2_20.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $59.2607\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 1.4815mV% -\newline% -% -The current from the current source should go from pad 3 towards pad 4% -\newline% -% -The voltage over the resistor should be measured over pad 2 and pad 1% -\newline% -% -\end{minipage} - -% -\subsection{Layer: metal3}% -\label{subsec:Layermetal3}% -\subsubsection{Structure: METAL3\_H\_1}% -\label{ssubsec:StructureMETAL3H1}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL3_H_1.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $5.4109k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 135.2732mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 2 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: METAL3\_V\_1}% -\label{ssubsec:StructureMETAL3V1}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL3_V_1.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $5.4109k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 135.2732mV% -\newline% -% -The current from the current source should go from pad 4 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 3% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: METAL3\_H\_2}% -\label{ssubsec:StructureMETAL3H2}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL3_H_2.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $1.7949k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 44.8719mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 2 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: METAL3\_V\_2}% -\label{ssubsec:StructureMETAL3V2}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL3_V_2.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $1.7949k\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 44.8719mV% -\newline% -% -The current from the current source should go from pad 4 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 3% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: METAL3\_H\_5}% -\label{ssubsec:StructureMETAL3H5}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL3_H_5.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $353.8143\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 8.8454mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 2 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: METAL3\_V\_5}% -\label{ssubsec:StructureMETAL3V5}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL3_V_5.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $353.8143\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 8.8454mV% -\newline% -% -The current from the current source should go from pad 4 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 3% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: METAL3\_10}% -\label{ssubsec:StructureMETAL310}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL3_10.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $235.8286\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 5.8957mV% -\newline% -% -The current from the current source should go from pad 3 towards pad 4% -\newline% -% -The voltage over the resistor should be measured over pad 2 and pad 1% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: METAL3\_20}% -\label{ssubsec:StructureMETAL320}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL3_20.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $59.2607\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 1.4815mV% -\newline% -% -The current from the current source should go from pad 3 towards pad 4% -\newline% -% -The voltage over the resistor should be measured over pad 2 and pad 1% -\newline% -% -\end{minipage} - -% -\subsection{Layer: metal4}% -\label{subsec:Layermetal4}% -\subsubsection{Structure: METAL4\_H\_1}% -\label{ssubsec:StructureMETAL4H1}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL4_H_1.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $344.7293\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 8.6182mV% -\newline% -% -The current from the current source should go from pad 2 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: METAL4\_V\_1}% -\label{ssubsec:StructureMETAL4V1}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL4_V_1.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $344.7293\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 8.6182mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 4 and pad 3% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: METAL4\_H\_2}% -\label{ssubsec:StructureMETAL4H2}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL4_H_2.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $109.7189\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 2.743mV% -\newline% -% -The current from the current source should go from pad 2 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: METAL4\_V\_2}% -\label{ssubsec:StructureMETAL4V2}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL4_V_2.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $109.7189\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 2.743mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 4 and pad 3% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: METAL4\_5}% -\label{ssubsec:StructureMETAL45}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL4_5.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $50.2294\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 1.2557mV% -\newline% -% -The current from the current source should go from pad 3 towards pad 4% -\newline% -% -The voltage over the resistor should be measured over pad 2 and pad 1% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: METAL4\_10}% -\label{ssubsec:StructureMETAL410}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL4_10.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $28.1666\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 704.1644uV% -\newline% -% -The current from the current source should go from pad 3 towards pad 4% -\newline% -% -The voltage over the resistor should be measured over pad 2 and pad 1% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: METAL4\_20}% -\label{ssubsec:StructureMETAL420}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL4_20.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $14.2191\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 355.4767uV% -\newline% -% -The current from the current source should go from pad 3 towards pad 4% -\newline% -% -The voltage over the resistor should be measured over pad 2 and pad 1% -\newline% -% -\end{minipage} - -% -\subsection{Layer: metal5}% -\label{subsec:Layermetal5}% -\subsubsection{Structure: METAL5\_H\_1}% -\label{ssubsec:StructureMETAL5H1}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL5_H_1.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $441.8627\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 11.0466mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 2 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: METAL5\_V\_1}% -\label{ssubsec:StructureMETAL5V1}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL5_V_1.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $441.8627\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 11.0466mV% -\newline% -% -The current from the current source should go from pad 4 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 3% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: METAL5\_H\_2}% -\label{ssubsec:StructureMETAL5H2}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL5_H_2.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $145.7783\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 3.6445mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 2 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: METAL5\_V\_2}% -\label{ssubsec:StructureMETAL5V2}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL5_V_2.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $145.7783\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 3.6445mV% -\newline% -% -The current from the current source should go from pad 4 towards pad 2% -\newline% -% -The voltage over the resistor should be measured over pad 1 and pad 3% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: METAL5\_5}% -\label{ssubsec:StructureMETAL55}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL5_5.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $71.44\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 1.786mV% -\newline% -% -The current from the current source should go from pad 3 towards pad 4% -\newline% -% -The voltage over the resistor should be measured over pad 2 and pad 1% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: METAL5\_10}% -\label{ssubsec:StructureMETAL510}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL5_10.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $72.4176\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 1.8104mV% -\newline% -% -The current from the current source should go from pad 3 towards pad 4% -\newline% -% -The voltage over the resistor should be measured over pad 2 and pad 1% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: METAL5\_20}% -\label{ssubsec:StructureMETAL520}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL5_20.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $20.6988\Omega$% -\newline% -% -Recommended measurement current is 25uA% -\newline% -% -Expected measured voltage is 517.47uV% -\newline% -% -The current from the current source should go from pad 3 towards pad 4% -\newline% -% -The voltage over the resistor should be measured over pad 2 and pad 1% -\newline% -% -\end{minipage} - -% -\pagebreak% -\section{Capacitors}% -\label{sec:Capacitors}% -All the capacitors structures for the various available layer pairs, as defined in the configuration are being shown below. They are being measured with a 4 probe station, by applying a constant current over two of the probes.\newline% -This is called a Kelvin structure.% -\subsection{Capacitor POLY/NWELL\_CAP}% -\label{subsec:CapacitorPOLY/NWELLCAP}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/POLY_NWELL_CAP.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this capacitor is % -\newline% -% -\end{minipage} - -% -\subsection{Capacitor POLY/PWELL\_CAP}% -\label{subsec:CapacitorPOLY/PWELLCAP}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/POLY_PWELL_CAP.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this capacitor is % -\newline% -% -\end{minipage} - -% -\subsection{Capacitor METAL1/NWELL\_CAP}% -\label{subsec:CapacitorMETAL1/NWELLCAP}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL1_NWELL_CAP.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this capacitor is % -\newline% -% -\end{minipage} - -% -\subsection{Capacitor METAL1/PWELL\_CAP}% -\label{subsec:CapacitorMETAL1/PWELLCAP}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL1_PWELL_CAP.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this capacitor is % -\newline% -% -\end{minipage} - -% -\subsection{Capacitor METAL2/METAL1\_CAP}% -\label{subsec:CapacitorMETAL2/METAL1CAP}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL2_METAL1_CAP.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this capacitor is % -\newline% -% -\end{minipage} - -% -\subsection{Capacitor METAL3/METAL2\_CAP}% -\label{subsec:CapacitorMETAL3/METAL2CAP}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL3_METAL2_CAP.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this capacitor is % -\newline% -% -\end{minipage} - -% -\subsection{Capacitor METAL4/METAL3\_CAP}% -\label{subsec:CapacitorMETAL4/METAL3CAP}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL4_METAL3_CAP.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this capacitor is % -\newline% -% -\end{minipage} - -% -\pagebreak% -\end{document} \ No newline at end of file