diff --git a/tapeout/gf180-large1.csv b/tapeout/gf180-large1.csv new file mode 100644 index 0000000000000000000000000000000000000000..4994e1f0a3c1c4e0e6a6011b815166e6b097aa63 --- /dev/null +++ b/tapeout/gf180-large1.csv @@ -0,0 +1,24 @@ +Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments +Danube River(GF180) #1,METAL2_V_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #1,METAL2_V_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #1,METAL2_V_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #1,METAL2_V_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #1,METAL2_V_100,0,0,Kelvin,Resistor,I-V,,, +Danube River(GF180) #1,METAL3_V_100,0,1188520,Kelvin,Resistor,I-V,,,,Danube River(GF180) #1,METAL3_V_100,0,1188520,Kelvin,Resistor,I-V,,,,Danube River(GF180) #1,METAL3_V_100,0,1188520,Kelvin,Resistor,I-V,,,,Danube River(GF180) #1,METAL3_V_100,0,1188520,Kelvin,Resistor,I-V,,,,Danube River(GF180) #1,METAL3_V_100,0,1188520,Kelvin,Resistor,I-V,,, +Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments +Danube River(GF180) #2,METAL4_V_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #2,METAL4_V_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #2,METAL4_V_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #2,METAL4_V_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #2,METAL4_V_100,0,0,Kelvin,Resistor,I-V,,, +Danube River(GF180) #2,METAL5_V_100,0,1188520,Kelvin,Resistor,I-V,,,,Danube River(GF180) #2,METAL5_V_100,0,1188520,Kelvin,Resistor,I-V,,,,Danube River(GF180) #2,METAL5_V_100,0,1188520,Kelvin,Resistor,I-V,,,,Danube River(GF180) #2,METAL5_V_100,0,1188520,Kelvin,Resistor,I-V,,,,Danube River(GF180) #2,METAL5_V_100,0,1188520,Kelvin,Resistor,I-V,,, +Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments +Danube River(GF180) #3,METAL2_H_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #3,METAL2_H_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #3,METAL2_H_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #3,METAL2_H_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #3,METAL2_H_100,0,0,Kelvin,Resistor,I-V,,, +Danube River(GF180) #3,METAL3_H_100,0,1092000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #3,METAL3_H_100,0,1092000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #3,METAL3_H_100,0,1092000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #3,METAL3_H_100,0,1092000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #3,METAL3_H_100,0,1092000,Kelvin,Resistor,I-V,,, +Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments +Danube River(GF180) #4,METAL4_H_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL4_H_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL4_H_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL4_H_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL4_H_100,0,0,Kelvin,Resistor,I-V,,, +Danube River(GF180) #4,METAL5_H_100,0,1092000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL5_H_100,0,1092000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL5_H_100,0,1092000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL5_H_100,0,1092000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL5_H_100,0,1092000,Kelvin,Resistor,I-V,,, +Danube River(GF180) #4,METAL2_V_50,1298280,1569480,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL2_V_50,1298280,1569480,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL2_V_50,1298280,1569480,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL2_V_50,1298280,1569480,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL2_V_50,1298280,1569480,Kelvin,Resistor,I-V,,, +Danube River(GF180) #4,METAL3_V_50,0,2184000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL3_V_50,0,2184000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL3_V_50,0,2184000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL3_V_50,0,2184000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL3_V_50,0,2184000,Kelvin,Resistor,I-V,,, +Danube River(GF180) #4,METAL4_V_50,710000,2184000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL4_V_50,710000,2184000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL4_V_50,710000,2184000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL4_V_50,710000,2184000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL4_V_50,710000,2184000,Kelvin,Resistor,I-V,,, +Danube River(GF180) #4,METAL5_V_50,1420000,2184240,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL5_V_50,1420000,2184240,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL5_V_50,1420000,2184240,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL5_V_50,1420000,2184240,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL5_V_50,1420000,2184240,Kelvin,Resistor,I-V,,, +Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments +Danube River(GF180) #5,METAL2_H_50,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL2_H_50,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL2_H_50,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL2_H_50,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL2_H_50,0,0,Kelvin,Resistor,I-V,,, +Danube River(GF180) #5,METAL3_H_50,731520,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL3_H_50,731520,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL3_H_50,731520,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL3_H_50,731520,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL3_H_50,731520,0,Kelvin,Resistor,I-V,,, +Danube River(GF180) #5,METAL4_H_50,1463040,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL4_H_50,1463040,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL4_H_50,1463040,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL4_H_50,1463040,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL4_H_50,1463040,0,Kelvin,Resistor,I-V,,, +Danube River(GF180) #5,METAL5_H_50,0,546000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL5_H_50,0,546000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL5_H_50,0,546000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL5_H_50,0,546000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL5_H_50,0,546000,Kelvin,Resistor,I-V,,, +Danube River(GF180) #5,METAL1_V_100,731280,681905,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_V_100,731280,681905,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_V_100,731280,681905,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_V_100,731280,681905,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_V_100,731280,681905,Kelvin,Resistor,I-V,,, +Danube River(GF180) #5,METAL1_H_100,1148280,839000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_H_100,1148280,839000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_H_100,1148280,839000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_H_100,1148280,839000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_H_100,1148280,839000,Kelvin,Resistor,I-V,,, +Danube River(GF180) #5,METAL1_V_50,1670875,866620,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_V_50,1670875,866620,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_V_50,1670875,866620,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_V_50,1670875,866620,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_V_50,1670875,866620,Kelvin,Resistor,I-V,,, diff --git a/tapeout/gf180-large1.gds b/tapeout/gf180-large1.gds new file mode 100644 index 0000000000000000000000000000000000000000..07ce7f24bcc0543bee762c5fea1390cfb0490636 Binary files /dev/null and b/tapeout/gf180-large1.gds differ diff --git a/tapeout/gf180-large1.pdf b/tapeout/gf180-large1.pdf new file mode 100644 index 0000000000000000000000000000000000000000..78518a4b2863d8d3779d21aabb220b81b0fbbd1e Binary files /dev/null and b/tapeout/gf180-large1.pdf differ diff --git a/tapeout/gf180-large1.tex b/tapeout/gf180-large1.tex new file mode 100644 index 0000000000000000000000000000000000000000..a8c2dae936380402469461ff96cda02935094340 --- /dev/null +++ b/tapeout/gf180-large1.tex @@ -0,0 +1,693 @@ +\documentclass{article}% +\usepackage[T1]{fontenc}% +\usepackage[utf8]{inputenc}% +\usepackage{lmodern}% +\usepackage{textcomp}% +\usepackage{lastpage}% +\usepackage{geometry}% +\geometry{tmargin=0.5in,lmargin=0.5in,bmargin=0.5in,rmargin=0.5in}% +\usepackage{float}% +\usepackage{graphicx}% +\usepackage{ragged2e}% +% +\title{Danube River Test Waver}% +\author{by LibreSilicon}% +% +\begin{document}% +\normalsize% +\maketitle% +This is the automatically generated documentation and guide line for the test structures in the GDSII file, generated by this script,for the wafer titled Danube River(GF180) \#1\newline% +% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=320px]{/tmp/danube/Danube_River(GF180)__1.png}% +\end{figure} + +% +The below structures have been generated assuming basic flags and settings for the pad and size from "configs/gf180{-}large.cfg" for characterizing the process "GF180" (which can be found in librepdk/technologies).\newline% +Those values need to be verified by checking under the microscope, whether the defects have gone away and measuring what the difference between predicted values and measured values is% +\pagebreak% +\section{Resistors}% +\label{sec:Resistors}% +All the resistor structures for the various available layers, as defined in the configuration are being shown below. They are being measured with a 4 probe station, by applying a constant current over two of the probes, and then measuring the voltage over the other two.\newline% +This is called a Kelvin structure.% +\subsection{Layer: metal2}% +\label{subsec:Layermetal2}% +\subsubsection{Structure: METAL2\_V\_100}% +\label{ssubsec:StructureMETAL2V100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL2_V_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=0% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL2\_H\_100}% +\label{ssubsec:StructureMETAL2H100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL2_H_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=0% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL2\_V\_50}% +\label{ssubsec:StructureMETAL2V50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL2_V_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=1298280,Y=1569480% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL2\_H\_50}% +\label{ssubsec:StructureMETAL2H50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL2_H_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=0% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsection{Layer: metal3}% +\label{subsec:Layermetal3}% +\subsubsection{Structure: METAL3\_V\_100}% +\label{ssubsec:StructureMETAL3V100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL3_V_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=1188520% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL3\_H\_100}% +\label{ssubsec:StructureMETAL3H100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL3_H_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=1092000% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL3\_V\_50}% +\label{ssubsec:StructureMETAL3V50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL3_V_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=2184000% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL3\_H\_50}% +\label{ssubsec:StructureMETAL3H50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL3_H_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=731520,Y=0% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsection{Layer: metal4}% +\label{subsec:Layermetal4}% +\subsubsection{Structure: METAL4\_V\_100}% +\label{ssubsec:StructureMETAL4V100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL4_V_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=0% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL4\_H\_100}% +\label{ssubsec:StructureMETAL4H100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL4_H_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=0% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL4\_V\_50}% +\label{ssubsec:StructureMETAL4V50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL4_V_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=710000,Y=2184000% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL4\_H\_50}% +\label{ssubsec:StructureMETAL4H50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL4_H_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=1463040,Y=0% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsection{Layer: metal5}% +\label{subsec:Layermetal5}% +\subsubsection{Structure: METAL5\_V\_100}% +\label{ssubsec:StructureMETAL5V100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL5_V_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=1188520% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL5\_H\_100}% +\label{ssubsec:StructureMETAL5H100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL5_H_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=1092000% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL5\_V\_50}% +\label{ssubsec:StructureMETAL5V50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL5_V_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=1420000,Y=2184240% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL5\_H\_50}% +\label{ssubsec:StructureMETAL5H50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL5_H_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=546000% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsection{Layer: metal1}% +\label{subsec:Layermetal1}% +\subsubsection{Structure: METAL1\_V\_100}% +\label{ssubsec:StructureMETAL1V100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL1_V_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=731280,Y=681905% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL1\_H\_100}% +\label{ssubsec:StructureMETAL1H100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL1_H_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=1148280,Y=839000% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL1\_V\_50}% +\label{ssubsec:StructureMETAL1V50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL1_V_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=1670875,Y=866620% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\pagebreak% +\end{document} \ No newline at end of file diff --git a/tapeout/gf180-large2.csv b/tapeout/gf180-large2.csv new file mode 100644 index 0000000000000000000000000000000000000000..4994e1f0a3c1c4e0e6a6011b815166e6b097aa63 --- /dev/null +++ b/tapeout/gf180-large2.csv @@ -0,0 +1,24 @@ +Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments +Danube River(GF180) #1,METAL2_V_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #1,METAL2_V_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #1,METAL2_V_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #1,METAL2_V_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #1,METAL2_V_100,0,0,Kelvin,Resistor,I-V,,, +Danube River(GF180) #1,METAL3_V_100,0,1188520,Kelvin,Resistor,I-V,,,,Danube River(GF180) #1,METAL3_V_100,0,1188520,Kelvin,Resistor,I-V,,,,Danube River(GF180) #1,METAL3_V_100,0,1188520,Kelvin,Resistor,I-V,,,,Danube River(GF180) #1,METAL3_V_100,0,1188520,Kelvin,Resistor,I-V,,,,Danube River(GF180) #1,METAL3_V_100,0,1188520,Kelvin,Resistor,I-V,,, +Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments +Danube River(GF180) #2,METAL4_V_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #2,METAL4_V_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #2,METAL4_V_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #2,METAL4_V_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #2,METAL4_V_100,0,0,Kelvin,Resistor,I-V,,, +Danube River(GF180) #2,METAL5_V_100,0,1188520,Kelvin,Resistor,I-V,,,,Danube River(GF180) #2,METAL5_V_100,0,1188520,Kelvin,Resistor,I-V,,,,Danube River(GF180) #2,METAL5_V_100,0,1188520,Kelvin,Resistor,I-V,,,,Danube River(GF180) #2,METAL5_V_100,0,1188520,Kelvin,Resistor,I-V,,,,Danube River(GF180) #2,METAL5_V_100,0,1188520,Kelvin,Resistor,I-V,,, +Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments +Danube River(GF180) #3,METAL2_H_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #3,METAL2_H_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #3,METAL2_H_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #3,METAL2_H_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #3,METAL2_H_100,0,0,Kelvin,Resistor,I-V,,, +Danube River(GF180) #3,METAL3_H_100,0,1092000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #3,METAL3_H_100,0,1092000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #3,METAL3_H_100,0,1092000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #3,METAL3_H_100,0,1092000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #3,METAL3_H_100,0,1092000,Kelvin,Resistor,I-V,,, +Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments +Danube River(GF180) #4,METAL4_H_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL4_H_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL4_H_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL4_H_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL4_H_100,0,0,Kelvin,Resistor,I-V,,, +Danube River(GF180) #4,METAL5_H_100,0,1092000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL5_H_100,0,1092000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL5_H_100,0,1092000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL5_H_100,0,1092000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL5_H_100,0,1092000,Kelvin,Resistor,I-V,,, +Danube River(GF180) #4,METAL2_V_50,1298280,1569480,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL2_V_50,1298280,1569480,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL2_V_50,1298280,1569480,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL2_V_50,1298280,1569480,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL2_V_50,1298280,1569480,Kelvin,Resistor,I-V,,, +Danube River(GF180) #4,METAL3_V_50,0,2184000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL3_V_50,0,2184000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL3_V_50,0,2184000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL3_V_50,0,2184000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL3_V_50,0,2184000,Kelvin,Resistor,I-V,,, +Danube River(GF180) #4,METAL4_V_50,710000,2184000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL4_V_50,710000,2184000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL4_V_50,710000,2184000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL4_V_50,710000,2184000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL4_V_50,710000,2184000,Kelvin,Resistor,I-V,,, +Danube River(GF180) #4,METAL5_V_50,1420000,2184240,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL5_V_50,1420000,2184240,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL5_V_50,1420000,2184240,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL5_V_50,1420000,2184240,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL5_V_50,1420000,2184240,Kelvin,Resistor,I-V,,, +Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments +Danube River(GF180) #5,METAL2_H_50,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL2_H_50,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL2_H_50,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL2_H_50,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL2_H_50,0,0,Kelvin,Resistor,I-V,,, +Danube River(GF180) #5,METAL3_H_50,731520,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL3_H_50,731520,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL3_H_50,731520,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL3_H_50,731520,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL3_H_50,731520,0,Kelvin,Resistor,I-V,,, +Danube River(GF180) #5,METAL4_H_50,1463040,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL4_H_50,1463040,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL4_H_50,1463040,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL4_H_50,1463040,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL4_H_50,1463040,0,Kelvin,Resistor,I-V,,, +Danube River(GF180) #5,METAL5_H_50,0,546000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL5_H_50,0,546000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL5_H_50,0,546000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL5_H_50,0,546000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL5_H_50,0,546000,Kelvin,Resistor,I-V,,, +Danube River(GF180) #5,METAL1_V_100,731280,681905,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_V_100,731280,681905,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_V_100,731280,681905,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_V_100,731280,681905,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_V_100,731280,681905,Kelvin,Resistor,I-V,,, +Danube River(GF180) #5,METAL1_H_100,1148280,839000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_H_100,1148280,839000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_H_100,1148280,839000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_H_100,1148280,839000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_H_100,1148280,839000,Kelvin,Resistor,I-V,,, +Danube River(GF180) #5,METAL1_V_50,1670875,866620,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_V_50,1670875,866620,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_V_50,1670875,866620,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_V_50,1670875,866620,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_V_50,1670875,866620,Kelvin,Resistor,I-V,,, diff --git a/tapeout/gf180-large2.gds b/tapeout/gf180-large2.gds new file mode 100644 index 0000000000000000000000000000000000000000..a739e670eea3acadb447e31ed5f03873cfddef6a Binary files /dev/null and b/tapeout/gf180-large2.gds differ diff --git a/tapeout/gf180-large2.pdf b/tapeout/gf180-large2.pdf new file mode 100644 index 0000000000000000000000000000000000000000..b5af9e8ea2fe176074b269d9b52c6f8d5de94855 Binary files /dev/null and b/tapeout/gf180-large2.pdf differ diff --git a/tapeout/gf180-large2.tex b/tapeout/gf180-large2.tex new file mode 100644 index 0000000000000000000000000000000000000000..42d73c72da83ad606c77b5e9ed58a3a10316ae87 --- /dev/null +++ b/tapeout/gf180-large2.tex @@ -0,0 +1,693 @@ +\documentclass{article}% +\usepackage[T1]{fontenc}% +\usepackage[utf8]{inputenc}% +\usepackage{lmodern}% +\usepackage{textcomp}% +\usepackage{lastpage}% +\usepackage{geometry}% +\geometry{tmargin=0.5in,lmargin=0.5in,bmargin=0.5in,rmargin=0.5in}% +\usepackage{float}% +\usepackage{graphicx}% +\usepackage{ragged2e}% +% +\title{Danube River Test Waver}% +\author{by LibreSilicon}% +% +\begin{document}% +\normalsize% +\maketitle% +This is the automatically generated documentation and guide line for the test structures in the GDSII file, generated by this script,for the wafer titled Danube River(GF180) \#2\newline% +% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=320px]{/tmp/danube/Danube_River(GF180)__2.png}% +\end{figure} + +% +The below structures have been generated assuming basic flags and settings for the pad and size from "configs/gf180{-}large.cfg" for characterizing the process "GF180" (which can be found in librepdk/technologies).\newline% +Those values need to be verified by checking under the microscope, whether the defects have gone away and measuring what the difference between predicted values and measured values is% +\pagebreak% +\section{Resistors}% +\label{sec:Resistors}% +All the resistor structures for the various available layers, as defined in the configuration are being shown below. They are being measured with a 4 probe station, by applying a constant current over two of the probes, and then measuring the voltage over the other two.\newline% +This is called a Kelvin structure.% +\subsection{Layer: metal2}% +\label{subsec:Layermetal2}% +\subsubsection{Structure: METAL2\_V\_100}% +\label{ssubsec:StructureMETAL2V100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL2_V_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=0% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL2\_H\_100}% +\label{ssubsec:StructureMETAL2H100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL2_H_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=0% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL2\_V\_50}% +\label{ssubsec:StructureMETAL2V50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL2_V_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=1298280,Y=1569480% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL2\_H\_50}% +\label{ssubsec:StructureMETAL2H50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL2_H_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=0% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsection{Layer: metal3}% +\label{subsec:Layermetal3}% +\subsubsection{Structure: METAL3\_V\_100}% +\label{ssubsec:StructureMETAL3V100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL3_V_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=1188520% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL3\_H\_100}% +\label{ssubsec:StructureMETAL3H100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL3_H_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=1092000% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL3\_V\_50}% +\label{ssubsec:StructureMETAL3V50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL3_V_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=2184000% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL3\_H\_50}% +\label{ssubsec:StructureMETAL3H50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL3_H_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=731520,Y=0% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsection{Layer: metal4}% +\label{subsec:Layermetal4}% +\subsubsection{Structure: METAL4\_V\_100}% +\label{ssubsec:StructureMETAL4V100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL4_V_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=0% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL4\_H\_100}% +\label{ssubsec:StructureMETAL4H100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL4_H_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=0% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL4\_V\_50}% +\label{ssubsec:StructureMETAL4V50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL4_V_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=710000,Y=2184000% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL4\_H\_50}% +\label{ssubsec:StructureMETAL4H50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL4_H_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=1463040,Y=0% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsection{Layer: metal5}% +\label{subsec:Layermetal5}% +\subsubsection{Structure: METAL5\_V\_100}% +\label{ssubsec:StructureMETAL5V100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL5_V_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=1188520% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL5\_H\_100}% +\label{ssubsec:StructureMETAL5H100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL5_H_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=1092000% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL5\_V\_50}% +\label{ssubsec:StructureMETAL5V50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL5_V_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=1420000,Y=2184240% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL5\_H\_50}% +\label{ssubsec:StructureMETAL5H50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL5_H_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=546000% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsection{Layer: metal1}% +\label{subsec:Layermetal1}% +\subsubsection{Structure: METAL1\_V\_100}% +\label{ssubsec:StructureMETAL1V100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL1_V_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=731280,Y=681905% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL1\_H\_100}% +\label{ssubsec:StructureMETAL1H100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL1_H_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=1148280,Y=839000% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL1\_V\_50}% +\label{ssubsec:StructureMETAL1V50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL1_V_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=1670875,Y=866620% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\pagebreak% +\end{document} \ No newline at end of file diff --git a/tapeout/gf180-large3.csv b/tapeout/gf180-large3.csv new file mode 100644 index 0000000000000000000000000000000000000000..4994e1f0a3c1c4e0e6a6011b815166e6b097aa63 --- /dev/null +++ b/tapeout/gf180-large3.csv @@ -0,0 +1,24 @@ +Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments +Danube River(GF180) #1,METAL2_V_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #1,METAL2_V_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #1,METAL2_V_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #1,METAL2_V_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #1,METAL2_V_100,0,0,Kelvin,Resistor,I-V,,, +Danube River(GF180) #1,METAL3_V_100,0,1188520,Kelvin,Resistor,I-V,,,,Danube River(GF180) #1,METAL3_V_100,0,1188520,Kelvin,Resistor,I-V,,,,Danube River(GF180) #1,METAL3_V_100,0,1188520,Kelvin,Resistor,I-V,,,,Danube River(GF180) #1,METAL3_V_100,0,1188520,Kelvin,Resistor,I-V,,,,Danube River(GF180) #1,METAL3_V_100,0,1188520,Kelvin,Resistor,I-V,,, +Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments +Danube River(GF180) #2,METAL4_V_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #2,METAL4_V_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #2,METAL4_V_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #2,METAL4_V_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #2,METAL4_V_100,0,0,Kelvin,Resistor,I-V,,, +Danube River(GF180) #2,METAL5_V_100,0,1188520,Kelvin,Resistor,I-V,,,,Danube River(GF180) #2,METAL5_V_100,0,1188520,Kelvin,Resistor,I-V,,,,Danube River(GF180) #2,METAL5_V_100,0,1188520,Kelvin,Resistor,I-V,,,,Danube River(GF180) #2,METAL5_V_100,0,1188520,Kelvin,Resistor,I-V,,,,Danube River(GF180) #2,METAL5_V_100,0,1188520,Kelvin,Resistor,I-V,,, +Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments +Danube River(GF180) #3,METAL2_H_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #3,METAL2_H_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #3,METAL2_H_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #3,METAL2_H_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #3,METAL2_H_100,0,0,Kelvin,Resistor,I-V,,, +Danube River(GF180) #3,METAL3_H_100,0,1092000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #3,METAL3_H_100,0,1092000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #3,METAL3_H_100,0,1092000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #3,METAL3_H_100,0,1092000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #3,METAL3_H_100,0,1092000,Kelvin,Resistor,I-V,,, +Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments +Danube River(GF180) #4,METAL4_H_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL4_H_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL4_H_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL4_H_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL4_H_100,0,0,Kelvin,Resistor,I-V,,, +Danube River(GF180) #4,METAL5_H_100,0,1092000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL5_H_100,0,1092000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL5_H_100,0,1092000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL5_H_100,0,1092000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL5_H_100,0,1092000,Kelvin,Resistor,I-V,,, +Danube River(GF180) #4,METAL2_V_50,1298280,1569480,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL2_V_50,1298280,1569480,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL2_V_50,1298280,1569480,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL2_V_50,1298280,1569480,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL2_V_50,1298280,1569480,Kelvin,Resistor,I-V,,, +Danube River(GF180) #4,METAL3_V_50,0,2184000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL3_V_50,0,2184000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL3_V_50,0,2184000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL3_V_50,0,2184000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL3_V_50,0,2184000,Kelvin,Resistor,I-V,,, +Danube River(GF180) #4,METAL4_V_50,710000,2184000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL4_V_50,710000,2184000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL4_V_50,710000,2184000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL4_V_50,710000,2184000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL4_V_50,710000,2184000,Kelvin,Resistor,I-V,,, +Danube River(GF180) #4,METAL5_V_50,1420000,2184240,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL5_V_50,1420000,2184240,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL5_V_50,1420000,2184240,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL5_V_50,1420000,2184240,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL5_V_50,1420000,2184240,Kelvin,Resistor,I-V,,, +Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments +Danube River(GF180) #5,METAL2_H_50,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL2_H_50,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL2_H_50,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL2_H_50,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL2_H_50,0,0,Kelvin,Resistor,I-V,,, +Danube River(GF180) #5,METAL3_H_50,731520,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL3_H_50,731520,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL3_H_50,731520,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL3_H_50,731520,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL3_H_50,731520,0,Kelvin,Resistor,I-V,,, +Danube River(GF180) #5,METAL4_H_50,1463040,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL4_H_50,1463040,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL4_H_50,1463040,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL4_H_50,1463040,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL4_H_50,1463040,0,Kelvin,Resistor,I-V,,, +Danube River(GF180) #5,METAL5_H_50,0,546000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL5_H_50,0,546000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL5_H_50,0,546000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL5_H_50,0,546000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL5_H_50,0,546000,Kelvin,Resistor,I-V,,, +Danube River(GF180) #5,METAL1_V_100,731280,681905,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_V_100,731280,681905,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_V_100,731280,681905,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_V_100,731280,681905,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_V_100,731280,681905,Kelvin,Resistor,I-V,,, +Danube River(GF180) #5,METAL1_H_100,1148280,839000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_H_100,1148280,839000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_H_100,1148280,839000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_H_100,1148280,839000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_H_100,1148280,839000,Kelvin,Resistor,I-V,,, +Danube River(GF180) #5,METAL1_V_50,1670875,866620,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_V_50,1670875,866620,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_V_50,1670875,866620,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_V_50,1670875,866620,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_V_50,1670875,866620,Kelvin,Resistor,I-V,,, diff --git a/tapeout/gf180-large3.gds b/tapeout/gf180-large3.gds new file mode 100644 index 0000000000000000000000000000000000000000..a6f112ea1d5ead3a85b37a4c2fef6c1b88a36696 Binary files /dev/null and b/tapeout/gf180-large3.gds differ diff --git a/tapeout/gf180-large3.pdf b/tapeout/gf180-large3.pdf new file mode 100644 index 0000000000000000000000000000000000000000..6bb0eb2c1ff48eca13de94e7803bb9cc9467a3d7 Binary files /dev/null and b/tapeout/gf180-large3.pdf differ diff --git a/tapeout/gf180-large3.tex b/tapeout/gf180-large3.tex new file mode 100644 index 0000000000000000000000000000000000000000..2df067abbc698a85128b7399835fc4e54ca57d31 --- /dev/null +++ b/tapeout/gf180-large3.tex @@ -0,0 +1,693 @@ +\documentclass{article}% +\usepackage[T1]{fontenc}% +\usepackage[utf8]{inputenc}% +\usepackage{lmodern}% +\usepackage{textcomp}% +\usepackage{lastpage}% +\usepackage{geometry}% +\geometry{tmargin=0.5in,lmargin=0.5in,bmargin=0.5in,rmargin=0.5in}% +\usepackage{float}% +\usepackage{graphicx}% +\usepackage{ragged2e}% +% +\title{Danube River Test Waver}% +\author{by LibreSilicon}% +% +\begin{document}% +\normalsize% +\maketitle% +This is the automatically generated documentation and guide line for the test structures in the GDSII file, generated by this script,for the wafer titled Danube River(GF180) \#3\newline% +% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=320px]{/tmp/danube/Danube_River(GF180)__3.png}% +\end{figure} + +% +The below structures have been generated assuming basic flags and settings for the pad and size from "configs/gf180{-}large.cfg" for characterizing the process "GF180" (which can be found in librepdk/technologies).\newline% +Those values need to be verified by checking under the microscope, whether the defects have gone away and measuring what the difference between predicted values and measured values is% +\pagebreak% +\section{Resistors}% +\label{sec:Resistors}% +All the resistor structures for the various available layers, as defined in the configuration are being shown below. They are being measured with a 4 probe station, by applying a constant current over two of the probes, and then measuring the voltage over the other two.\newline% +This is called a Kelvin structure.% +\subsection{Layer: metal2}% +\label{subsec:Layermetal2}% +\subsubsection{Structure: METAL2\_V\_100}% +\label{ssubsec:StructureMETAL2V100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL2_V_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=0% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL2\_H\_100}% +\label{ssubsec:StructureMETAL2H100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL2_H_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=0% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL2\_V\_50}% +\label{ssubsec:StructureMETAL2V50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL2_V_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=1298280,Y=1569480% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL2\_H\_50}% +\label{ssubsec:StructureMETAL2H50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL2_H_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=0% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsection{Layer: metal3}% +\label{subsec:Layermetal3}% +\subsubsection{Structure: METAL3\_V\_100}% +\label{ssubsec:StructureMETAL3V100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL3_V_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=1188520% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL3\_H\_100}% +\label{ssubsec:StructureMETAL3H100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL3_H_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=1092000% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL3\_V\_50}% +\label{ssubsec:StructureMETAL3V50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL3_V_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=2184000% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL3\_H\_50}% +\label{ssubsec:StructureMETAL3H50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL3_H_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=731520,Y=0% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsection{Layer: metal4}% +\label{subsec:Layermetal4}% +\subsubsection{Structure: METAL4\_V\_100}% +\label{ssubsec:StructureMETAL4V100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL4_V_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=0% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL4\_H\_100}% +\label{ssubsec:StructureMETAL4H100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL4_H_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=0% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL4\_V\_50}% +\label{ssubsec:StructureMETAL4V50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL4_V_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=710000,Y=2184000% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL4\_H\_50}% +\label{ssubsec:StructureMETAL4H50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL4_H_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=1463040,Y=0% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsection{Layer: metal5}% +\label{subsec:Layermetal5}% +\subsubsection{Structure: METAL5\_V\_100}% +\label{ssubsec:StructureMETAL5V100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL5_V_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=1188520% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL5\_H\_100}% +\label{ssubsec:StructureMETAL5H100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL5_H_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=1092000% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL5\_V\_50}% +\label{ssubsec:StructureMETAL5V50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL5_V_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=1420000,Y=2184240% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL5\_H\_50}% +\label{ssubsec:StructureMETAL5H50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL5_H_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=546000% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsection{Layer: metal1}% +\label{subsec:Layermetal1}% +\subsubsection{Structure: METAL1\_V\_100}% +\label{ssubsec:StructureMETAL1V100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL1_V_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=731280,Y=681905% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL1\_H\_100}% +\label{ssubsec:StructureMETAL1H100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL1_H_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=1148280,Y=839000% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL1\_V\_50}% +\label{ssubsec:StructureMETAL1V50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL1_V_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=1670875,Y=866620% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\pagebreak% +\end{document} \ No newline at end of file diff --git a/tapeout/gf180-large4.csv b/tapeout/gf180-large4.csv new file mode 100644 index 0000000000000000000000000000000000000000..4994e1f0a3c1c4e0e6a6011b815166e6b097aa63 --- /dev/null +++ b/tapeout/gf180-large4.csv @@ -0,0 +1,24 @@ +Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments +Danube River(GF180) #1,METAL2_V_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #1,METAL2_V_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #1,METAL2_V_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #1,METAL2_V_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #1,METAL2_V_100,0,0,Kelvin,Resistor,I-V,,, +Danube River(GF180) #1,METAL3_V_100,0,1188520,Kelvin,Resistor,I-V,,,,Danube River(GF180) #1,METAL3_V_100,0,1188520,Kelvin,Resistor,I-V,,,,Danube River(GF180) #1,METAL3_V_100,0,1188520,Kelvin,Resistor,I-V,,,,Danube River(GF180) #1,METAL3_V_100,0,1188520,Kelvin,Resistor,I-V,,,,Danube River(GF180) #1,METAL3_V_100,0,1188520,Kelvin,Resistor,I-V,,, +Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments +Danube River(GF180) #2,METAL4_V_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #2,METAL4_V_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #2,METAL4_V_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #2,METAL4_V_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #2,METAL4_V_100,0,0,Kelvin,Resistor,I-V,,, +Danube River(GF180) #2,METAL5_V_100,0,1188520,Kelvin,Resistor,I-V,,,,Danube River(GF180) #2,METAL5_V_100,0,1188520,Kelvin,Resistor,I-V,,,,Danube River(GF180) #2,METAL5_V_100,0,1188520,Kelvin,Resistor,I-V,,,,Danube River(GF180) #2,METAL5_V_100,0,1188520,Kelvin,Resistor,I-V,,,,Danube River(GF180) #2,METAL5_V_100,0,1188520,Kelvin,Resistor,I-V,,, +Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments +Danube River(GF180) #3,METAL2_H_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #3,METAL2_H_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #3,METAL2_H_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #3,METAL2_H_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #3,METAL2_H_100,0,0,Kelvin,Resistor,I-V,,, +Danube River(GF180) #3,METAL3_H_100,0,1092000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #3,METAL3_H_100,0,1092000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #3,METAL3_H_100,0,1092000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #3,METAL3_H_100,0,1092000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #3,METAL3_H_100,0,1092000,Kelvin,Resistor,I-V,,, +Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments +Danube River(GF180) #4,METAL4_H_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL4_H_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL4_H_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL4_H_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL4_H_100,0,0,Kelvin,Resistor,I-V,,, +Danube River(GF180) #4,METAL5_H_100,0,1092000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL5_H_100,0,1092000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL5_H_100,0,1092000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL5_H_100,0,1092000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL5_H_100,0,1092000,Kelvin,Resistor,I-V,,, +Danube River(GF180) #4,METAL2_V_50,1298280,1569480,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL2_V_50,1298280,1569480,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL2_V_50,1298280,1569480,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL2_V_50,1298280,1569480,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL2_V_50,1298280,1569480,Kelvin,Resistor,I-V,,, +Danube River(GF180) #4,METAL3_V_50,0,2184000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL3_V_50,0,2184000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL3_V_50,0,2184000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL3_V_50,0,2184000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL3_V_50,0,2184000,Kelvin,Resistor,I-V,,, +Danube River(GF180) #4,METAL4_V_50,710000,2184000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL4_V_50,710000,2184000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL4_V_50,710000,2184000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL4_V_50,710000,2184000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL4_V_50,710000,2184000,Kelvin,Resistor,I-V,,, +Danube River(GF180) #4,METAL5_V_50,1420000,2184240,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL5_V_50,1420000,2184240,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL5_V_50,1420000,2184240,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL5_V_50,1420000,2184240,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL5_V_50,1420000,2184240,Kelvin,Resistor,I-V,,, +Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments +Danube River(GF180) #5,METAL2_H_50,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL2_H_50,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL2_H_50,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL2_H_50,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL2_H_50,0,0,Kelvin,Resistor,I-V,,, +Danube River(GF180) #5,METAL3_H_50,731520,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL3_H_50,731520,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL3_H_50,731520,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL3_H_50,731520,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL3_H_50,731520,0,Kelvin,Resistor,I-V,,, +Danube River(GF180) #5,METAL4_H_50,1463040,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL4_H_50,1463040,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL4_H_50,1463040,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL4_H_50,1463040,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL4_H_50,1463040,0,Kelvin,Resistor,I-V,,, +Danube River(GF180) #5,METAL5_H_50,0,546000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL5_H_50,0,546000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL5_H_50,0,546000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL5_H_50,0,546000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL5_H_50,0,546000,Kelvin,Resistor,I-V,,, +Danube River(GF180) #5,METAL1_V_100,731280,681905,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_V_100,731280,681905,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_V_100,731280,681905,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_V_100,731280,681905,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_V_100,731280,681905,Kelvin,Resistor,I-V,,, +Danube River(GF180) #5,METAL1_H_100,1148280,839000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_H_100,1148280,839000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_H_100,1148280,839000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_H_100,1148280,839000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_H_100,1148280,839000,Kelvin,Resistor,I-V,,, +Danube River(GF180) #5,METAL1_V_50,1670875,866620,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_V_50,1670875,866620,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_V_50,1670875,866620,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_V_50,1670875,866620,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_V_50,1670875,866620,Kelvin,Resistor,I-V,,, diff --git a/tapeout/gf180-large4.gds b/tapeout/gf180-large4.gds new file mode 100644 index 0000000000000000000000000000000000000000..f9952a15daf7f3980f8f52a2658f8e9e28367867 Binary files /dev/null and b/tapeout/gf180-large4.gds differ diff --git a/tapeout/gf180-large4.pdf b/tapeout/gf180-large4.pdf new file mode 100644 index 0000000000000000000000000000000000000000..256f7d55526c26eb51ce0a27bfb2fd52b46c53a1 Binary files /dev/null and b/tapeout/gf180-large4.pdf differ diff --git a/tapeout/gf180-large4.tex b/tapeout/gf180-large4.tex new file mode 100644 index 0000000000000000000000000000000000000000..aa9684dc3d3b8ae568efaf764a4c02bf56f2b8a9 --- /dev/null +++ b/tapeout/gf180-large4.tex @@ -0,0 +1,693 @@ +\documentclass{article}% +\usepackage[T1]{fontenc}% +\usepackage[utf8]{inputenc}% +\usepackage{lmodern}% +\usepackage{textcomp}% +\usepackage{lastpage}% +\usepackage{geometry}% +\geometry{tmargin=0.5in,lmargin=0.5in,bmargin=0.5in,rmargin=0.5in}% +\usepackage{float}% +\usepackage{graphicx}% +\usepackage{ragged2e}% +% +\title{Danube River Test Waver}% +\author{by LibreSilicon}% +% +\begin{document}% +\normalsize% +\maketitle% +This is the automatically generated documentation and guide line for the test structures in the GDSII file, generated by this script,for the wafer titled Danube River(GF180) \#4\newline% +% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=320px]{/tmp/danube/Danube_River(GF180)__4.png}% +\end{figure} + +% +The below structures have been generated assuming basic flags and settings for the pad and size from "configs/gf180{-}large.cfg" for characterizing the process "GF180" (which can be found in librepdk/technologies).\newline% +Those values need to be verified by checking under the microscope, whether the defects have gone away and measuring what the difference between predicted values and measured values is% +\pagebreak% +\section{Resistors}% +\label{sec:Resistors}% +All the resistor structures for the various available layers, as defined in the configuration are being shown below. They are being measured with a 4 probe station, by applying a constant current over two of the probes, and then measuring the voltage over the other two.\newline% +This is called a Kelvin structure.% +\subsection{Layer: metal2}% +\label{subsec:Layermetal2}% +\subsubsection{Structure: METAL2\_V\_100}% +\label{ssubsec:StructureMETAL2V100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL2_V_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=0% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL2\_H\_100}% +\label{ssubsec:StructureMETAL2H100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL2_H_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=0% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL2\_V\_50}% +\label{ssubsec:StructureMETAL2V50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL2_V_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=1298280,Y=1569480% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL2\_H\_50}% +\label{ssubsec:StructureMETAL2H50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL2_H_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=0% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsection{Layer: metal3}% +\label{subsec:Layermetal3}% +\subsubsection{Structure: METAL3\_V\_100}% +\label{ssubsec:StructureMETAL3V100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL3_V_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=1188520% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL3\_H\_100}% +\label{ssubsec:StructureMETAL3H100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL3_H_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=1092000% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL3\_V\_50}% +\label{ssubsec:StructureMETAL3V50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL3_V_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=2184000% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL3\_H\_50}% +\label{ssubsec:StructureMETAL3H50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL3_H_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=731520,Y=0% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsection{Layer: metal4}% +\label{subsec:Layermetal4}% +\subsubsection{Structure: METAL4\_V\_100}% +\label{ssubsec:StructureMETAL4V100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL4_V_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=0% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL4\_H\_100}% +\label{ssubsec:StructureMETAL4H100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL4_H_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=0% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL4\_V\_50}% +\label{ssubsec:StructureMETAL4V50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL4_V_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=710000,Y=2184000% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL4\_H\_50}% +\label{ssubsec:StructureMETAL4H50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL4_H_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=1463040,Y=0% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsection{Layer: metal5}% +\label{subsec:Layermetal5}% +\subsubsection{Structure: METAL5\_V\_100}% +\label{ssubsec:StructureMETAL5V100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL5_V_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=1188520% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL5\_H\_100}% +\label{ssubsec:StructureMETAL5H100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL5_H_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=1092000% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL5\_V\_50}% +\label{ssubsec:StructureMETAL5V50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL5_V_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=1420000,Y=2184240% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL5\_H\_50}% +\label{ssubsec:StructureMETAL5H50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL5_H_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=546000% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsection{Layer: metal1}% +\label{subsec:Layermetal1}% +\subsubsection{Structure: METAL1\_V\_100}% +\label{ssubsec:StructureMETAL1V100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL1_V_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=731280,Y=681905% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL1\_H\_100}% +\label{ssubsec:StructureMETAL1H100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL1_H_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=1148280,Y=839000% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL1\_V\_50}% +\label{ssubsec:StructureMETAL1V50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL1_V_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=1670875,Y=866620% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\pagebreak% +\end{document} \ No newline at end of file diff --git a/tapeout/gf180-large5.csv b/tapeout/gf180-large5.csv new file mode 100644 index 0000000000000000000000000000000000000000..4994e1f0a3c1c4e0e6a6011b815166e6b097aa63 --- /dev/null +++ b/tapeout/gf180-large5.csv @@ -0,0 +1,24 @@ +Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments +Danube River(GF180) #1,METAL2_V_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #1,METAL2_V_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #1,METAL2_V_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #1,METAL2_V_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #1,METAL2_V_100,0,0,Kelvin,Resistor,I-V,,, +Danube River(GF180) #1,METAL3_V_100,0,1188520,Kelvin,Resistor,I-V,,,,Danube River(GF180) #1,METAL3_V_100,0,1188520,Kelvin,Resistor,I-V,,,,Danube River(GF180) #1,METAL3_V_100,0,1188520,Kelvin,Resistor,I-V,,,,Danube River(GF180) #1,METAL3_V_100,0,1188520,Kelvin,Resistor,I-V,,,,Danube River(GF180) #1,METAL3_V_100,0,1188520,Kelvin,Resistor,I-V,,, +Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments +Danube River(GF180) #2,METAL4_V_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #2,METAL4_V_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #2,METAL4_V_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #2,METAL4_V_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #2,METAL4_V_100,0,0,Kelvin,Resistor,I-V,,, +Danube River(GF180) #2,METAL5_V_100,0,1188520,Kelvin,Resistor,I-V,,,,Danube River(GF180) #2,METAL5_V_100,0,1188520,Kelvin,Resistor,I-V,,,,Danube River(GF180) #2,METAL5_V_100,0,1188520,Kelvin,Resistor,I-V,,,,Danube River(GF180) #2,METAL5_V_100,0,1188520,Kelvin,Resistor,I-V,,,,Danube River(GF180) #2,METAL5_V_100,0,1188520,Kelvin,Resistor,I-V,,, +Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments +Danube River(GF180) #3,METAL2_H_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #3,METAL2_H_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #3,METAL2_H_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #3,METAL2_H_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #3,METAL2_H_100,0,0,Kelvin,Resistor,I-V,,, +Danube River(GF180) #3,METAL3_H_100,0,1092000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #3,METAL3_H_100,0,1092000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #3,METAL3_H_100,0,1092000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #3,METAL3_H_100,0,1092000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #3,METAL3_H_100,0,1092000,Kelvin,Resistor,I-V,,, +Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments +Danube River(GF180) #4,METAL4_H_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL4_H_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL4_H_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL4_H_100,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL4_H_100,0,0,Kelvin,Resistor,I-V,,, +Danube River(GF180) #4,METAL5_H_100,0,1092000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL5_H_100,0,1092000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL5_H_100,0,1092000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL5_H_100,0,1092000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL5_H_100,0,1092000,Kelvin,Resistor,I-V,,, +Danube River(GF180) #4,METAL2_V_50,1298280,1569480,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL2_V_50,1298280,1569480,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL2_V_50,1298280,1569480,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL2_V_50,1298280,1569480,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL2_V_50,1298280,1569480,Kelvin,Resistor,I-V,,, +Danube River(GF180) #4,METAL3_V_50,0,2184000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL3_V_50,0,2184000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL3_V_50,0,2184000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL3_V_50,0,2184000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL3_V_50,0,2184000,Kelvin,Resistor,I-V,,, +Danube River(GF180) #4,METAL4_V_50,710000,2184000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL4_V_50,710000,2184000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL4_V_50,710000,2184000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL4_V_50,710000,2184000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL4_V_50,710000,2184000,Kelvin,Resistor,I-V,,, +Danube River(GF180) #4,METAL5_V_50,1420000,2184240,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL5_V_50,1420000,2184240,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL5_V_50,1420000,2184240,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL5_V_50,1420000,2184240,Kelvin,Resistor,I-V,,,,Danube River(GF180) #4,METAL5_V_50,1420000,2184240,Kelvin,Resistor,I-V,,, +Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments,Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments +Danube River(GF180) #5,METAL2_H_50,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL2_H_50,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL2_H_50,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL2_H_50,0,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL2_H_50,0,0,Kelvin,Resistor,I-V,,, +Danube River(GF180) #5,METAL3_H_50,731520,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL3_H_50,731520,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL3_H_50,731520,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL3_H_50,731520,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL3_H_50,731520,0,Kelvin,Resistor,I-V,,, +Danube River(GF180) #5,METAL4_H_50,1463040,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL4_H_50,1463040,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL4_H_50,1463040,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL4_H_50,1463040,0,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL4_H_50,1463040,0,Kelvin,Resistor,I-V,,, +Danube River(GF180) #5,METAL5_H_50,0,546000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL5_H_50,0,546000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL5_H_50,0,546000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL5_H_50,0,546000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL5_H_50,0,546000,Kelvin,Resistor,I-V,,, +Danube River(GF180) #5,METAL1_V_100,731280,681905,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_V_100,731280,681905,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_V_100,731280,681905,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_V_100,731280,681905,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_V_100,731280,681905,Kelvin,Resistor,I-V,,, +Danube River(GF180) #5,METAL1_H_100,1148280,839000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_H_100,1148280,839000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_H_100,1148280,839000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_H_100,1148280,839000,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_H_100,1148280,839000,Kelvin,Resistor,I-V,,, +Danube River(GF180) #5,METAL1_V_50,1670875,866620,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_V_50,1670875,866620,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_V_50,1670875,866620,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_V_50,1670875,866620,Kelvin,Resistor,I-V,,,,Danube River(GF180) #5,METAL1_V_50,1670875,866620,Kelvin,Resistor,I-V,,, diff --git a/tapeout/gf180-large5.gds b/tapeout/gf180-large5.gds new file mode 100644 index 0000000000000000000000000000000000000000..17c83fa863fb3dbe104cfd1c9aa52d1aa27f26bc Binary files /dev/null and b/tapeout/gf180-large5.gds differ diff --git a/tapeout/gf180-large5.pdf b/tapeout/gf180-large5.pdf new file mode 100644 index 0000000000000000000000000000000000000000..75925bdedeb142d677eeb04b0d65ffeb5277fb5c Binary files /dev/null and b/tapeout/gf180-large5.pdf differ diff --git a/tapeout/gf180-large5.tex b/tapeout/gf180-large5.tex new file mode 100644 index 0000000000000000000000000000000000000000..6364e823e46b724fc4967c126ca2a7149203baf8 --- /dev/null +++ b/tapeout/gf180-large5.tex @@ -0,0 +1,693 @@ +\documentclass{article}% +\usepackage[T1]{fontenc}% +\usepackage[utf8]{inputenc}% +\usepackage{lmodern}% +\usepackage{textcomp}% +\usepackage{lastpage}% +\usepackage{geometry}% +\geometry{tmargin=0.5in,lmargin=0.5in,bmargin=0.5in,rmargin=0.5in}% +\usepackage{float}% +\usepackage{graphicx}% +\usepackage{ragged2e}% +% +\title{Danube River Test Waver}% +\author{by LibreSilicon}% +% +\begin{document}% +\normalsize% +\maketitle% +This is the automatically generated documentation and guide line for the test structures in the GDSII file, generated by this script,for the wafer titled Danube River(GF180) \#5\newline% +% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=320px]{/tmp/danube/Danube_River(GF180)__5.png}% +\end{figure} + +% +The below structures have been generated assuming basic flags and settings for the pad and size from "configs/gf180{-}large.cfg" for characterizing the process "GF180" (which can be found in librepdk/technologies).\newline% +Those values need to be verified by checking under the microscope, whether the defects have gone away and measuring what the difference between predicted values and measured values is% +\pagebreak% +\section{Resistors}% +\label{sec:Resistors}% +All the resistor structures for the various available layers, as defined in the configuration are being shown below. They are being measured with a 4 probe station, by applying a constant current over two of the probes, and then measuring the voltage over the other two.\newline% +This is called a Kelvin structure.% +\subsection{Layer: metal2}% +\label{subsec:Layermetal2}% +\subsubsection{Structure: METAL2\_V\_100}% +\label{ssubsec:StructureMETAL2V100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL2_V_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=0% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL2\_H\_100}% +\label{ssubsec:StructureMETAL2H100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL2_H_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=0% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL2\_V\_50}% +\label{ssubsec:StructureMETAL2V50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL2_V_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=1298280,Y=1569480% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL2\_H\_50}% +\label{ssubsec:StructureMETAL2H50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL2_H_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=0% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsection{Layer: metal3}% +\label{subsec:Layermetal3}% +\subsubsection{Structure: METAL3\_V\_100}% +\label{ssubsec:StructureMETAL3V100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL3_V_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=1188520% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL3\_H\_100}% +\label{ssubsec:StructureMETAL3H100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL3_H_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=1092000% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL3\_V\_50}% +\label{ssubsec:StructureMETAL3V50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL3_V_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=2184000% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL3\_H\_50}% +\label{ssubsec:StructureMETAL3H50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL3_H_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=731520,Y=0% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsection{Layer: metal4}% +\label{subsec:Layermetal4}% +\subsubsection{Structure: METAL4\_V\_100}% +\label{ssubsec:StructureMETAL4V100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL4_V_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=0% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL4\_H\_100}% +\label{ssubsec:StructureMETAL4H100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL4_H_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=0% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL4\_V\_50}% +\label{ssubsec:StructureMETAL4V50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL4_V_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=710000,Y=2184000% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL4\_H\_50}% +\label{ssubsec:StructureMETAL4H50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL4_H_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=1463040,Y=0% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsection{Layer: metal5}% +\label{subsec:Layermetal5}% +\subsubsection{Structure: METAL5\_V\_100}% +\label{ssubsec:StructureMETAL5V100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL5_V_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=1188520% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL5\_H\_100}% +\label{ssubsec:StructureMETAL5H100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL5_H_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=1092000% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL5\_V\_50}% +\label{ssubsec:StructureMETAL5V50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL5_V_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=1420000,Y=2184240% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL5\_H\_50}% +\label{ssubsec:StructureMETAL5H50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL5_H_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=546000% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsection{Layer: metal1}% +\label{subsec:Layermetal1}% +\subsubsection{Structure: METAL1\_V\_100}% +\label{ssubsec:StructureMETAL1V100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL1_V_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=731280,Y=681905% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL1\_H\_100}% +\label{ssubsec:StructureMETAL1H100}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL1_H_100.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=1148280,Y=839000% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL1\_V\_50}% +\label{ssubsec:StructureMETAL1V50}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL1_V_50.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=1670875,Y=866620% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\pagebreak% +\end{document} \ No newline at end of file