diff --git a/tapeout/gf180.csv b/tapeout/gf180.csv new file mode 100644 index 0000000000000000000000000000000000000000..89dc1be51bf1c1c85b55e07b6f03435d0a11bc81 --- /dev/null +++ b/tapeout/gf180.csv @@ -0,0 +1,112 @@ +Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments +Danube River(GF180),METAL2_V_20,0,0,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL3_V_20,382400,0,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL4_V_20,764800,0,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL5_V_20,1147200,240,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL2_H_20,1529600,51720,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL3_H_20,0,270120,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL4_H_20,391320,270120,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL5_H_20,782640,270120,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL2_V_10,1173720,287120,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL3_V_10,1446920,287120,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL4_V_10,1720120,287120,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL5_V_10,0,489420,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL2_H_10,273200,528020,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL3_H_10,551120,528020,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL4_H_10,829040,528020,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL5_H_10,1106960,528020,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL1_V_20,1384640,488520,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL1_H_20,1599240,526220,Kelvin,Resistor,I-V,,, +Danube River(GF180),NWELL_H_1,1835485,530820,Kelvin,Resistor,I-V,,, +Danube River(GF180),NWELL_V_1,1994485,530820,Kelvin,Resistor,I-V,,, +Danube River(GF180),NWELL_H_2,0,690820,Kelvin,Resistor,I-V,,, +Danube River(GF180),NWELL_V_2,159000,690820,Kelvin,Resistor,I-V,,, +Danube River(GF180),NWELL_H_5,318000,690820,Kelvin,Resistor,I-V,,, +Danube River(GF180),NWELL_V_5,477000,690820,Kelvin,Resistor,I-V,,, +Danube River(GF180),NWELL_H_10,636000,690820,Kelvin,Resistor,I-V,,, +Danube River(GF180),NWELL_V_10,795000,690820,Kelvin,Resistor,I-V,,, +Danube River(GF180),NWELL_H_20,954000,690820,Kelvin,Resistor,I-V,,, +Danube River(GF180),NWELL_V_20,1113000,690820,Kelvin,Resistor,I-V,,, +Danube River(GF180),PWELL_H_1,1272000,690820,Kelvin,Resistor,I-V,,, +Danube River(GF180),PWELL_V_1,1431000,690820,Kelvin,Resistor,I-V,,, +Danube River(GF180),PWELL_H_2,1590000,690820,Kelvin,Resistor,I-V,,, +Danube River(GF180),PWELL_V_2,1749000,690820,Kelvin,Resistor,I-V,,, +Danube River(GF180),PWELL_H_5,1908000,690820,Kelvin,Resistor,I-V,,, +Danube River(GF180),PWELL_V_5,0,850820,Kelvin,Resistor,I-V,,, +Danube River(GF180),PWELL_H_10,159000,850820,Kelvin,Resistor,I-V,,, +Danube River(GF180),PWELL_V_10,318000,850820,Kelvin,Resistor,I-V,,, +Danube River(GF180),PWELL_H_20,477000,850820,Kelvin,Resistor,I-V,,, +Danube River(GF180),PWELL_V_20,636000,850820,Kelvin,Resistor,I-V,,, +Danube River(GF180),NDIFFUSION_H_1,795000,850820,Kelvin,Resistor,I-V,,, +Danube River(GF180),NDIFFUSION_V_1,954000,850820,Kelvin,Resistor,I-V,,, +Danube River(GF180),NDIFFUSION_H_2,1113000,850820,Kelvin,Resistor,I-V,,, +Danube River(GF180),NDIFFUSION_V_2,1272000,850820,Kelvin,Resistor,I-V,,, +Danube River(GF180),NDIFFUSION_H_5,1431000,850820,Kelvin,Resistor,I-V,,, +Danube River(GF180),NDIFFUSION_V_5,1590000,850820,Kelvin,Resistor,I-V,,, +Danube River(GF180),NDIFFUSION_H_10,1749000,850820,Kelvin,Resistor,I-V,,, +Danube River(GF180),NDIFFUSION_V_10,1908000,850820,Kelvin,Resistor,I-V,,, +Danube River(GF180),NDIFFUSION_H_20,0,1010820,Kelvin,Resistor,I-V,,, +Danube River(GF180),NDIFFUSION_V_20,159000,1010820,Kelvin,Resistor,I-V,,, +Danube River(GF180),PDIFFUSION_H_1,318000,1010820,Kelvin,Resistor,I-V,,, +Danube River(GF180),PDIFFUSION_V_1,477000,1010820,Kelvin,Resistor,I-V,,, +Danube River(GF180),PDIFFUSION_H_2,636000,1010820,Kelvin,Resistor,I-V,,, +Danube River(GF180),PDIFFUSION_V_2,795000,1010820,Kelvin,Resistor,I-V,,, +Danube River(GF180),PDIFFUSION_H_5,954000,1010820,Kelvin,Resistor,I-V,,, +Danube River(GF180),PDIFFUSION_V_5,1113000,1010820,Kelvin,Resistor,I-V,,, +Danube River(GF180),PDIFFUSION_H_10,1272000,1010820,Kelvin,Resistor,I-V,,, +Danube River(GF180),PDIFFUSION_V_10,1431000,1010820,Kelvin,Resistor,I-V,,, +Danube River(GF180),PDIFFUSION_H_20,1590000,1010820,Kelvin,Resistor,I-V,,, +Danube River(GF180),PDIFFUSION_V_20,1749000,1010820,Kelvin,Resistor,I-V,,, +Danube River(GF180),POLY_H_1,1908000,1010820,Kelvin,Resistor,I-V,,, +Danube River(GF180),POLY_V_1,0,1170820,Kelvin,Resistor,I-V,,, +Danube River(GF180),POLY_H_2,159000,1170820,Kelvin,Resistor,I-V,,, +Danube River(GF180),POLY_V_2,318000,1170820,Kelvin,Resistor,I-V,,, +Danube River(GF180),POLY_H_5,477000,1170820,Kelvin,Resistor,I-V,,, +Danube River(GF180),POLY_V_5,636000,1170820,Kelvin,Resistor,I-V,,, +Danube River(GF180),POLY_H_10,795000,1170820,Kelvin,Resistor,I-V,,, +Danube River(GF180),POLY_V_10,954000,1170820,Kelvin,Resistor,I-V,,, +Danube River(GF180),POLY_H_20,1113000,1170820,Kelvin,Resistor,I-V,,, +Danube River(GF180),POLY_V_20,1272000,1170820,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL1_H_1,1431000,1170820,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL1_V_1,1590000,1170820,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL1_H_2,1749000,1170820,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL1_V_2,1908000,1170820,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL1_H_5,0,1330820,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL1_V_5,159000,1330820,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL1_H_10,318000,1330820,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL1_V_10,477000,1330820,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL2_H_1,636000,1330820,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL2_V_1,795000,1330820,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL2_H_2,954000,1330820,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL2_V_2,1113000,1330820,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL2_H_5,1272000,1330820,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL2_V_5,1431000,1330820,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL3_H_1,1590000,1330820,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL3_V_1,1749000,1330820,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL3_H_2,1908000,1330820,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL3_V_2,0,1490820,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL3_H_5,159000,1490820,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL3_V_5,318000,1490820,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL4_H_1,477000,1490820,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL4_V_1,636000,1490820,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL4_H_2,795000,1490820,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL4_V_2,954000,1490820,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL4_H_5,1113000,1490820,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL4_V_5,1272000,1490820,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL5_H_1,1431000,1490820,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL5_V_1,1590000,1490820,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL5_H_2,1749000,1490820,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL5_V_2,1908000,1490820,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL5_H_5,0,1650820,Kelvin,Resistor,I-V,,, +Danube River(GF180),METAL5_V_5,159000,1650820,Kelvin,Resistor,I-V,,, +Danube River(GF180),POLY/NWELL_CAP,318000,1650820,Kelvin,Capacitor,C-V,,,Area=12404um^2 +Danube River(GF180),POLY/PWELL_CAP,477000,1650820,Kelvin,Capacitor,C-V,,,Area=11969um^2 +Danube River(GF180),METAL1/NWELL_CAP,636000,1650820,Kelvin,Capacitor,C-V,,,Area=12408um^2 +Danube River(GF180),METAL1/PWELL_CAP,795000,1650820,Kelvin,Capacitor,C-V,,,Area=11974um^2 +Danube River(GF180),METAL2/METAL1_CAP,954000,1650820,Kelvin,Capacitor,C-V,,,Area=12655um^2 +Danube River(GF180),METAL3/METAL2_CAP,1113000,1650820,Kelvin,Capacitor,C-V,,,Area=12665um^2 +Danube River(GF180),METAL4/METAL3_CAP,1272000,1650820,Kelvin,Capacitor,C-V,,,Area=12665um^2 +Danube River(GF180),P_W3/L2,1431000,1650820,Kelvin,FET,IDS-VGS,,, +Danube River(GF180),N_W3/L2,1590000,1650820,Kelvin,FET,IDS-VGS,,, +Danube River(GF180),P_W4/L2,1749000,1650820,Kelvin,FET,IDS-VGS,,, +Danube River(GF180),N_W4/L2,1908000,1650820,Kelvin,FET,IDS-VGS,,, diff --git a/tapeout/gf180.gds b/tapeout/gf180.gds index d557d117af157b95428bcb72cf750b4b87a1407e..15d2eeff72ee590fdbe29f43f2e96098d51cca02 100644 Binary files a/tapeout/gf180.gds and b/tapeout/gf180.gds differ diff --git a/tapeout/gf180.pdf b/tapeout/gf180.pdf index caf2a78a67a7db6483a69adace47bc96fd1b68c6..ffa142b978b5b58bbe648c915660fbbbee60a4e3 100644 Binary files a/tapeout/gf180.pdf and b/tapeout/gf180.pdf differ diff --git a/tapeout/gf180.tex b/tapeout/gf180.tex index ae62b45bcc38fb02c3c9bc5880ddf605513d6475..d050f7826862334f1a0b6dd0afe821e8a18705a0 100644 --- a/tapeout/gf180.tex +++ b/tapeout/gf180.tex @@ -7,8 +7,8 @@ \usepackage{geometry}% \geometry{tmargin=0.5in,lmargin=0.5in,bmargin=0.5in,rmargin=0.5in}% \usepackage{float}% -\usepackage{ragged2e}% \usepackage{graphicx}% +\usepackage{ragged2e}% % \title{Danube River Test Waver}% \author{by LibreSilicon}% @@ -16,940 +16,1484 @@ \begin{document}% \normalsize% \maketitle% -This is the automatically generated documentation and guide line for the test structures in the GDSII file, generated by this script.\newline% +This is the automatically generated documentation and guide line for the test structures in the GDSII file, generated by this script,for the wafer titled Danube River(GF180)\newline% +% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=320px]{/tmp/danube/Danube_River(GF180).png}% +\end{figure} + % -This is phase two of the reverse engineering/verification of the manufacturing process.\newline% -The structures have been generated assuming basic flags and settings for the pad and size from "configs/gf180.cfg" as well as variables defined in "configs/gf180.py".\newline% +The below structures have been generated assuming basic flags and settings for the pad and size from "configs/gf180.cfg" for characterizing the process "GF180" (which can be found in librepdk/technologies).\newline% Those values need to be verified by checking under the microscope, whether the defects have gone away and measuring what the difference between predicted values and measured values is% +\pagebreak% \section{Resistors}% \label{sec:Resistors}% All the resistor structures for the various available layers, as defined in the configuration are being shown below. They are being measured with a 4 probe station, by applying a constant current over two of the probes, and then measuring the voltage over the other two.\newline% This is called a Kelvin structure.% -\subsection{Layer: nwell}% -\label{subsec:Layernwell}% -\subsubsection{Structure: NWELL\_V\_1}% -\label{ssubsec:StructureNWELLV1}% +\subsection{Layer: metal2}% +\label{subsec:Layermetal2}% +\subsubsection{Structure: METAL2\_V\_20}% +\label{ssubsec:StructureMETAL2V20}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/NWELL_V_1.png}% +\includegraphics[width=80px]{/tmp/danube/METAL2_V_20.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $69.7674k\Omega$% +The target value of this resistor is $100\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 1.7442V% +Expected measured voltage is 2.5mV% \newline% % -The current from the current source should go from pad 2 towards pad 3% +The X/Y{-}coordinates are: X=0,Y=0% \newline% % -The voltage over the resistor should be measured over pad 1 and pad 4% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% \newline% % \end{minipage} % -\subsubsection{Structure: NWELL\_H\_1}% -\label{ssubsec:StructureNWELLH1}% +\subsubsection{Structure: METAL2\_H\_20}% +\label{ssubsec:StructureMETAL2H20}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/NWELL_H_1.png}% +\includegraphics[width=80px]{/tmp/danube/METAL2_H_20.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $69.7674k\Omega$% +The target value of this resistor is $100\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 1.7442V% +Expected measured voltage is 2.5mV% \newline% % -The current from the current source should go from pad 1 towards pad 2% +The X/Y{-}coordinates are: X=1529600,Y=51720% \newline% % -The voltage over the resistor should be measured over pad 4 and pad 3% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% \newline% % \end{minipage} % -\subsubsection{Structure: NWELL\_V\_2}% -\label{ssubsec:StructureNWELLV2}% +\subsubsection{Structure: METAL2\_V\_10}% +\label{ssubsec:StructureMETAL2V10}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/NWELL_V_2.png}% +\includegraphics[width=80px]{/tmp/danube/METAL2_V_10.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $34.8837k\Omega$% +The target value of this resistor is $100\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 872.093mV% +Expected measured voltage is 2.5mV% \newline% % -The current from the current source should go from pad 2 towards pad 3% +The X/Y{-}coordinates are: X=1173720,Y=287120% \newline% % -The voltage over the resistor should be measured over pad 1 and pad 4% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% \newline% % \end{minipage} % -\subsubsection{Structure: NWELL\_H\_2}% -\label{ssubsec:StructureNWELLH2}% +\subsubsection{Structure: METAL2\_H\_10}% +\label{ssubsec:StructureMETAL2H10}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/NWELL_H_2.png}% +\includegraphics[width=80px]{/tmp/danube/METAL2_H_10.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $34.8837k\Omega$% +The target value of this resistor is $100\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 872.093mV% +Expected measured voltage is 2.5mV% \newline% % -The current from the current source should go from pad 1 towards pad 2% +The X/Y{-}coordinates are: X=273200,Y=528020% \newline% % -The voltage over the resistor should be measured over pad 4 and pad 3% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% \newline% % \end{minipage} % -\subsubsection{Structure: NWELL\_V\_5}% -\label{ssubsec:StructureNWELLV5}% +\subsubsection{Structure: METAL2\_H\_1}% +\label{ssubsec:StructureMETAL2H1}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/NWELL_V_5.png}% +\includegraphics[width=80px]{/tmp/danube/METAL2_H_1.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $13.9535k\Omega$% +The target value of this resistor is $100\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 348.837mV% +Expected measured voltage is 2.5mV% \newline% % -The current from the current source should go from pad 2 towards pad 3% +The X/Y{-}coordinates are: X=636000,Y=1330820% \newline% % -The voltage over the resistor should be measured over pad 1 and pad 4% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% \newline% % \end{minipage} % -\subsubsection{Structure: NWELL\_H\_5}% -\label{ssubsec:StructureNWELLH5}% +\subsubsection{Structure: METAL2\_V\_1}% +\label{ssubsec:StructureMETAL2V1}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/NWELL_H_5.png}% +\includegraphics[width=80px]{/tmp/danube/METAL2_V_1.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $13.9535k\Omega$% +The target value of this resistor is $100\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 348.837mV% +Expected measured voltage is 2.5mV% \newline% % -The current from the current source should go from pad 1 towards pad 2% +The X/Y{-}coordinates are: X=795000,Y=1330820% \newline% % -The voltage over the resistor should be measured over pad 4 and pad 3% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% \newline% % \end{minipage} % -\subsubsection{Structure: NWELL\_V\_10}% -\label{ssubsec:StructureNWELLV10}% +\subsubsection{Structure: METAL2\_H\_2}% +\label{ssubsec:StructureMETAL2H2}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/NWELL_V_10.png}% +\includegraphics[width=80px]{/tmp/danube/METAL2_H_2.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $6.9767k\Omega$% +The target value of this resistor is $100\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 174.419mV% +Expected measured voltage is 2.5mV% \newline% % -The current from the current source should go from pad 2 towards pad 3% +The X/Y{-}coordinates are: X=954000,Y=1330820% \newline% % -The voltage over the resistor should be measured over pad 1 and pad 4% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% \newline% % \end{minipage} % -\subsubsection{Structure: NWELL\_H\_10}% -\label{ssubsec:StructureNWELLH10}% +\subsubsection{Structure: METAL2\_V\_2}% +\label{ssubsec:StructureMETAL2V2}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/NWELL_H_10.png}% +\includegraphics[width=80px]{/tmp/danube/METAL2_V_2.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $6.9767k\Omega$% +The target value of this resistor is $100\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 174.419mV% +Expected measured voltage is 2.5mV% \newline% % -The current from the current source should go from pad 1 towards pad 2% +The X/Y{-}coordinates are: X=1113000,Y=1330820% \newline% % -The voltage over the resistor should be measured over pad 4 and pad 3% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% \newline% % \end{minipage} % -\subsubsection{Structure: NWELL\_V\_20}% -\label{ssubsec:StructureNWELLV20}% +\subsubsection{Structure: METAL2\_H\_5}% +\label{ssubsec:StructureMETAL2H5}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/NWELL_V_20.png}% +\includegraphics[width=80px]{/tmp/danube/METAL2_H_5.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $3.4884k\Omega$% +The target value of this resistor is $100\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 87.209mV% +Expected measured voltage is 2.5mV% \newline% % -The current from the current source should go from pad 2 towards pad 3% +The X/Y{-}coordinates are: X=1272000,Y=1330820% \newline% % -The voltage over the resistor should be measured over pad 1 and pad 4% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% \newline% % \end{minipage} % -\subsubsection{Structure: NWELL\_H\_20}% -\label{ssubsec:StructureNWELLH20}% +\subsubsection{Structure: METAL2\_V\_5}% +\label{ssubsec:StructureMETAL2V5}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/NWELL_H_20.png}% +\includegraphics[width=80px]{/tmp/danube/METAL2_V_5.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $3.4884k\Omega$% +The target value of this resistor is $100\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 87.209mV% +Expected measured voltage is 2.5mV% \newline% % -The current from the current source should go from pad 1 towards pad 2% +The X/Y{-}coordinates are: X=1431000,Y=1330820% \newline% % -The voltage over the resistor should be measured over pad 4 and pad 3% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% \newline% % \end{minipage} % -\subsection{Layer: pwell}% -\label{subsec:Layerpwell}% -\subsubsection{Structure: PWELL\_V\_1}% -\label{ssubsec:StructurePWELLV1}% +\subsection{Layer: metal3}% +\label{subsec:Layermetal3}% +\subsubsection{Structure: METAL3\_V\_20}% +\label{ssubsec:StructureMETAL3V20}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/PWELL_V_1.png}% +\includegraphics[width=80px]{/tmp/danube/METAL3_V_20.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $81.0811k\Omega$% +The target value of this resistor is $100\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 2.027V% +Expected measured voltage is 2.5mV% \newline% % -The current from the current source should go from pad 2 towards pad 3% +The X/Y{-}coordinates are: X=382400,Y=0% \newline% % -The voltage over the resistor should be measured over pad 1 and pad 4% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% \newline% % \end{minipage} % -\subsubsection{Structure: PWELL\_H\_1}% -\label{ssubsec:StructurePWELLH1}% +\subsubsection{Structure: METAL3\_H\_20}% +\label{ssubsec:StructureMETAL3H20}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/PWELL_H_1.png}% +\includegraphics[width=80px]{/tmp/danube/METAL3_H_20.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $81.0811k\Omega$% +The target value of this resistor is $100\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 2.027V% +Expected measured voltage is 2.5mV% \newline% % -The current from the current source should go from pad 1 towards pad 2% +The X/Y{-}coordinates are: X=0,Y=270120% \newline% % -The voltage over the resistor should be measured over pad 4 and pad 3% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% \newline% % \end{minipage} % -\subsubsection{Structure: PWELL\_V\_2}% -\label{ssubsec:StructurePWELLV2}% +\subsubsection{Structure: METAL3\_V\_10}% +\label{ssubsec:StructureMETAL3V10}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/PWELL_V_2.png}% +\includegraphics[width=80px]{/tmp/danube/METAL3_V_10.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $40.5405k\Omega$% +The target value of this resistor is $100\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 1.0135V% +Expected measured voltage is 2.5mV% \newline% % -The current from the current source should go from pad 2 towards pad 3% +The X/Y{-}coordinates are: X=1446920,Y=287120% \newline% % -The voltage over the resistor should be measured over pad 1 and pad 4% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% \newline% % \end{minipage} % -\subsubsection{Structure: PWELL\_H\_2}% -\label{ssubsec:StructurePWELLH2}% +\subsubsection{Structure: METAL3\_H\_10}% +\label{ssubsec:StructureMETAL3H10}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/PWELL_H_2.png}% +\includegraphics[width=80px]{/tmp/danube/METAL3_H_10.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $40.5405k\Omega$% +The target value of this resistor is $100\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 1.0135V% +Expected measured voltage is 2.5mV% \newline% % -The current from the current source should go from pad 1 towards pad 2% +The X/Y{-}coordinates are: X=551120,Y=528020% \newline% % -The voltage over the resistor should be measured over pad 4 and pad 3% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% \newline% % \end{minipage} % -\subsubsection{Structure: PWELL\_V\_5}% -\label{ssubsec:StructurePWELLV5}% +\subsubsection{Structure: METAL3\_H\_1}% +\label{ssubsec:StructureMETAL3H1}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/PWELL_V_5.png}% +\includegraphics[width=80px]{/tmp/danube/METAL3_H_1.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $16.2162k\Omega$% +The target value of this resistor is $100\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 405.405mV% +Expected measured voltage is 2.5mV% \newline% % -The current from the current source should go from pad 2 towards pad 3% +The X/Y{-}coordinates are: X=1590000,Y=1330820% \newline% % -The voltage over the resistor should be measured over pad 1 and pad 4% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% \newline% % \end{minipage} % -\subsubsection{Structure: PWELL\_H\_5}% -\label{ssubsec:StructurePWELLH5}% +\subsubsection{Structure: METAL3\_V\_1}% +\label{ssubsec:StructureMETAL3V1}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/PWELL_H_5.png}% +\includegraphics[width=80px]{/tmp/danube/METAL3_V_1.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $16.2162k\Omega$% +The target value of this resistor is $100\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 405.405mV% +Expected measured voltage is 2.5mV% \newline% % -The current from the current source should go from pad 1 towards pad 2% +The X/Y{-}coordinates are: X=1749000,Y=1330820% \newline% % -The voltage over the resistor should be measured over pad 4 and pad 3% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% \newline% % \end{minipage} % -\subsubsection{Structure: PWELL\_V\_10}% -\label{ssubsec:StructurePWELLV10}% +\subsubsection{Structure: METAL3\_H\_2}% +\label{ssubsec:StructureMETAL3H2}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/PWELL_V_10.png}% +\includegraphics[width=80px]{/tmp/danube/METAL3_H_2.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $8.1081k\Omega$% +The target value of this resistor is $100\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 202.703mV% +Expected measured voltage is 2.5mV% \newline% % -The current from the current source should go from pad 2 towards pad 3% +The X/Y{-}coordinates are: X=1908000,Y=1330820% \newline% % -The voltage over the resistor should be measured over pad 1 and pad 4% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% \newline% % \end{minipage} % -\subsubsection{Structure: PWELL\_H\_10}% -\label{ssubsec:StructurePWELLH10}% +\subsubsection{Structure: METAL3\_V\_2}% +\label{ssubsec:StructureMETAL3V2}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/PWELL_H_10.png}% +\includegraphics[width=80px]{/tmp/danube/METAL3_V_2.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $8.1081k\Omega$% +The target value of this resistor is $100\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 202.703mV% +Expected measured voltage is 2.5mV% \newline% % -The current from the current source should go from pad 1 towards pad 2% +The X/Y{-}coordinates are: X=0,Y=1490820% \newline% % -The voltage over the resistor should be measured over pad 4 and pad 3% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% \newline% % \end{minipage} % -\subsubsection{Structure: PWELL\_V\_20}% -\label{ssubsec:StructurePWELLV20}% +\subsubsection{Structure: METAL3\_H\_5}% +\label{ssubsec:StructureMETAL3H5}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/PWELL_V_20.png}% +\includegraphics[width=80px]{/tmp/danube/METAL3_H_5.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $4.0541k\Omega$% +The target value of this resistor is $100\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 101.351mV% +Expected measured voltage is 2.5mV% \newline% % -The current from the current source should go from pad 2 towards pad 3% +The X/Y{-}coordinates are: X=159000,Y=1490820% \newline% % -The voltage over the resistor should be measured over pad 1 and pad 4% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% \newline% % \end{minipage} % -\subsubsection{Structure: PWELL\_H\_20}% -\label{ssubsec:StructurePWELLH20}% +\subsubsection{Structure: METAL3\_V\_5}% +\label{ssubsec:StructureMETAL3V5}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/PWELL_H_20.png}% +\includegraphics[width=80px]{/tmp/danube/METAL3_V_5.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $4.0541k\Omega$% +The target value of this resistor is $100\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 101.351mV% +Expected measured voltage is 2.5mV% \newline% % -The current from the current source should go from pad 1 towards pad 2% +The X/Y{-}coordinates are: X=318000,Y=1490820% \newline% % -The voltage over the resistor should be measured over pad 4 and pad 3% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% \newline% % \end{minipage} % -\subsection{Layer: ndiffusion}% -\label{subsec:Layerndiffusion}% -\subsubsection{Structure: NDIFFUSION\_V\_1}% -\label{ssubsec:StructureNDIFFUSIONV1}% +\subsection{Layer: metal4}% +\label{subsec:Layermetal4}% +\subsubsection{Structure: METAL4\_V\_20}% +\label{ssubsec:StructureMETAL4V20}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/NDIFFUSION_V_1.png}% +\includegraphics[width=80px]{/tmp/danube/METAL4_V_20.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $24.0k\Omega$% +The target value of this resistor is $100\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 600.0mV% +Expected measured voltage is 2.5mV% \newline% % -The current from the current source should go from pad 2 towards pad 3% +The X/Y{-}coordinates are: X=764800,Y=0% \newline% % -The voltage over the resistor should be measured over pad 1 and pad 4% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% \newline% % \end{minipage} % -\subsubsection{Structure: NDIFFUSION\_H\_1}% -\label{ssubsec:StructureNDIFFUSIONH1}% +\subsubsection{Structure: METAL4\_H\_20}% +\label{ssubsec:StructureMETAL4H20}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/NDIFFUSION_H_1.png}% +\includegraphics[width=80px]{/tmp/danube/METAL4_H_20.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $24.0k\Omega$% +The target value of this resistor is $100\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 600.0mV% +Expected measured voltage is 2.5mV% \newline% % -The current from the current source should go from pad 1 towards pad 2% +The X/Y{-}coordinates are: X=391320,Y=270120% \newline% % -The voltage over the resistor should be measured over pad 4 and pad 3% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% \newline% % \end{minipage} % -\subsubsection{Structure: NDIFFUSION\_V\_2}% -\label{ssubsec:StructureNDIFFUSIONV2}% +\subsubsection{Structure: METAL4\_V\_10}% +\label{ssubsec:StructureMETAL4V10}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/NDIFFUSION_V_2.png}% +\includegraphics[width=80px]{/tmp/danube/METAL4_V_10.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $12.0k\Omega$% +The target value of this resistor is $100\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 300.0mV% +Expected measured voltage is 2.5mV% \newline% % -The current from the current source should go from pad 2 towards pad 3% +The X/Y{-}coordinates are: X=1720120,Y=287120% \newline% % -The voltage over the resistor should be measured over pad 1 and pad 4% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% \newline% % \end{minipage} % -\subsubsection{Structure: NDIFFUSION\_H\_2}% -\label{ssubsec:StructureNDIFFUSIONH2}% +\subsubsection{Structure: METAL4\_H\_10}% +\label{ssubsec:StructureMETAL4H10}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/NDIFFUSION_H_2.png}% +\includegraphics[width=80px]{/tmp/danube/METAL4_H_10.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $12.0k\Omega$% +The target value of this resistor is $100\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 300.0mV% +Expected measured voltage is 2.5mV% \newline% % -The current from the current source should go from pad 1 towards pad 2% +The X/Y{-}coordinates are: X=829040,Y=528020% \newline% % -The voltage over the resistor should be measured over pad 4 and pad 3% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% \newline% % \end{minipage} % -\subsubsection{Structure: NDIFFUSION\_V\_5}% -\label{ssubsec:StructureNDIFFUSIONV5}% +\subsubsection{Structure: METAL4\_H\_1}% +\label{ssubsec:StructureMETAL4H1}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/NDIFFUSION_V_5.png}% +\includegraphics[width=80px]{/tmp/danube/METAL4_H_1.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $4.8k\Omega$% +The target value of this resistor is $100\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 120.0mV% +Expected measured voltage is 2.5mV% \newline% % -The current from the current source should go from pad 2 towards pad 3% +The X/Y{-}coordinates are: X=477000,Y=1490820% \newline% % -The voltage over the resistor should be measured over pad 1 and pad 4% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% \newline% % \end{minipage} % -\subsubsection{Structure: NDIFFUSION\_H\_5}% -\label{ssubsec:StructureNDIFFUSIONH5}% +\subsubsection{Structure: METAL4\_V\_1}% +\label{ssubsec:StructureMETAL4V1}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/NDIFFUSION_H_5.png}% +\includegraphics[width=80px]{/tmp/danube/METAL4_V_1.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $4.8k\Omega$% +The target value of this resistor is $100\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 120.0mV% +Expected measured voltage is 2.5mV% \newline% % -The current from the current source should go from pad 1 towards pad 2% +The X/Y{-}coordinates are: X=636000,Y=1490820% \newline% % -The voltage over the resistor should be measured over pad 4 and pad 3% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% \newline% % \end{minipage} % -\subsubsection{Structure: NDIFFUSION\_V\_10}% -\label{ssubsec:StructureNDIFFUSIONV10}% +\subsubsection{Structure: METAL4\_H\_2}% +\label{ssubsec:StructureMETAL4H2}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/NDIFFUSION_V_10.png}% +\includegraphics[width=80px]{/tmp/danube/METAL4_H_2.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $2.4k\Omega$% +The target value of this resistor is $100\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 60.0mV% +Expected measured voltage is 2.5mV% \newline% % -The current from the current source should go from pad 2 towards pad 3% +The X/Y{-}coordinates are: X=795000,Y=1490820% \newline% % -The voltage over the resistor should be measured over pad 1 and pad 4% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL4\_V\_2}% +\label{ssubsec:StructureMETAL4V2}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL4_V_2.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=954000,Y=1490820% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL4\_H\_5}% +\label{ssubsec:StructureMETAL4H5}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL4_H_5.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=1113000,Y=1490820% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL4\_V\_5}% +\label{ssubsec:StructureMETAL4V5}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL4_V_5.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=1272000,Y=1490820% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsection{Layer: metal5}% +\label{subsec:Layermetal5}% +\subsubsection{Structure: METAL5\_V\_20}% +\label{ssubsec:StructureMETAL5V20}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL5_V_20.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=1147200,Y=240% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL5\_H\_20}% +\label{ssubsec:StructureMETAL5H20}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL5_H_20.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=782640,Y=270120% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL5\_V\_10}% +\label{ssubsec:StructureMETAL5V10}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL5_V_10.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=489420% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL5\_H\_10}% +\label{ssubsec:StructureMETAL5H10}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL5_H_10.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=1106960,Y=528020% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL5\_H\_1}% +\label{ssubsec:StructureMETAL5H1}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL5_H_1.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=1431000,Y=1490820% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL5\_V\_1}% +\label{ssubsec:StructureMETAL5V1}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL5_V_1.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=1590000,Y=1490820% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL5\_H\_2}% +\label{ssubsec:StructureMETAL5H2}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL5_H_2.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=1749000,Y=1490820% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL5\_V\_2}% +\label{ssubsec:StructureMETAL5V2}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL5_V_2.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=1908000,Y=1490820% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL5\_H\_5}% +\label{ssubsec:StructureMETAL5H5}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL5_H_5.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=1650820% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL5\_V\_5}% +\label{ssubsec:StructureMETAL5V5}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL5_V_5.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=159000,Y=1650820% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% \newline% % \end{minipage} % -\subsubsection{Structure: NDIFFUSION\_H\_10}% -\label{ssubsec:StructureNDIFFUSIONH10}% +\subsection{Layer: metal1}% +\label{subsec:Layermetal1}% +\subsubsection{Structure: METAL1\_V\_20}% +\label{ssubsec:StructureMETAL1V20}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/NDIFFUSION_H_10.png}% +\includegraphics[width=80px]{/tmp/danube/METAL1_V_20.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $2.4k\Omega$% +The target value of this resistor is $100\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 60.0mV% +Expected measured voltage is 2.5mV% \newline% % -The current from the current source should go from pad 1 towards pad 2% +The X/Y{-}coordinates are: X=1384640,Y=488520% \newline% % -The voltage over the resistor should be measured over pad 4 and pad 3% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% \newline% % \end{minipage} % -\subsubsection{Structure: NDIFFUSION\_V\_20}% -\label{ssubsec:StructureNDIFFUSIONV20}% +\subsubsection{Structure: METAL1\_H\_20}% +\label{ssubsec:StructureMETAL1H20}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/NDIFFUSION_V_20.png}% +\includegraphics[width=80px]{/tmp/danube/METAL1_H_20.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $1.2k\Omega$% +The target value of this resistor is $100\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 30.0mV% +Expected measured voltage is 2.5mV% \newline% % -The current from the current source should go from pad 2 towards pad 3% +The X/Y{-}coordinates are: X=1599240,Y=526220% \newline% % -The voltage over the resistor should be measured over pad 1 and pad 4% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% \newline% % \end{minipage} % -\subsubsection{Structure: NDIFFUSION\_H\_20}% -\label{ssubsec:StructureNDIFFUSIONH20}% +\subsubsection{Structure: METAL1\_H\_1}% +\label{ssubsec:StructureMETAL1H1}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/NDIFFUSION_H_20.png}% +\includegraphics[width=80px]{/tmp/danube/METAL1_H_1.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $1.2k\Omega$% +The target value of this resistor is $334.0\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 30.0mV% +Expected measured voltage is 8.35mV% +\newline% +% +The X/Y{-}coordinates are: X=1431000,Y=1170820% \newline% % The current from the current source should go from pad 1 towards pad 2% @@ -961,28 +1505,29 @@ The voltage over the resistor should be measured over pad 4 and pad 3% \end{minipage} % -\subsection{Layer: pdiffusion}% -\label{subsec:Layerpdiffusion}% -\subsubsection{Structure: PDIFFUSION\_V\_1}% -\label{ssubsec:StructurePDIFFUSIONV1}% +\subsubsection{Structure: METAL1\_V\_1}% +\label{ssubsec:StructureMETAL1V1}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/PDIFFUSION_V_1.png}% +\includegraphics[width=80px]{/tmp/danube/METAL1_V_1.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $39.4k\Omega$% +The target value of this resistor is $334.0\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 985.0mV% +Expected measured voltage is 8.35mV% +\newline% +% +The X/Y{-}coordinates are: X=1590000,Y=1170820% \newline% % The current from the current source should go from pad 2 towards pad 3% @@ -994,26 +1539,29 @@ The voltage over the resistor should be measured over pad 1 and pad 4% \end{minipage} % -\subsubsection{Structure: PDIFFUSION\_H\_1}% -\label{ssubsec:StructurePDIFFUSIONH1}% +\subsubsection{Structure: METAL1\_H\_2}% +\label{ssubsec:StructureMETAL1H2}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/PDIFFUSION_H_1.png}% +\includegraphics[width=80px]{/tmp/danube/METAL1_H_2.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $39.4k\Omega$% +The target value of this resistor is $167.0\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 985.0mV% +Expected measured voltage is 4.175mV% +\newline% +% +The X/Y{-}coordinates are: X=1749000,Y=1170820% \newline% % The current from the current source should go from pad 1 towards pad 2% @@ -1025,26 +1573,29 @@ The voltage over the resistor should be measured over pad 4 and pad 3% \end{minipage} % -\subsubsection{Structure: PDIFFUSION\_V\_2}% -\label{ssubsec:StructurePDIFFUSIONV2}% +\subsubsection{Structure: METAL1\_V\_2}% +\label{ssubsec:StructureMETAL1V2}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/PDIFFUSION_V_2.png}% +\includegraphics[width=80px]{/tmp/danube/METAL1_V_2.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $19.7k\Omega$% +The target value of this resistor is $167.0\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 492.5mV% +Expected measured voltage is 4.175mV% +\newline% +% +The X/Y{-}coordinates are: X=1908000,Y=1170820% \newline% % The current from the current source should go from pad 2 towards pad 3% @@ -1056,150 +1607,167 @@ The voltage over the resistor should be measured over pad 1 and pad 4% \end{minipage} % -\subsubsection{Structure: PDIFFUSION\_H\_2}% -\label{ssubsec:StructurePDIFFUSIONH2}% +\subsubsection{Structure: METAL1\_H\_5}% +\label{ssubsec:StructureMETAL1H5}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/PDIFFUSION_H_2.png}% +\includegraphics[width=80px]{/tmp/danube/METAL1_H_5.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $19.7k\Omega$% +The target value of this resistor is $100\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 492.5mV% +Expected measured voltage is 2.5mV% \newline% % -The current from the current source should go from pad 1 towards pad 2% +The X/Y{-}coordinates are: X=0,Y=1330820% \newline% % -The voltage over the resistor should be measured over pad 4 and pad 3% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% \newline% % \end{minipage} % -\subsubsection{Structure: PDIFFUSION\_V\_5}% -\label{ssubsec:StructurePDIFFUSIONV5}% +\subsubsection{Structure: METAL1\_V\_5}% +\label{ssubsec:StructureMETAL1V5}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/PDIFFUSION_V_5.png}% +\includegraphics[width=80px]{/tmp/danube/METAL1_V_5.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $7.88k\Omega$% +The target value of this resistor is $100\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 197.0mV% +Expected measured voltage is 2.5mV% \newline% % -The current from the current source should go from pad 2 towards pad 3% +The X/Y{-}coordinates are: X=159000,Y=1330820% \newline% % -The voltage over the resistor should be measured over pad 1 and pad 4% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% \newline% % \end{minipage} % -\subsubsection{Structure: PDIFFUSION\_H\_5}% -\label{ssubsec:StructurePDIFFUSIONH5}% +\subsubsection{Structure: METAL1\_H\_10}% +\label{ssubsec:StructureMETAL1H10}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/PDIFFUSION_H_5.png}% +\includegraphics[width=80px]{/tmp/danube/METAL1_H_10.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $7.88k\Omega$% +The target value of this resistor is $100\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 197.0mV% +Expected measured voltage is 2.5mV% \newline% % -The current from the current source should go from pad 1 towards pad 2% +The X/Y{-}coordinates are: X=318000,Y=1330820% \newline% % -The voltage over the resistor should be measured over pad 4 and pad 3% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% \newline% % \end{minipage} % -\subsubsection{Structure: PDIFFUSION\_V\_10}% -\label{ssubsec:StructurePDIFFUSIONV10}% +\subsubsection{Structure: METAL1\_V\_10}% +\label{ssubsec:StructureMETAL1V10}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/PDIFFUSION_V_10.png}% +\includegraphics[width=80px]{/tmp/danube/METAL1_V_10.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $3.94k\Omega$% +The target value of this resistor is $100\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 98.5mV% +Expected measured voltage is 2.5mV% \newline% % -The current from the current source should go from pad 2 towards pad 3% +The X/Y{-}coordinates are: X=477000,Y=1330820% \newline% % -The voltage over the resistor should be measured over pad 1 and pad 4% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% \newline% % \end{minipage} % -\subsubsection{Structure: PDIFFUSION\_H\_10}% -\label{ssubsec:StructurePDIFFUSIONH10}% +\subsection{Layer: nwell}% +\label{subsec:Layernwell}% +\subsubsection{Structure: NWELL\_H\_1}% +\label{ssubsec:StructureNWELLH1}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/PDIFFUSION_H_10.png}% +\includegraphics[width=80px]{/tmp/danube/NWELL_H_1.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $3.94k\Omega$% +The target value of this resistor is $69.767k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 98.5mV% +Expected measured voltage is 1.7442V% +\newline% +% +The X/Y{-}coordinates are: X=1835485,Y=530820% \newline% % The current from the current source should go from pad 1 towards pad 2% @@ -1211,26 +1779,29 @@ The voltage over the resistor should be measured over pad 4 and pad 3% \end{minipage} % -\subsubsection{Structure: PDIFFUSION\_V\_20}% -\label{ssubsec:StructurePDIFFUSIONV20}% +\subsubsection{Structure: NWELL\_V\_1}% +\label{ssubsec:StructureNWELLV1}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/PDIFFUSION_V_20.png}% +\includegraphics[width=80px]{/tmp/danube/NWELL_V_1.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $1.97k\Omega$% +The target value of this resistor is $69.767k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 49.25mV% +Expected measured voltage is 1.7442V% +\newline% +% +The X/Y{-}coordinates are: X=1994485,Y=530820% \newline% % The current from the current source should go from pad 2 towards pad 3% @@ -1242,26 +1813,29 @@ The voltage over the resistor should be measured over pad 1 and pad 4% \end{minipage} % -\subsubsection{Structure: PDIFFUSION\_H\_20}% -\label{ssubsec:StructurePDIFFUSIONH20}% +\subsubsection{Structure: NWELL\_H\_2}% +\label{ssubsec:StructureNWELLH2}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/PDIFFUSION_H_20.png}% +\includegraphics[width=80px]{/tmp/danube/NWELL_H_2.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $1.97k\Omega$% +The target value of this resistor is $34.884k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 49.25mV% +Expected measured voltage is 872.1mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=690820% \newline% % The current from the current source should go from pad 1 towards pad 2% @@ -1273,28 +1847,29 @@ The voltage over the resistor should be measured over pad 4 and pad 3% \end{minipage} % -\subsection{Layer: poly}% -\label{subsec:Layerpoly}% -\subsubsection{Structure: POLY\_V\_1}% -\label{ssubsec:StructurePOLYV1}% +\subsubsection{Structure: NWELL\_V\_2}% +\label{ssubsec:StructureNWELLV2}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/POLY_V_1.png}% +\includegraphics[width=80px]{/tmp/danube/NWELL_V_2.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $57.84k\Omega$% +The target value of this resistor is $34.884k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 1.446V% +Expected measured voltage is 872.1mV% +\newline% +% +The X/Y{-}coordinates are: X=159000,Y=690820% \newline% % The current from the current source should go from pad 2 towards pad 3% @@ -1306,26 +1881,29 @@ The voltage over the resistor should be measured over pad 1 and pad 4% \end{minipage} % -\subsubsection{Structure: POLY\_H\_1}% -\label{ssubsec:StructurePOLYH1}% +\subsubsection{Structure: NWELL\_H\_5}% +\label{ssubsec:StructureNWELLH5}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/POLY_H_1.png}% +\includegraphics[width=80px]{/tmp/danube/NWELL_H_5.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $57.84k\Omega$% +The target value of this resistor is $13.953k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 1.446V% +Expected measured voltage is 348.825mV% +\newline% +% +The X/Y{-}coordinates are: X=318000,Y=690820% \newline% % The current from the current source should go from pad 1 towards pad 2% @@ -1337,26 +1915,29 @@ The voltage over the resistor should be measured over pad 4 and pad 3% \end{minipage} % -\subsubsection{Structure: POLY\_V\_2}% -\label{ssubsec:StructurePOLYV2}% +\subsubsection{Structure: NWELL\_V\_5}% +\label{ssubsec:StructureNWELLV5}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/POLY_V_2.png}% +\includegraphics[width=80px]{/tmp/danube/NWELL_V_5.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $28.92k\Omega$% +The target value of this resistor is $13.953k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 723.0mV% +Expected measured voltage is 348.825mV% +\newline% +% +The X/Y{-}coordinates are: X=477000,Y=690820% \newline% % The current from the current source should go from pad 2 towards pad 3% @@ -1368,26 +1949,29 @@ The voltage over the resistor should be measured over pad 1 and pad 4% \end{minipage} % -\subsubsection{Structure: POLY\_H\_2}% -\label{ssubsec:StructurePOLYH2}% +\subsubsection{Structure: NWELL\_H\_10}% +\label{ssubsec:StructureNWELLH10}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/POLY_H_2.png}% +\includegraphics[width=80px]{/tmp/danube/NWELL_H_10.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $28.92k\Omega$% +The target value of this resistor is $6.977k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 723.0mV% +Expected measured voltage is 174.425mV% +\newline% +% +The X/Y{-}coordinates are: X=636000,Y=690820% \newline% % The current from the current source should go from pad 1 towards pad 2% @@ -1399,26 +1983,29 @@ The voltage over the resistor should be measured over pad 4 and pad 3% \end{minipage} % -\subsubsection{Structure: POLY\_V\_5}% -\label{ssubsec:StructurePOLYV5}% +\subsubsection{Structure: NWELL\_V\_10}% +\label{ssubsec:StructureNWELLV10}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/POLY_V_5.png}% +\includegraphics[width=80px]{/tmp/danube/NWELL_V_10.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $11.568k\Omega$% +The target value of this resistor is $6.977k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 289.2mV% +Expected measured voltage is 174.425mV% +\newline% +% +The X/Y{-}coordinates are: X=795000,Y=690820% \newline% % The current from the current source should go from pad 2 towards pad 3% @@ -1430,26 +2017,29 @@ The voltage over the resistor should be measured over pad 1 and pad 4% \end{minipage} % -\subsubsection{Structure: POLY\_H\_5}% -\label{ssubsec:StructurePOLYH5}% +\subsubsection{Structure: NWELL\_H\_20}% +\label{ssubsec:StructureNWELLH20}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/POLY_H_5.png}% +\includegraphics[width=80px]{/tmp/danube/NWELL_H_20.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $11.568k\Omega$% +The target value of this resistor is $3.488k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 289.2mV% +Expected measured voltage is 87.2mV% +\newline% +% +The X/Y{-}coordinates are: X=954000,Y=690820% \newline% % The current from the current source should go from pad 1 towards pad 2% @@ -1461,26 +2051,29 @@ The voltage over the resistor should be measured over pad 4 and pad 3% \end{minipage} % -\subsubsection{Structure: POLY\_V\_10}% -\label{ssubsec:StructurePOLYV10}% +\subsubsection{Structure: NWELL\_V\_20}% +\label{ssubsec:StructureNWELLV20}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/POLY_V_10.png}% +\includegraphics[width=80px]{/tmp/danube/NWELL_V_20.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $5.784k\Omega$% +The target value of this resistor is $3.488k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 144.6mV% +Expected measured voltage is 87.2mV% +\newline% +% +The X/Y{-}coordinates are: X=1113000,Y=690820% \newline% % The current from the current source should go from pad 2 towards pad 3% @@ -1492,26 +2085,31 @@ The voltage over the resistor should be measured over pad 1 and pad 4% \end{minipage} % -\subsubsection{Structure: POLY\_H\_10}% -\label{ssubsec:StructurePOLYH10}% +\subsection{Layer: pwell}% +\label{subsec:Layerpwell}% +\subsubsection{Structure: PWELL\_H\_1}% +\label{ssubsec:StructurePWELLH1}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/POLY_H_10.png}% +\includegraphics[width=80px]{/tmp/danube/PWELL_H_1.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $5.784k\Omega$% +The target value of this resistor is $81.081k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 144.6mV% +Expected measured voltage is 2.027V% +\newline% +% +The X/Y{-}coordinates are: X=1272000,Y=690820% \newline% % The current from the current source should go from pad 1 towards pad 2% @@ -1523,26 +2121,29 @@ The voltage over the resistor should be measured over pad 4 and pad 3% \end{minipage} % -\subsubsection{Structure: POLY\_V\_20}% -\label{ssubsec:StructurePOLYV20}% +\subsubsection{Structure: PWELL\_V\_1}% +\label{ssubsec:StructurePWELLV1}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/POLY_V_20.png}% +\includegraphics[width=80px]{/tmp/danube/PWELL_V_1.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $2.892k\Omega$% +The target value of this resistor is $81.081k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 72.3mV% +Expected measured voltage is 2.027V% +\newline% +% +The X/Y{-}coordinates are: X=1431000,Y=690820% \newline% % The current from the current source should go from pad 2 towards pad 3% @@ -1554,26 +2155,29 @@ The voltage over the resistor should be measured over pad 1 and pad 4% \end{minipage} % -\subsubsection{Structure: POLY\_H\_20}% -\label{ssubsec:StructurePOLYH20}% +\subsubsection{Structure: PWELL\_H\_2}% +\label{ssubsec:StructurePWELLH2}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/POLY_H_20.png}% +\includegraphics[width=80px]{/tmp/danube/PWELL_H_2.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $2.892k\Omega$% +The target value of this resistor is $40.541k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 72.3mV% +Expected measured voltage is 1.0135V% +\newline% +% +The X/Y{-}coordinates are: X=1590000,Y=690820% \newline% % The current from the current source should go from pad 1 towards pad 2% @@ -1585,28 +2189,29 @@ The voltage over the resistor should be measured over pad 4 and pad 3% \end{minipage} % -\subsection{Layer: metal1}% -\label{subsec:Layermetal1}% -\subsubsection{Structure: METAL1\_V\_1}% -\label{ssubsec:StructureMETAL1V1}% +\subsubsection{Structure: PWELL\_V\_2}% +\label{ssubsec:StructurePWELLV2}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/METAL1_V_1.png}% +\includegraphics[width=80px]{/tmp/danube/PWELL_V_2.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $333.913\Omega$% +The target value of this resistor is $40.541k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 8.348mV% +Expected measured voltage is 1.0135V% +\newline% +% +The X/Y{-}coordinates are: X=1749000,Y=690820% \newline% % The current from the current source should go from pad 2 towards pad 3% @@ -1618,26 +2223,29 @@ The voltage over the resistor should be measured over pad 1 and pad 4% \end{minipage} % -\subsubsection{Structure: METAL1\_H\_1}% -\label{ssubsec:StructureMETAL1H1}% +\subsubsection{Structure: PWELL\_H\_5}% +\label{ssubsec:StructurePWELLH5}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/METAL1_H_1.png}% +\includegraphics[width=80px]{/tmp/danube/PWELL_H_5.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $333.913\Omega$% +The target value of this resistor is $16.216k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 8.348mV% +Expected measured voltage is 405.4mV% +\newline% +% +The X/Y{-}coordinates are: X=1908000,Y=690820% \newline% % The current from the current source should go from pad 1 towards pad 2% @@ -1649,26 +2257,29 @@ The voltage over the resistor should be measured over pad 4 and pad 3% \end{minipage} % -\subsubsection{Structure: METAL1\_V\_2}% -\label{ssubsec:StructureMETAL1V2}% +\subsubsection{Structure: PWELL\_V\_5}% +\label{ssubsec:StructurePWELLV5}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/METAL1_V_2.png}% +\includegraphics[width=80px]{/tmp/danube/PWELL_V_5.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $166.9565\Omega$% +The target value of this resistor is $16.216k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 4.174mV% +Expected measured voltage is 405.4mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=850820% \newline% % The current from the current source should go from pad 2 towards pad 3% @@ -1680,26 +2291,29 @@ The voltage over the resistor should be measured over pad 1 and pad 4% \end{minipage} % -\subsubsection{Structure: METAL1\_H\_2}% -\label{ssubsec:StructureMETAL1H2}% +\subsubsection{Structure: PWELL\_H\_10}% +\label{ssubsec:StructurePWELLH10}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/METAL1_H_2.png}% +\includegraphics[width=80px]{/tmp/danube/PWELL_H_10.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $166.9565\Omega$% +The target value of this resistor is $8.108k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 4.174mV% +Expected measured voltage is 202.7mV% +\newline% +% +The X/Y{-}coordinates are: X=159000,Y=850820% \newline% % The current from the current source should go from pad 1 towards pad 2% @@ -1711,150 +2325,167 @@ The voltage over the resistor should be measured over pad 4 and pad 3% \end{minipage} % -\subsubsection{Structure: METAL1\_H\_5}% -\label{ssubsec:StructureMETAL1H5}% +\subsubsection{Structure: PWELL\_V\_10}% +\label{ssubsec:StructurePWELLV10}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/METAL1_H_5.png}% +\includegraphics[width=80px]{/tmp/danube/PWELL_V_10.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $1.4032k\Omega$% +The target value of this resistor is $8.108k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 35.0809mV% +Expected measured voltage is 202.7mV% +\newline% +% +The X/Y{-}coordinates are: X=318000,Y=850820% \newline% % -The current from the current source should go from pad 1 towards pad 3% +The current from the current source should go from pad 2 towards pad 3% \newline% % -The voltage over the resistor should be measured over pad 2 and pad 4% +The voltage over the resistor should be measured over pad 1 and pad 4% \newline% % \end{minipage} % -\subsubsection{Structure: METAL1\_V\_5}% -\label{ssubsec:StructureMETAL1V5}% +\subsubsection{Structure: PWELL\_H\_20}% +\label{ssubsec:StructurePWELLH20}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/METAL1_V_5.png}% +\includegraphics[width=80px]{/tmp/danube/PWELL_H_20.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $1.4032k\Omega$% +The target value of this resistor is $4.054k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 35.0809mV% +Expected measured voltage is 101.35mV% +\newline% +% +The X/Y{-}coordinates are: X=477000,Y=850820% \newline% % -The current from the current source should go from pad 4 towards pad 2% +The current from the current source should go from pad 1 towards pad 2% \newline% % -The voltage over the resistor should be measured over pad 1 and pad 3% +The voltage over the resistor should be measured over pad 4 and pad 3% \newline% % \end{minipage} % -\subsubsection{Structure: METAL1\_H\_10}% -\label{ssubsec:StructureMETAL1H10}% +\subsubsection{Structure: PWELL\_V\_20}% +\label{ssubsec:StructurePWELLV20}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/METAL1_H_10.png}% +\includegraphics[width=80px]{/tmp/danube/PWELL_V_20.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $368.985\Omega$% +The target value of this resistor is $4.054k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 9.2246mV% +Expected measured voltage is 101.35mV% +\newline% +% +The X/Y{-}coordinates are: X=636000,Y=850820% \newline% % -The current from the current source should go from pad 1 towards pad 3% +The current from the current source should go from pad 2 towards pad 3% \newline% % -The voltage over the resistor should be measured over pad 2 and pad 4% +The voltage over the resistor should be measured over pad 1 and pad 4% \newline% % \end{minipage} % -\subsubsection{Structure: METAL1\_V\_10}% -\label{ssubsec:StructureMETAL1V10}% +\subsection{Layer: ndiffusion}% +\label{subsec:Layerndiffusion}% +\subsubsection{Structure: NDIFFUSION\_H\_1}% +\label{ssubsec:StructureNDIFFUSIONH1}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/METAL1_V_10.png}% +\includegraphics[width=80px]{/tmp/danube/NDIFFUSION_H_1.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $368.985\Omega$% +The target value of this resistor is $24.0k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 9.2246mV% +Expected measured voltage is 600.0mV% +\newline% +% +The X/Y{-}coordinates are: X=795000,Y=850820% \newline% % -The current from the current source should go from pad 4 towards pad 2% +The current from the current source should go from pad 1 towards pad 2% \newline% % -The voltage over the resistor should be measured over pad 1 and pad 3% +The voltage over the resistor should be measured over pad 4 and pad 3% \newline% % \end{minipage} % -\subsubsection{Structure: METAL1\_H\_20}% -\label{ssubsec:StructureMETAL1H20}% +\subsubsection{Structure: NDIFFUSION\_V\_1}% +\label{ssubsec:StructureNDIFFUSIONV1}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/METAL1_H_20.png}% +\includegraphics[width=80px]{/tmp/danube/NDIFFUSION_V_1.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $100.3743\Omega$% +The target value of this resistor is $24.0k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 2.5094mV% +Expected measured voltage is 600.0mV% +\newline% +% +The X/Y{-}coordinates are: X=954000,Y=850820% \newline% % The current from the current source should go from pad 2 towards pad 3% @@ -1866,26 +2497,29 @@ The voltage over the resistor should be measured over pad 1 and pad 4% \end{minipage} % -\subsubsection{Structure: METAL1\_V\_20}% -\label{ssubsec:StructureMETAL1V20}% +\subsubsection{Structure: NDIFFUSION\_H\_2}% +\label{ssubsec:StructureNDIFFUSIONH2}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/METAL1_V_20.png}% +\includegraphics[width=80px]{/tmp/danube/NDIFFUSION_H_2.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $100.3743\Omega$% +The target value of this resistor is $12.0k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 2.5094mV% +Expected measured voltage is 300.0mV% +\newline% +% +The X/Y{-}coordinates are: X=1113000,Y=850820% \newline% % The current from the current source should go from pad 1 towards pad 2% @@ -1897,28 +2531,29 @@ The voltage over the resistor should be measured over pad 4 and pad 3% \end{minipage} % -\subsection{Layer: metal2}% -\label{subsec:Layermetal2}% -\subsubsection{Structure: METAL2\_H\_1}% -\label{ssubsec:StructureMETAL2H1}% +\subsubsection{Structure: NDIFFUSION\_V\_2}% +\label{ssubsec:StructureNDIFFUSIONV2}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/METAL2_H_1.png}% +\includegraphics[width=80px]{/tmp/danube/NDIFFUSION_V_2.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $1.3932k\Omega$% +The target value of this resistor is $12.0k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 34.8295mV% +Expected measured voltage is 300.0mV% +\newline% +% +The X/Y{-}coordinates are: X=1272000,Y=850820% \newline% % The current from the current source should go from pad 2 towards pad 3% @@ -1930,26 +2565,29 @@ The voltage over the resistor should be measured over pad 1 and pad 4% \end{minipage} % -\subsubsection{Structure: METAL2\_V\_1}% -\label{ssubsec:StructureMETAL2V1}% +\subsubsection{Structure: NDIFFUSION\_H\_5}% +\label{ssubsec:StructureNDIFFUSIONH5}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/METAL2_V_1.png}% +\includegraphics[width=80px]{/tmp/danube/NDIFFUSION_H_5.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $1.3932k\Omega$% +The target value of this resistor is $4.8k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 34.8295mV% +Expected measured voltage is 120.0mV% +\newline% +% +The X/Y{-}coordinates are: X=1431000,Y=850820% \newline% % The current from the current source should go from pad 1 towards pad 2% @@ -1961,183 +2599,165 @@ The voltage over the resistor should be measured over pad 4 and pad 3% \end{minipage} % -\subsubsection{Structure: METAL2\_H\_2}% -\label{ssubsec:StructureMETAL2H2}% +\subsubsection{Structure: NDIFFUSION\_V\_5}% +\label{ssubsec:StructureNDIFFUSIONV5}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/METAL2_H_2.png}% +\includegraphics[width=80px]{/tmp/danube/NDIFFUSION_V_5.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $468.7857\Omega$% +The target value of this resistor is $4.8k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 11.7196mV% -\newline% -% -The current from the current source should go from pad 1 towards pad 3% -\newline% -% -The voltage over the resistor should be measured over pad 2 and pad 4% -\newline% -% -\end{minipage} - -% -\subsubsection{Structure: METAL2\_V\_2}% -\label{ssubsec:StructureMETAL2V2}% -\begin{minipage}{0.5\textwidth}% - - -\begin{figure}[H]% -\centering% -\includegraphics[width=80px]{/tmp/danube/METAL2_V_2.png}% -\end{figure} - -% -\end{minipage}% -\begin{minipage}{0.5\textwidth}% -The target value of this resistor is $468.7857\Omega$% -\newline% -% -Recommended measurement current is 25uA% +Expected measured voltage is 120.0mV% \newline% % -Expected measured voltage is 11.7196mV% +The X/Y{-}coordinates are: X=1590000,Y=850820% \newline% % -The current from the current source should go from pad 4 towards pad 2% +The current from the current source should go from pad 2 towards pad 3% \newline% % -The voltage over the resistor should be measured over pad 1 and pad 3% +The voltage over the resistor should be measured over pad 1 and pad 4% \newline% % \end{minipage} % -\subsubsection{Structure: METAL2\_5}% -\label{ssubsec:StructureMETAL25}% +\subsubsection{Structure: NDIFFUSION\_H\_10}% +\label{ssubsec:StructureNDIFFUSIONH10}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/METAL2_5.png}% +\includegraphics[width=80px]{/tmp/danube/NDIFFUSION_H_10.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $214.6929\Omega$% +The target value of this resistor is $2.4k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 5.3673mV% +Expected measured voltage is 60.0mV% \newline% % -The current from the current source should go from pad 3 towards pad 4% +The X/Y{-}coordinates are: X=1749000,Y=850820% \newline% % -The voltage over the resistor should be measured over pad 2 and pad 1% +The current from the current source should go from pad 1 towards pad 2% +\newline% +% +The voltage over the resistor should be measured over pad 4 and pad 3% \newline% % \end{minipage} % -\subsubsection{Structure: METAL2\_10}% -\label{ssubsec:StructureMETAL210}% +\subsubsection{Structure: NDIFFUSION\_V\_10}% +\label{ssubsec:StructureNDIFFUSIONV10}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/METAL2_10.png}% +\includegraphics[width=80px]{/tmp/danube/NDIFFUSION_V_10.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $59.0821\Omega$% +The target value of this resistor is $2.4k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 1.4771mV% +Expected measured voltage is 60.0mV% \newline% % -The current from the current source should go from pad 3 towards pad 4% +The X/Y{-}coordinates are: X=1908000,Y=850820% \newline% % -The voltage over the resistor should be measured over pad 2 and pad 1% +The current from the current source should go from pad 2 towards pad 3% +\newline% +% +The voltage over the resistor should be measured over pad 1 and pad 4% \newline% % \end{minipage} % -\subsubsection{Structure: METAL2\_20}% -\label{ssubsec:StructureMETAL220}% +\subsubsection{Structure: NDIFFUSION\_H\_20}% +\label{ssubsec:StructureNDIFFUSIONH20}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/METAL2_20.png}% +\includegraphics[width=80px]{/tmp/danube/NDIFFUSION_H_20.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $29.9161\Omega$% +The target value of this resistor is $1.2k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 747.9018uV% +Expected measured voltage is 30.0mV% \newline% % -The current from the current source should go from pad 3 towards pad 4% +The X/Y{-}coordinates are: X=0,Y=1010820% \newline% % -The voltage over the resistor should be measured over pad 2 and pad 1% +The current from the current source should go from pad 1 towards pad 2% +\newline% +% +The voltage over the resistor should be measured over pad 4 and pad 3% \newline% % \end{minipage} % -\subsection{Layer: metal3}% -\label{subsec:Layermetal3}% -\subsubsection{Structure: METAL3\_H\_1}% -\label{ssubsec:StructureMETAL3H1}% +\subsubsection{Structure: NDIFFUSION\_V\_20}% +\label{ssubsec:StructureNDIFFUSIONV20}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/METAL3_H_1.png}% +\includegraphics[width=80px]{/tmp/danube/NDIFFUSION_V_20.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $1.3932k\Omega$% +The target value of this resistor is $1.2k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 34.8295mV% +Expected measured voltage is 30.0mV% +\newline% +% +The X/Y{-}coordinates are: X=159000,Y=1010820% \newline% % The current from the current source should go from pad 2 towards pad 3% @@ -2149,26 +2769,31 @@ The voltage over the resistor should be measured over pad 1 and pad 4% \end{minipage} % -\subsubsection{Structure: METAL3\_V\_1}% -\label{ssubsec:StructureMETAL3V1}% +\subsection{Layer: pdiffusion}% +\label{subsec:Layerpdiffusion}% +\subsubsection{Structure: PDIFFUSION\_H\_1}% +\label{ssubsec:StructurePDIFFUSIONH1}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/METAL3_V_1.png}% +\includegraphics[width=80px]{/tmp/danube/PDIFFUSION_H_1.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $1.3932k\Omega$% +The target value of this resistor is $39.4k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 34.8295mV% +Expected measured voltage is 985.0mV% +\newline% +% +The X/Y{-}coordinates are: X=318000,Y=1010820% \newline% % The current from the current source should go from pad 1 towards pad 2% @@ -2180,594 +2805,649 @@ The voltage over the resistor should be measured over pad 4 and pad 3% \end{minipage} % -\subsubsection{Structure: METAL3\_H\_2}% -\label{ssubsec:StructureMETAL3H2}% +\subsubsection{Structure: PDIFFUSION\_V\_1}% +\label{ssubsec:StructurePDIFFUSIONV1}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/METAL3_H_2.png}% +\includegraphics[width=80px]{/tmp/danube/PDIFFUSION_V_1.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $468.7857\Omega$% +The target value of this resistor is $39.4k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 11.7196mV% +Expected measured voltage is 985.0mV% +\newline% +% +The X/Y{-}coordinates are: X=477000,Y=1010820% \newline% % -The current from the current source should go from pad 1 towards pad 3% +The current from the current source should go from pad 2 towards pad 3% \newline% % -The voltage over the resistor should be measured over pad 2 and pad 4% +The voltage over the resistor should be measured over pad 1 and pad 4% \newline% % \end{minipage} % -\subsubsection{Structure: METAL3\_V\_2}% -\label{ssubsec:StructureMETAL3V2}% +\subsubsection{Structure: PDIFFUSION\_H\_2}% +\label{ssubsec:StructurePDIFFUSIONH2}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/METAL3_V_2.png}% +\includegraphics[width=80px]{/tmp/danube/PDIFFUSION_H_2.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $468.7857\Omega$% +The target value of this resistor is $19.7k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 11.7196mV% +Expected measured voltage is 492.5mV% +\newline% +% +The X/Y{-}coordinates are: X=636000,Y=1010820% \newline% % -The current from the current source should go from pad 4 towards pad 2% +The current from the current source should go from pad 1 towards pad 2% \newline% % -The voltage over the resistor should be measured over pad 1 and pad 3% +The voltage over the resistor should be measured over pad 4 and pad 3% \newline% % \end{minipage} % -\subsubsection{Structure: METAL3\_5}% -\label{ssubsec:StructureMETAL35}% +\subsubsection{Structure: PDIFFUSION\_V\_2}% +\label{ssubsec:StructurePDIFFUSIONV2}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/METAL3_5.png}% +\includegraphics[width=80px]{/tmp/danube/PDIFFUSION_V_2.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $214.6929\Omega$% +The target value of this resistor is $19.7k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 5.3673mV% +Expected measured voltage is 492.5mV% \newline% % -The current from the current source should go from pad 3 towards pad 4% +The X/Y{-}coordinates are: X=795000,Y=1010820% \newline% % -The voltage over the resistor should be measured over pad 2 and pad 1% +The current from the current source should go from pad 2 towards pad 3% +\newline% +% +The voltage over the resistor should be measured over pad 1 and pad 4% \newline% % \end{minipage} % -\subsubsection{Structure: METAL3\_10}% -\label{ssubsec:StructureMETAL310}% +\subsubsection{Structure: PDIFFUSION\_H\_5}% +\label{ssubsec:StructurePDIFFUSIONH5}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/METAL3_10.png}% +\includegraphics[width=80px]{/tmp/danube/PDIFFUSION_H_5.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $59.0821\Omega$% +The target value of this resistor is $7.88k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 1.4771mV% +Expected measured voltage is 197.0mV% \newline% % -The current from the current source should go from pad 3 towards pad 4% +The X/Y{-}coordinates are: X=954000,Y=1010820% \newline% % -The voltage over the resistor should be measured over pad 2 and pad 1% +The current from the current source should go from pad 1 towards pad 2% +\newline% +% +The voltage over the resistor should be measured over pad 4 and pad 3% \newline% % \end{minipage} % -\subsubsection{Structure: METAL3\_20}% -\label{ssubsec:StructureMETAL320}% +\subsubsection{Structure: PDIFFUSION\_V\_5}% +\label{ssubsec:StructurePDIFFUSIONV5}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/METAL3_20.png}% +\includegraphics[width=80px]{/tmp/danube/PDIFFUSION_V_5.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $29.9161\Omega$% +The target value of this resistor is $7.88k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 747.9018uV% +Expected measured voltage is 197.0mV% +\newline% +% +The X/Y{-}coordinates are: X=1113000,Y=1010820% \newline% % -The current from the current source should go from pad 3 towards pad 4% +The current from the current source should go from pad 2 towards pad 3% \newline% % -The voltage over the resistor should be measured over pad 2 and pad 1% +The voltage over the resistor should be measured over pad 1 and pad 4% \newline% % \end{minipage} % -\subsection{Layer: metal4}% -\label{subsec:Layermetal4}% -\subsubsection{Structure: METAL4\_H\_1}% -\label{ssubsec:StructureMETAL4H1}% +\subsubsection{Structure: PDIFFUSION\_H\_10}% +\label{ssubsec:StructurePDIFFUSIONH10}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/METAL4_H_1.png}% +\includegraphics[width=80px]{/tmp/danube/PDIFFUSION_H_10.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $1.3932k\Omega$% +The target value of this resistor is $3.94k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 34.8295mV% +Expected measured voltage is 98.5mV% +\newline% +% +The X/Y{-}coordinates are: X=1272000,Y=1010820% \newline% % -The current from the current source should go from pad 2 towards pad 3% +The current from the current source should go from pad 1 towards pad 2% \newline% % -The voltage over the resistor should be measured over pad 1 and pad 4% +The voltage over the resistor should be measured over pad 4 and pad 3% \newline% % \end{minipage} % -\subsubsection{Structure: METAL4\_V\_1}% -\label{ssubsec:StructureMETAL4V1}% +\subsubsection{Structure: PDIFFUSION\_V\_10}% +\label{ssubsec:StructurePDIFFUSIONV10}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/METAL4_V_1.png}% +\includegraphics[width=80px]{/tmp/danube/PDIFFUSION_V_10.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $1.3932k\Omega$% +The target value of this resistor is $3.94k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 34.8295mV% +Expected measured voltage is 98.5mV% \newline% % -The current from the current source should go from pad 1 towards pad 2% +The X/Y{-}coordinates are: X=1431000,Y=1010820% \newline% % -The voltage over the resistor should be measured over pad 4 and pad 3% +The current from the current source should go from pad 2 towards pad 3% +\newline% +% +The voltage over the resistor should be measured over pad 1 and pad 4% \newline% % \end{minipage} % -\subsubsection{Structure: METAL4\_H\_2}% -\label{ssubsec:StructureMETAL4H2}% +\subsubsection{Structure: PDIFFUSION\_H\_20}% +\label{ssubsec:StructurePDIFFUSIONH20}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/METAL4_H_2.png}% +\includegraphics[width=80px]{/tmp/danube/PDIFFUSION_H_20.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $468.7857\Omega$% +The target value of this resistor is $1.97k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 11.7196mV% +Expected measured voltage is 49.25mV% +\newline% +% +The X/Y{-}coordinates are: X=1590000,Y=1010820% \newline% % -The current from the current source should go from pad 1 towards pad 3% +The current from the current source should go from pad 1 towards pad 2% \newline% % -The voltage over the resistor should be measured over pad 2 and pad 4% +The voltage over the resistor should be measured over pad 4 and pad 3% \newline% % \end{minipage} % -\subsubsection{Structure: METAL4\_V\_2}% -\label{ssubsec:StructureMETAL4V2}% +\subsubsection{Structure: PDIFFUSION\_V\_20}% +\label{ssubsec:StructurePDIFFUSIONV20}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/METAL4_V_2.png}% +\includegraphics[width=80px]{/tmp/danube/PDIFFUSION_V_20.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $468.7857\Omega$% +The target value of this resistor is $1.97k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 11.7196mV% +Expected measured voltage is 49.25mV% +\newline% +% +The X/Y{-}coordinates are: X=1749000,Y=1010820% \newline% % -The current from the current source should go from pad 4 towards pad 2% +The current from the current source should go from pad 2 towards pad 3% \newline% % -The voltage over the resistor should be measured over pad 1 and pad 3% +The voltage over the resistor should be measured over pad 1 and pad 4% \newline% % \end{minipage} % -\subsubsection{Structure: METAL4\_5}% -\label{ssubsec:StructureMETAL45}% +\subsection{Layer: poly}% +\label{subsec:Layerpoly}% +\subsubsection{Structure: POLY\_H\_1}% +\label{ssubsec:StructurePOLYH1}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/METAL4_5.png}% +\includegraphics[width=80px]{/tmp/danube/POLY_H_1.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $214.6929\Omega$% +The target value of this resistor is $57.84k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 5.3673mV% +Expected measured voltage is 1.446V% \newline% % -The current from the current source should go from pad 3 towards pad 4% +The X/Y{-}coordinates are: X=1908000,Y=1010820% \newline% % -The voltage over the resistor should be measured over pad 2 and pad 1% +The current from the current source should go from pad 1 towards pad 2% +\newline% +% +The voltage over the resistor should be measured over pad 4 and pad 3% \newline% % \end{minipage} % -\subsubsection{Structure: METAL4\_10}% -\label{ssubsec:StructureMETAL410}% +\subsubsection{Structure: POLY\_V\_1}% +\label{ssubsec:StructurePOLYV1}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/METAL4_10.png}% +\includegraphics[width=80px]{/tmp/danube/POLY_V_1.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $59.0821\Omega$% +The target value of this resistor is $57.84k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 1.4771mV% +Expected measured voltage is 1.446V% \newline% % -The current from the current source should go from pad 3 towards pad 4% +The X/Y{-}coordinates are: X=0,Y=1170820% \newline% % -The voltage over the resistor should be measured over pad 2 and pad 1% +The current from the current source should go from pad 2 towards pad 3% +\newline% +% +The voltage over the resistor should be measured over pad 1 and pad 4% \newline% % \end{minipage} % -\subsubsection{Structure: METAL4\_20}% -\label{ssubsec:StructureMETAL420}% +\subsubsection{Structure: POLY\_H\_2}% +\label{ssubsec:StructurePOLYH2}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/METAL4_20.png}% +\includegraphics[width=80px]{/tmp/danube/POLY_H_2.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $29.9161\Omega$% +The target value of this resistor is $28.92k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 747.9018uV% +Expected measured voltage is 723.0mV% \newline% % -The current from the current source should go from pad 3 towards pad 4% +The X/Y{-}coordinates are: X=159000,Y=1170820% \newline% % -The voltage over the resistor should be measured over pad 2 and pad 1% +The current from the current source should go from pad 1 towards pad 2% +\newline% +% +The voltage over the resistor should be measured over pad 4 and pad 3% \newline% % \end{minipage} % -\subsection{Layer: metal5}% -\label{subsec:Layermetal5}% -\subsubsection{Structure: METAL5\_H\_1}% -\label{ssubsec:StructureMETAL5H1}% +\subsubsection{Structure: POLY\_V\_2}% +\label{ssubsec:StructurePOLYV2}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/METAL5_H_1.png}% +\includegraphics[width=80px]{/tmp/danube/POLY_V_2.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $1.4199k\Omega$% +The target value of this resistor is $28.92k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 35.4982mV% +Expected measured voltage is 723.0mV% +\newline% +% +The X/Y{-}coordinates are: X=318000,Y=1170820% \newline% % -The current from the current source should go from pad 1 towards pad 3% +The current from the current source should go from pad 2 towards pad 3% \newline% % -The voltage over the resistor should be measured over pad 2 and pad 4% +The voltage over the resistor should be measured over pad 1 and pad 4% \newline% % \end{minipage} % -\subsubsection{Structure: METAL5\_V\_1}% -\label{ssubsec:StructureMETAL5V1}% +\subsubsection{Structure: POLY\_H\_5}% +\label{ssubsec:StructurePOLYH5}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/METAL5_V_1.png}% +\includegraphics[width=80px]{/tmp/danube/POLY_H_5.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $1.4199k\Omega$% +The target value of this resistor is $11.568k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 35.4982mV% +Expected measured voltage is 289.2mV% +\newline% +% +The X/Y{-}coordinates are: X=477000,Y=1170820% \newline% % -The current from the current source should go from pad 4 towards pad 2% +The current from the current source should go from pad 1 towards pad 2% \newline% % -The voltage over the resistor should be measured over pad 1 and pad 3% +The voltage over the resistor should be measured over pad 4 and pad 3% \newline% % \end{minipage} % -\subsubsection{Structure: METAL5\_H\_2}% -\label{ssubsec:StructureMETAL5H2}% +\subsubsection{Structure: POLY\_V\_5}% +\label{ssubsec:StructurePOLYV5}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/METAL5_H_2.png}% +\includegraphics[width=80px]{/tmp/danube/POLY_V_5.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $469.0179\Omega$% +The target value of this resistor is $11.568k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 11.7254mV% +Expected measured voltage is 289.2mV% +\newline% +% +The X/Y{-}coordinates are: X=636000,Y=1170820% \newline% % -The current from the current source should go from pad 1 towards pad 3% +The current from the current source should go from pad 2 towards pad 3% \newline% % -The voltage over the resistor should be measured over pad 2 and pad 4% +The voltage over the resistor should be measured over pad 1 and pad 4% \newline% % \end{minipage} % -\subsubsection{Structure: METAL5\_V\_2}% -\label{ssubsec:StructureMETAL5V2}% +\subsubsection{Structure: POLY\_H\_10}% +\label{ssubsec:StructurePOLYH10}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/METAL5_V_2.png}% +\includegraphics[width=80px]{/tmp/danube/POLY_H_10.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $469.0179\Omega$% +The target value of this resistor is $5.784k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 11.7254mV% +Expected measured voltage is 144.6mV% +\newline% +% +The X/Y{-}coordinates are: X=795000,Y=1170820% \newline% % -The current from the current source should go from pad 4 towards pad 2% +The current from the current source should go from pad 1 towards pad 2% \newline% % -The voltage over the resistor should be measured over pad 1 and pad 3% +The voltage over the resistor should be measured over pad 4 and pad 3% \newline% % \end{minipage} % -\subsubsection{Structure: METAL5\_5}% -\label{ssubsec:StructureMETAL55}% +\subsubsection{Structure: POLY\_V\_10}% +\label{ssubsec:StructurePOLYV10}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/METAL5_5.png}% +\includegraphics[width=80px]{/tmp/danube/POLY_V_10.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $214.7857\Omega$% +The target value of this resistor is $5.784k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 5.3696mV% +Expected measured voltage is 144.6mV% \newline% % -The current from the current source should go from pad 3 towards pad 4% +The X/Y{-}coordinates are: X=954000,Y=1170820% \newline% % -The voltage over the resistor should be measured over pad 2 and pad 1% +The current from the current source should go from pad 2 towards pad 3% +\newline% +% +The voltage over the resistor should be measured over pad 1 and pad 4% \newline% % \end{minipage} % -\subsubsection{Structure: METAL5\_10}% -\label{ssubsec:StructureMETAL510}% +\subsubsection{Structure: POLY\_H\_20}% +\label{ssubsec:StructurePOLYH20}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/METAL5_10.png}% +\includegraphics[width=80px]{/tmp/danube/POLY_H_20.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $59.1286\Omega$% +The target value of this resistor is $2.892k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 1.4782mV% +Expected measured voltage is 72.3mV% \newline% % -The current from the current source should go from pad 3 towards pad 4% +The X/Y{-}coordinates are: X=1113000,Y=1170820% \newline% % -The voltage over the resistor should be measured over pad 2 and pad 1% +The current from the current source should go from pad 1 towards pad 2% +\newline% +% +The voltage over the resistor should be measured over pad 4 and pad 3% \newline% % \end{minipage} % -\subsubsection{Structure: METAL5\_20}% -\label{ssubsec:StructureMETAL520}% +\subsubsection{Structure: POLY\_V\_20}% +\label{ssubsec:StructurePOLYV20}% \begin{minipage}{0.5\textwidth}% \begin{figure}[H]% \centering% -\includegraphics[width=80px]{/tmp/danube/METAL5_20.png}% +\includegraphics[width=80px]{/tmp/danube/POLY_V_20.png}% \end{figure} % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this resistor is $29.9393\Omega$% +The target value of this resistor is $2.892k\Omega$% \newline% % Recommended measurement current is 25uA% \newline% % -Expected measured voltage is 748.4821uV% +Expected measured voltage is 72.3mV% \newline% % -The current from the current source should go from pad 3 towards pad 4% +The X/Y{-}coordinates are: X=1272000,Y=1170820% \newline% % -The voltage over the resistor should be measured over pad 2 and pad 1% +The current from the current source should go from pad 2 towards pad 3% +\newline% +% +The voltage over the resistor should be measured over pad 1 and pad 4% \newline% % \end{minipage} @@ -2776,7 +3456,9 @@ The voltage over the resistor should be measured over pad 2 and pad 1% \pagebreak% \section{Capacitors}% \label{sec:Capacitors}% -All the capacitors structures for the various available layer pairs, as defined in the configuration are being shown below. They are being measured with a 4 probe station, by applying a constant current over two of the probes.\newline% +All the capacitors structures for the various available layer pairs, as defined in the configuration are being shown below. \newline% + They are being measured with a 4 probe station, by applying an alternating current over two of the probes.\newline% + This way the AC voltage can be measured and from that the capacity can be calculated.\newline% This is called a Kelvin structure.% \subsection{Capacitor POLY/NWELL\_CAP}% \label{subsec:CapacitorPOLY/NWELLCAP}% @@ -2791,7 +3473,7 @@ This is called a Kelvin structure.% % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this capacitor is % +The X/Y{-}coordinates are: X=318000,Y=1650820% \newline% % \end{minipage} @@ -2810,7 +3492,7 @@ The target value of this capacitor is % % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this capacitor is % +The X/Y{-}coordinates are: X=477000,Y=1650820% \newline% % \end{minipage} @@ -2829,7 +3511,7 @@ The target value of this capacitor is % % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this capacitor is % +The X/Y{-}coordinates are: X=636000,Y=1650820% \newline% % \end{minipage} @@ -2848,7 +3530,7 @@ The target value of this capacitor is % % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this capacitor is % +The X/Y{-}coordinates are: X=795000,Y=1650820% \newline% % \end{minipage} @@ -2867,7 +3549,7 @@ The target value of this capacitor is % % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this capacitor is % +The X/Y{-}coordinates are: X=954000,Y=1650820% \newline% % \end{minipage} @@ -2886,7 +3568,7 @@ The target value of this capacitor is % % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this capacitor is % +The X/Y{-}coordinates are: X=1113000,Y=1650820% \newline% % \end{minipage} @@ -2905,7 +3587,89 @@ The target value of this capacitor is % % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this capacitor is % +The X/Y{-}coordinates are: X=1272000,Y=1650820% +\newline% +% +\end{minipage} + +% +\pagebreak% +\section{Transistors}% +\label{sec:Transistors}% +All the transistor structures for the various channel dimensions, as defined in the configuration are being shown below. \newline% + They are being measured with a 4 probe station\newline% +This is called a Kelvin structure.% +\subsection{Transistor P\_W3/L2}% +\label{subsec:TransistorPW3/L2}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/P_W3_L2.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The X/Y{-}coordinates are: X=1431000,Y=1650820% +\newline% +% +\end{minipage} + +% +\subsection{Transistor N\_W3/L2}% +\label{subsec:TransistorNW3/L2}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/N_W3_L2.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The X/Y{-}coordinates are: X=1590000,Y=1650820% +\newline% +% +\end{minipage} + +% +\subsection{Transistor P\_W4/L2}% +\label{subsec:TransistorPW4/L2}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/P_W4_L2.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The X/Y{-}coordinates are: X=1749000,Y=1650820% +\newline% +% +\end{minipage} + +% +\subsection{Transistor N\_W4/L2}% +\label{subsec:TransistorNW4/L2}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/N_W4_L2.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The X/Y{-}coordinates are: X=1908000,Y=1650820% \newline% % \end{minipage} diff --git a/tapeout/kacst-ls1u.csv b/tapeout/kacst-ls1u.csv new file mode 100644 index 0000000000000000000000000000000000000000..f7c61e42d13dfe8578c459762d433162929bedf5 --- /dev/null +++ b/tapeout/kacst-ls1u.csv @@ -0,0 +1,76 @@ +Wafer,Pattern ID,X,Y,Probe configuration,Type (resistor/cap/...),Test setup/input parameters,Expected results,Layers,Comments +Danube River(LS1U),METAL1_V_10,0,50000,Kelvin,Resistor,I-V,,, +Danube River(LS1U),METAL2_V_10,994000,50500,Kelvin,Resistor,I-V,,, +Danube River(LS1U),METAL1_H_10,1988000,457877,Kelvin,Resistor,I-V,,, +Danube River(LS1U),METAL2_H_10,3279877,457877,Kelvin,Resistor,I-V,,, +Danube River(LS1U),METAL1_V_5,0,1127877,Kelvin,Resistor,I-V,,, +Danube River(LS1U),METAL2_V_5,684000,1128377,Kelvin,Resistor,I-V,,, +Danube River(LS1U),METAL1_H_5,1368000,1363066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),METAL2_H_5,2202189,1363066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),METAL1_V_2,3035878,1271066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),METAL2_V_2,3533878,1271066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),METAL1_H_2,4031878,1369066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),METAL2_H_2,0,1743066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),NWELL_H_1,559075,1747066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),NWELL_V_1,928075,1747066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),NWELL_H_2,1297075,1747066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),NWELL_V_2,1666075,1747066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),NWELL_H_5,2035075,1747066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),NWELL_V_5,2404075,1747066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),NWELL_H_10,2773075,1747066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),NWELL_V_10,3142075,1747066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),PWELL_H_1,3511075,1747066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),PWELL_V_1,3880075,1747066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),PWELL_H_2,4249075,1747066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),PWELL_V_2,0,2117066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),PWELL_H_5,369000,2117066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),PWELL_V_5,738000,2117066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),PWELL_H_10,1107000,2117066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),PWELL_V_10,1476000,2117066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),NDIFFUSION_H_1,1845000,2117066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),NDIFFUSION_V_1,2214000,2117066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),NDIFFUSION_H_2,2583000,2117066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),NDIFFUSION_V_2,2952000,2117066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),NDIFFUSION_H_5,3321000,2117066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),NDIFFUSION_V_5,3690000,2117066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),NDIFFUSION_H_10,4059000,2117066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),NDIFFUSION_V_10,4428000,2117066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),PDIFFUSION_H_1,0,2487066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),PDIFFUSION_V_1,369000,2487066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),PDIFFUSION_H_2,738000,2487066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),PDIFFUSION_V_2,1107000,2487066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),PDIFFUSION_H_5,1476000,2487066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),PDIFFUSION_V_5,1845000,2487066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),PDIFFUSION_H_10,2214000,2487066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),PDIFFUSION_V_10,2583000,2487066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),POLY_H_1,2952000,2487066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),POLY_V_1,3321000,2487066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),POLY_H_2,3690000,2487066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),POLY_V_2,4059000,2487066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),POLY_H_5,4428000,2487066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),POLY_V_5,0,2857066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),POLY_H_10,369000,2857066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),POLY_V_10,738000,2857066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),METAL1_H_1,1107000,2857066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),METAL1_V_1,1476000,2857066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),METAL2_H_1,1845000,2857066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),METAL2_V_1,2214000,2857066,Kelvin,Resistor,I-V,,, +Danube River(LS1U),POLY/NWELL_CAP,2583000,2857066,Kelvin,Capacitor,C-V,,,Area=42487um^2 +Danube River(LS1U),POLY/PWELL_CAP,2952000,2857066,Kelvin,Capacitor,C-V,,,Area=42487um^2 +Danube River(LS1U),METAL1/NWELL_CAP,3321000,2857066,Kelvin,Capacitor,C-V,,,Area=41062um^2 +Danube River(LS1U),METAL1/PWELL_CAP,3690000,2857066,Kelvin,Capacitor,C-V,,,Area=41062um^2 +Danube River(LS1U),METAL2/METAL1_CAP,4059000,2857066,Kelvin,Capacitor,C-V,,,Area=44734um^2 +Danube River(LS1U),P_W3/L2,4428000,2857066,Kelvin,FET,IDS-VGS,,, +Danube River(LS1U),N_W3/L2,0,3227066,Kelvin,FET,IDS-VGS,,, +Danube River(LS1U),P_W4/L2,369000,3227066,Kelvin,FET,IDS-VGS,,, +Danube River(LS1U),N_W4/L2,738000,3227066,Kelvin,FET,IDS-VGS,,, +Danube River(LS1U),P_W5/L2,1107000,3227066,Kelvin,FET,IDS-VGS,,, +Danube River(LS1U),N_W5/L2,1476000,3227066,Kelvin,FET,IDS-VGS,,, +Danube River(LS1U),P_W5/L3,1845000,3227066,Kelvin,FET,IDS-VGS,,, +Danube River(LS1U),N_W5/L3,2214000,3227066,Kelvin,FET,IDS-VGS,,, +Danube River(LS1U),P_W5/L4,2583000,3227066,Kelvin,FET,IDS-VGS,,, +Danube River(LS1U),N_W5/L4,2952000,3227066,Kelvin,FET,IDS-VGS,,, +Danube River(LS1U),P_W5/L5,3321000,3227066,Kelvin,FET,IDS-VGS,,, +Danube River(LS1U),N_W5/L5,3690000,3227066,Kelvin,FET,IDS-VGS,,, +Danube River(LS1U),P_W10/L3,4059000,3227066,Kelvin,FET,IDS-VGS,,, +Danube River(LS1U),N_W10/L3,4428000,3227066,Kelvin,FET,IDS-VGS,,, diff --git a/tapeout/kacst-ls1u.gds b/tapeout/kacst-ls1u.gds index 4936282d4a0e931a8a2f6a4fb53febd8b217c524..41943b1cb716414fdf4e0eda41de57e9b6d8397b 100644 Binary files a/tapeout/kacst-ls1u.gds and b/tapeout/kacst-ls1u.gds differ diff --git a/tapeout/kacst-ls1u.pdf b/tapeout/kacst-ls1u.pdf index 24a7b4db0c43588e2b8c939e11274f1d34c5c96e..ef3dc89ef3c81d4ff04e1a403358ef5703aca24b 100644 Binary files a/tapeout/kacst-ls1u.pdf and b/tapeout/kacst-ls1u.pdf differ diff --git a/tapeout/kacst-ls1u.tex b/tapeout/kacst-ls1u.tex index 985c759cbc0a548bb852ed329e2768e25245e392..5b5c984a00781b846bcf2901b242820e19660936 100644 --- a/tapeout/kacst-ls1u.tex +++ b/tapeout/kacst-ls1u.tex @@ -7,23 +7,1956 @@ \usepackage{geometry}% \geometry{tmargin=0.5in,lmargin=0.5in,bmargin=0.5in,rmargin=0.5in}% \usepackage{float}% -\usepackage{ragged2e}% \usepackage{graphicx}% +\usepackage{ragged2e}% +% +\title{Danube River Test Waver}% +\author{by LibreSilicon}% +% +\begin{document}% +\normalsize% +\maketitle% +This is the automatically generated documentation and guide line for the test structures in the GDSII file, generated by this script,for the wafer titled Danube River(LS1U)\newline% +% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=320px]{/tmp/danube/Danube_River(LS1U).png}% +\end{figure} + +% +The below structures have been generated assuming basic flags and settings for the pad and size from "configs/kacst{-}ls1u.cfg" for characterizing the process "LS1U" (which can be found in librepdk/technologies).\newline% +Those values need to be verified by checking under the microscope, whether the defects have gone away and measuring what the difference between predicted values and measured values is% +\pagebreak% +\section{Resistors}% +\label{sec:Resistors}% +All the resistor structures for the various available layers, as defined in the configuration are being shown below. They are being measured with a 4 probe station, by applying a constant current over two of the probes, and then measuring the voltage over the other two.\newline% +This is called a Kelvin structure.% +\subsection{Layer: metal1}% +\label{subsec:Layermetal1}% +\subsubsection{Structure: METAL1\_V\_10}% +\label{ssubsec:StructureMETAL1V10}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL1_V_10.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $50\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 1.25mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=50000% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL1\_H\_10}% +\label{ssubsec:StructureMETAL1H10}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL1_H_10.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $50\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 1.25mV% +\newline% +% +The X/Y{-}coordinates are: X=1988000,Y=457877% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL1\_V\_5}% +\label{ssubsec:StructureMETAL1V5}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL1_V_5.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $50\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 1.25mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=1127877% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL1\_H\_5}% +\label{ssubsec:StructureMETAL1H5}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL1_H_5.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $50\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 1.25mV% +\newline% +% +The X/Y{-}coordinates are: X=1368000,Y=1363066% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL1\_V\_2}% +\label{ssubsec:StructureMETAL1V2}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL1_V_2.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $50\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 1.25mV% +\newline% +% +The X/Y{-}coordinates are: X=3035878,Y=1271066% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL1\_H\_2}% +\label{ssubsec:StructureMETAL1H2}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL1_H_2.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $50\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 1.25mV% +\newline% +% +The X/Y{-}coordinates are: X=4031878,Y=1369066% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL1\_H\_1}% +\label{ssubsec:StructureMETAL1H1}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL1_H_1.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $50\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 1.25mV% +\newline% +% +The X/Y{-}coordinates are: X=1107000,Y=2857066% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL1\_V\_1}% +\label{ssubsec:StructureMETAL1V1}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL1_V_1.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $50\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 1.25mV% +\newline% +% +The X/Y{-}coordinates are: X=1476000,Y=2857066% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsection{Layer: metal2}% +\label{subsec:Layermetal2}% +\subsubsection{Structure: METAL2\_V\_10}% +\label{ssubsec:StructureMETAL2V10}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL2_V_10.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $50\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 1.25mV% +\newline% +% +The X/Y{-}coordinates are: X=994000,Y=50500% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL2\_H\_10}% +\label{ssubsec:StructureMETAL2H10}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL2_H_10.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $50\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 1.25mV% +\newline% +% +The X/Y{-}coordinates are: X=3279877,Y=457877% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL2\_V\_5}% +\label{ssubsec:StructureMETAL2V5}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL2_V_5.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $50\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 1.25mV% +\newline% +% +The X/Y{-}coordinates are: X=684000,Y=1128377% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL2\_H\_5}% +\label{ssubsec:StructureMETAL2H5}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL2_H_5.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $50\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 1.25mV% +\newline% +% +The X/Y{-}coordinates are: X=2202189,Y=1363066% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL2\_V\_2}% +\label{ssubsec:StructureMETAL2V2}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL2_V_2.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $50\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 1.25mV% +\newline% +% +The X/Y{-}coordinates are: X=3533878,Y=1271066% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL2\_H\_2}% +\label{ssubsec:StructureMETAL2H2}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL2_H_2.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $50\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 1.25mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=1743066% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL2\_H\_1}% +\label{ssubsec:StructureMETAL2H1}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL2_H_1.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $50\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 1.25mV% +\newline% +% +The X/Y{-}coordinates are: X=1845000,Y=2857066% +\newline% +% +The current from the current source should go from pad 1 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: METAL2\_V\_1}% +\label{ssubsec:StructureMETAL2V1}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/METAL2_V_1.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $50\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 1.25mV% +\newline% +% +The X/Y{-}coordinates are: X=2214000,Y=2857066% +\newline% +% +The current from the current source should go from pad 3 towards pad 4% +\newline% +% +The voltage over the resistor should be measured over pad 2 and pad 1% +\newline% +% +\end{minipage} + +% +\subsection{Layer: nwell}% +\label{subsec:Layernwell}% +\subsubsection{Structure: NWELL\_H\_1}% +\label{ssubsec:StructureNWELLH1}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/NWELL_H_1.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $2.0k\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 50.0mV% +\newline% +% +The X/Y{-}coordinates are: X=559075,Y=1747066% +\newline% +% +The current from the current source should go from pad 1 towards pad 2% +\newline% +% +The voltage over the resistor should be measured over pad 4 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: NWELL\_V\_1}% +\label{ssubsec:StructureNWELLV1}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/NWELL_V_1.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $2.0k\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 50.0mV% +\newline% +% +The X/Y{-}coordinates are: X=928075,Y=1747066% +\newline% +% +The current from the current source should go from pad 2 towards pad 3% +\newline% +% +The voltage over the resistor should be measured over pad 1 and pad 4% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: NWELL\_H\_2}% +\label{ssubsec:StructureNWELLH2}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/NWELL_H_2.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $1000.0\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 25.0mV% +\newline% +% +The X/Y{-}coordinates are: X=1297075,Y=1747066% +\newline% +% +The current from the current source should go from pad 1 towards pad 2% +\newline% +% +The voltage over the resistor should be measured over pad 4 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: NWELL\_V\_2}% +\label{ssubsec:StructureNWELLV2}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/NWELL_V_2.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $1000.0\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 25.0mV% +\newline% +% +The X/Y{-}coordinates are: X=1666075,Y=1747066% +\newline% +% +The current from the current source should go from pad 2 towards pad 3% +\newline% +% +The voltage over the resistor should be measured over pad 1 and pad 4% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: NWELL\_H\_5}% +\label{ssubsec:StructureNWELLH5}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/NWELL_H_5.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $400.0\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 10.0mV% +\newline% +% +The X/Y{-}coordinates are: X=2035075,Y=1747066% +\newline% +% +The current from the current source should go from pad 1 towards pad 2% +\newline% +% +The voltage over the resistor should be measured over pad 4 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: NWELL\_V\_5}% +\label{ssubsec:StructureNWELLV5}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/NWELL_V_5.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $400.0\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 10.0mV% +\newline% +% +The X/Y{-}coordinates are: X=2404075,Y=1747066% +\newline% +% +The current from the current source should go from pad 2 towards pad 3% +\newline% +% +The voltage over the resistor should be measured over pad 1 and pad 4% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: NWELL\_H\_10}% +\label{ssubsec:StructureNWELLH10}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/NWELL_H_10.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $200.0\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 5.0mV% +\newline% +% +The X/Y{-}coordinates are: X=2773075,Y=1747066% +\newline% +% +The current from the current source should go from pad 1 towards pad 2% +\newline% +% +The voltage over the resistor should be measured over pad 4 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: NWELL\_V\_10}% +\label{ssubsec:StructureNWELLV10}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/NWELL_V_10.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $200.0\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 5.0mV% +\newline% +% +The X/Y{-}coordinates are: X=3142075,Y=1747066% +\newline% +% +The current from the current source should go from pad 2 towards pad 3% +\newline% +% +The voltage over the resistor should be measured over pad 1 and pad 4% +\newline% +% +\end{minipage} + +% +\subsection{Layer: pwell}% +\label{subsec:Layerpwell}% +\subsubsection{Structure: PWELL\_H\_1}% +\label{ssubsec:StructurePWELLH1}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/PWELL_H_1.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $2.0k\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 50.0mV% +\newline% +% +The X/Y{-}coordinates are: X=3511075,Y=1747066% +\newline% +% +The current from the current source should go from pad 1 towards pad 2% +\newline% +% +The voltage over the resistor should be measured over pad 4 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: PWELL\_V\_1}% +\label{ssubsec:StructurePWELLV1}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/PWELL_V_1.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $2.0k\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 50.0mV% +\newline% +% +The X/Y{-}coordinates are: X=3880075,Y=1747066% +\newline% +% +The current from the current source should go from pad 2 towards pad 3% +\newline% +% +The voltage over the resistor should be measured over pad 1 and pad 4% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: PWELL\_H\_2}% +\label{ssubsec:StructurePWELLH2}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/PWELL_H_2.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $1000.0\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 25.0mV% +\newline% +% +The X/Y{-}coordinates are: X=4249075,Y=1747066% +\newline% +% +The current from the current source should go from pad 1 towards pad 2% +\newline% +% +The voltage over the resistor should be measured over pad 4 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: PWELL\_V\_2}% +\label{ssubsec:StructurePWELLV2}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/PWELL_V_2.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $1000.0\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 25.0mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=2117066% +\newline% +% +The current from the current source should go from pad 2 towards pad 3% +\newline% +% +The voltage over the resistor should be measured over pad 1 and pad 4% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: PWELL\_H\_5}% +\label{ssubsec:StructurePWELLH5}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/PWELL_H_5.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $400.0\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 10.0mV% +\newline% +% +The X/Y{-}coordinates are: X=369000,Y=2117066% +\newline% +% +The current from the current source should go from pad 1 towards pad 2% +\newline% +% +The voltage over the resistor should be measured over pad 4 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: PWELL\_V\_5}% +\label{ssubsec:StructurePWELLV5}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/PWELL_V_5.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $400.0\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 10.0mV% +\newline% +% +The X/Y{-}coordinates are: X=738000,Y=2117066% +\newline% +% +The current from the current source should go from pad 2 towards pad 3% +\newline% +% +The voltage over the resistor should be measured over pad 1 and pad 4% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: PWELL\_H\_10}% +\label{ssubsec:StructurePWELLH10}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/PWELL_H_10.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $200.0\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 5.0mV% +\newline% +% +The X/Y{-}coordinates are: X=1107000,Y=2117066% +\newline% +% +The current from the current source should go from pad 1 towards pad 2% +\newline% +% +The voltage over the resistor should be measured over pad 4 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: PWELL\_V\_10}% +\label{ssubsec:StructurePWELLV10}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/PWELL_V_10.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $200.0\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 5.0mV% +\newline% +% +The X/Y{-}coordinates are: X=1476000,Y=2117066% +\newline% +% +The current from the current source should go from pad 2 towards pad 3% +\newline% +% +The voltage over the resistor should be measured over pad 1 and pad 4% +\newline% +% +\end{minipage} + +% +\subsection{Layer: ndiffusion}% +\label{subsec:Layerndiffusion}% +\subsubsection{Structure: NDIFFUSION\_H\_1}% +\label{ssubsec:StructureNDIFFUSIONH1}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/NDIFFUSION_H_1.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $1000.0\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 25.0mV% +\newline% +% +The X/Y{-}coordinates are: X=1845000,Y=2117066% +\newline% +% +The current from the current source should go from pad 1 towards pad 2% +\newline% +% +The voltage over the resistor should be measured over pad 4 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: NDIFFUSION\_V\_1}% +\label{ssubsec:StructureNDIFFUSIONV1}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/NDIFFUSION_V_1.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $1000.0\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 25.0mV% +\newline% +% +The X/Y{-}coordinates are: X=2214000,Y=2117066% +\newline% +% +The current from the current source should go from pad 2 towards pad 3% +\newline% +% +The voltage over the resistor should be measured over pad 1 and pad 4% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: NDIFFUSION\_H\_2}% +\label{ssubsec:StructureNDIFFUSIONH2}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/NDIFFUSION_H_2.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $500.0\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 12.5mV% +\newline% +% +The X/Y{-}coordinates are: X=2583000,Y=2117066% +\newline% +% +The current from the current source should go from pad 1 towards pad 2% +\newline% +% +The voltage over the resistor should be measured over pad 4 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: NDIFFUSION\_V\_2}% +\label{ssubsec:StructureNDIFFUSIONV2}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/NDIFFUSION_V_2.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $500.0\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 12.5mV% +\newline% +% +The X/Y{-}coordinates are: X=2952000,Y=2117066% +\newline% +% +The current from the current source should go from pad 2 towards pad 3% +\newline% +% +The voltage over the resistor should be measured over pad 1 and pad 4% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: NDIFFUSION\_H\_5}% +\label{ssubsec:StructureNDIFFUSIONH5}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/NDIFFUSION_H_5.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $200.0\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 5.0mV% +\newline% +% +The X/Y{-}coordinates are: X=3321000,Y=2117066% +\newline% +% +The current from the current source should go from pad 1 towards pad 2% +\newline% +% +The voltage over the resistor should be measured over pad 4 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: NDIFFUSION\_V\_5}% +\label{ssubsec:StructureNDIFFUSIONV5}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/NDIFFUSION_V_5.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $200.0\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 5.0mV% +\newline% +% +The X/Y{-}coordinates are: X=3690000,Y=2117066% +\newline% +% +The current from the current source should go from pad 2 towards pad 3% +\newline% +% +The voltage over the resistor should be measured over pad 1 and pad 4% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: NDIFFUSION\_H\_10}% +\label{ssubsec:StructureNDIFFUSIONH10}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/NDIFFUSION_H_10.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100.0\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=4059000,Y=2117066% +\newline% +% +The current from the current source should go from pad 1 towards pad 2% +\newline% +% +The voltage over the resistor should be measured over pad 4 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: NDIFFUSION\_V\_10}% +\label{ssubsec:StructureNDIFFUSIONV10}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/NDIFFUSION_V_10.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100.0\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=4428000,Y=2117066% +\newline% +% +The current from the current source should go from pad 2 towards pad 3% +\newline% +% +The voltage over the resistor should be measured over pad 1 and pad 4% +\newline% +% +\end{minipage} + +% +\subsection{Layer: pdiffusion}% +\label{subsec:Layerpdiffusion}% +\subsubsection{Structure: PDIFFUSION\_H\_1}% +\label{ssubsec:StructurePDIFFUSIONH1}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/PDIFFUSION_H_1.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $1000.0\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 25.0mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=2487066% +\newline% +% +The current from the current source should go from pad 1 towards pad 2% +\newline% +% +The voltage over the resistor should be measured over pad 4 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: PDIFFUSION\_V\_1}% +\label{ssubsec:StructurePDIFFUSIONV1}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/PDIFFUSION_V_1.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $1000.0\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 25.0mV% +\newline% +% +The X/Y{-}coordinates are: X=369000,Y=2487066% +\newline% +% +The current from the current source should go from pad 2 towards pad 3% +\newline% +% +The voltage over the resistor should be measured over pad 1 and pad 4% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: PDIFFUSION\_H\_2}% +\label{ssubsec:StructurePDIFFUSIONH2}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/PDIFFUSION_H_2.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $500.0\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 12.5mV% +\newline% +% +The X/Y{-}coordinates are: X=738000,Y=2487066% +\newline% +% +The current from the current source should go from pad 1 towards pad 2% +\newline% +% +The voltage over the resistor should be measured over pad 4 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: PDIFFUSION\_V\_2}% +\label{ssubsec:StructurePDIFFUSIONV2}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/PDIFFUSION_V_2.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $500.0\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 12.5mV% +\newline% +% +The X/Y{-}coordinates are: X=1107000,Y=2487066% +\newline% +% +The current from the current source should go from pad 2 towards pad 3% +\newline% +% +The voltage over the resistor should be measured over pad 1 and pad 4% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: PDIFFUSION\_H\_5}% +\label{ssubsec:StructurePDIFFUSIONH5}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/PDIFFUSION_H_5.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $200.0\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 5.0mV% +\newline% +% +The X/Y{-}coordinates are: X=1476000,Y=2487066% +\newline% +% +The current from the current source should go from pad 1 towards pad 2% +\newline% +% +The voltage over the resistor should be measured over pad 4 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: PDIFFUSION\_V\_5}% +\label{ssubsec:StructurePDIFFUSIONV5}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/PDIFFUSION_V_5.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $200.0\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 5.0mV% +\newline% +% +The X/Y{-}coordinates are: X=1845000,Y=2487066% +\newline% +% +The current from the current source should go from pad 2 towards pad 3% +\newline% +% +The voltage over the resistor should be measured over pad 1 and pad 4% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: PDIFFUSION\_H\_10}% +\label{ssubsec:StructurePDIFFUSIONH10}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/PDIFFUSION_H_10.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100.0\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=2214000,Y=2487066% +\newline% +% +The current from the current source should go from pad 1 towards pad 2% +\newline% +% +The voltage over the resistor should be measured over pad 4 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: PDIFFUSION\_V\_10}% +\label{ssubsec:StructurePDIFFUSIONV10}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/PDIFFUSION_V_10.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100.0\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5mV% +\newline% +% +The X/Y{-}coordinates are: X=2583000,Y=2487066% +\newline% +% +The current from the current source should go from pad 2 towards pad 3% +\newline% +% +The voltage over the resistor should be measured over pad 1 and pad 4% +\newline% +% +\end{minipage} + +% +\subsection{Layer: poly}% +\label{subsec:Layerpoly}% +\subsubsection{Structure: POLY\_H\_1}% +\label{ssubsec:StructurePOLYH1}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/POLY_H_1.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100.0k\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5V% +\newline% +% +The X/Y{-}coordinates are: X=2952000,Y=2487066% +\newline% +% +The current from the current source should go from pad 1 towards pad 2% +\newline% +% +The voltage over the resistor should be measured over pad 4 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: POLY\_V\_1}% +\label{ssubsec:StructurePOLYV1}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/POLY_V_1.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $100.0k\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 2.5V% +\newline% +% +The X/Y{-}coordinates are: X=3321000,Y=2487066% +\newline% +% +The current from the current source should go from pad 2 towards pad 3% +\newline% +% +The voltage over the resistor should be measured over pad 1 and pad 4% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: POLY\_H\_2}% +\label{ssubsec:StructurePOLYH2}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/POLY_H_2.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $50.0k\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 1.25V% +\newline% +% +The X/Y{-}coordinates are: X=3690000,Y=2487066% +\newline% +% +The current from the current source should go from pad 1 towards pad 2% +\newline% +% +The voltage over the resistor should be measured over pad 4 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: POLY\_V\_2}% +\label{ssubsec:StructurePOLYV2}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/POLY_V_2.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $50.0k\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 1.25V% +\newline% +% +The X/Y{-}coordinates are: X=4059000,Y=2487066% +\newline% +% +The current from the current source should go from pad 2 towards pad 3% +\newline% +% +The voltage over the resistor should be measured over pad 1 and pad 4% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: POLY\_H\_5}% +\label{ssubsec:StructurePOLYH5}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/POLY_H_5.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $20.0k\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 500.0mV% +\newline% +% +The X/Y{-}coordinates are: X=4428000,Y=2487066% +\newline% +% +The current from the current source should go from pad 1 towards pad 2% +\newline% +% +The voltage over the resistor should be measured over pad 4 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: POLY\_V\_5}% +\label{ssubsec:StructurePOLYV5}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/POLY_V_5.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $20.0k\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 500.0mV% +\newline% +% +The X/Y{-}coordinates are: X=0,Y=2857066% +\newline% +% +The current from the current source should go from pad 2 towards pad 3% +\newline% +% +The voltage over the resistor should be measured over pad 1 and pad 4% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: POLY\_H\_10}% +\label{ssubsec:StructurePOLYH10}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/POLY_H_10.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $10.0k\Omega$% +\newline% % -\title{Danube River Test Waver}% -\author{by LibreSilicon}% +Recommended measurement current is 25uA% +\newline% % -\begin{document}% -\normalsize% -\maketitle% -This is the automatically generated documentation and guide line for the test structures in the GDSII file, generated by this script.\newline% +Expected measured voltage is 250.0mV% +\newline% % -This is phase two of the reverse engineering/verification of the manufacturing process.\newline% -The structures have been generated assuming basic flags and settings for the pad and size from "configs/kacst{-}ls1u.cfg" as well as variables defined in "configs/ls1u.py".\newline% -Those values need to be verified by checking under the microscope, whether the defects have gone away and measuring what the difference between predicted values and measured values is% +The X/Y{-}coordinates are: X=369000,Y=2857066% +\newline% +% +The current from the current source should go from pad 1 towards pad 2% +\newline% +% +The voltage over the resistor should be measured over pad 4 and pad 3% +\newline% +% +\end{minipage} + +% +\subsubsection{Structure: POLY\_V\_10}% +\label{ssubsec:StructurePOLYV10}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/POLY_V_10.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The target value of this resistor is $10.0k\Omega$% +\newline% +% +Recommended measurement current is 25uA% +\newline% +% +Expected measured voltage is 250.0mV% +\newline% +% +The X/Y{-}coordinates are: X=738000,Y=2857066% +\newline% +% +The current from the current source should go from pad 2 towards pad 3% +\newline% +% +The voltage over the resistor should be measured over pad 1 and pad 4% +\newline% +% +\end{minipage} + +% +\pagebreak% \section{Capacitors}% \label{sec:Capacitors}% -All the capacitors structures for the various available layer pairs, as defined in the configuration are being shown below. They are being measured with a 4 probe station, by applying a constant current over two of the probes.\newline% +All the capacitors structures for the various available layer pairs, as defined in the configuration are being shown below. \newline% + They are being measured with a 4 probe station, by applying an alternating current over two of the probes.\newline% + This way the AC voltage can be measured and from that the capacity can be calculated.\newline% This is called a Kelvin structure.% \subsection{Capacitor POLY/NWELL\_CAP}% \label{subsec:CapacitorPOLY/NWELLCAP}% @@ -38,7 +1971,7 @@ This is called a Kelvin structure.% % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this capacitor is % +The X/Y{-}coordinates are: X=2583000,Y=2857066% \newline% % \end{minipage} @@ -57,7 +1990,7 @@ The target value of this capacitor is % % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this capacitor is % +The X/Y{-}coordinates are: X=2952000,Y=2857066% \newline% % \end{minipage} @@ -76,7 +2009,7 @@ The target value of this capacitor is % % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this capacitor is % +The X/Y{-}coordinates are: X=3321000,Y=2857066% \newline% % \end{minipage} @@ -95,7 +2028,7 @@ The target value of this capacitor is % % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this capacitor is % +The X/Y{-}coordinates are: X=3690000,Y=2857066% \newline% % \end{minipage} @@ -114,7 +2047,279 @@ The target value of this capacitor is % % \end{minipage}% \begin{minipage}{0.5\textwidth}% -The target value of this capacitor is % +The X/Y{-}coordinates are: X=4059000,Y=2857066% +\newline% +% +\end{minipage} + +% +\pagebreak% +\section{Transistors}% +\label{sec:Transistors}% +All the transistor structures for the various channel dimensions, as defined in the configuration are being shown below. \newline% + They are being measured with a 4 probe station\newline% +This is called a Kelvin structure.% +\subsection{Transistor P\_W3/L2}% +\label{subsec:TransistorPW3/L2}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/P_W3_L2.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The X/Y{-}coordinates are: X=4428000,Y=2857066% +\newline% +% +\end{minipage} + +% +\subsection{Transistor N\_W3/L2}% +\label{subsec:TransistorNW3/L2}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/N_W3_L2.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The X/Y{-}coordinates are: X=0,Y=3227066% +\newline% +% +\end{minipage} + +% +\subsection{Transistor P\_W4/L2}% +\label{subsec:TransistorPW4/L2}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/P_W4_L2.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The X/Y{-}coordinates are: X=369000,Y=3227066% +\newline% +% +\end{minipage} + +% +\subsection{Transistor N\_W4/L2}% +\label{subsec:TransistorNW4/L2}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/N_W4_L2.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The X/Y{-}coordinates are: X=738000,Y=3227066% +\newline% +% +\end{minipage} + +% +\subsection{Transistor P\_W5/L2}% +\label{subsec:TransistorPW5/L2}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/P_W5_L2.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The X/Y{-}coordinates are: X=1107000,Y=3227066% +\newline% +% +\end{minipage} + +% +\subsection{Transistor N\_W5/L2}% +\label{subsec:TransistorNW5/L2}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/N_W5_L2.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The X/Y{-}coordinates are: X=1476000,Y=3227066% +\newline% +% +\end{minipage} + +% +\subsection{Transistor P\_W5/L3}% +\label{subsec:TransistorPW5/L3}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/P_W5_L3.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The X/Y{-}coordinates are: X=1845000,Y=3227066% +\newline% +% +\end{minipage} + +% +\subsection{Transistor N\_W5/L3}% +\label{subsec:TransistorNW5/L3}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/N_W5_L3.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The X/Y{-}coordinates are: X=2214000,Y=3227066% +\newline% +% +\end{minipage} + +% +\subsection{Transistor P\_W5/L4}% +\label{subsec:TransistorPW5/L4}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/P_W5_L4.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The X/Y{-}coordinates are: X=2583000,Y=3227066% +\newline% +% +\end{minipage} + +% +\subsection{Transistor N\_W5/L4}% +\label{subsec:TransistorNW5/L4}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/N_W5_L4.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The X/Y{-}coordinates are: X=2952000,Y=3227066% +\newline% +% +\end{minipage} + +% +\subsection{Transistor P\_W5/L5}% +\label{subsec:TransistorPW5/L5}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/P_W5_L5.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The X/Y{-}coordinates are: X=3321000,Y=3227066% +\newline% +% +\end{minipage} + +% +\subsection{Transistor N\_W5/L5}% +\label{subsec:TransistorNW5/L5}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/N_W5_L5.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The X/Y{-}coordinates are: X=3690000,Y=3227066% +\newline% +% +\end{minipage} + +% +\subsection{Transistor P\_W10/L3}% +\label{subsec:TransistorPW10/L3}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/P_W10_L3.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The X/Y{-}coordinates are: X=4059000,Y=3227066% +\newline% +% +\end{minipage} + +% +\subsection{Transistor N\_W10/L3}% +\label{subsec:TransistorNW10/L3}% +\begin{minipage}{0.5\textwidth}% + + +\begin{figure}[H]% +\centering% +\includegraphics[width=80px]{/tmp/danube/N_W10_L3.png}% +\end{figure} + +% +\end{minipage}% +\begin{minipage}{0.5\textwidth}% +The X/Y{-}coordinates are: X=4428000,Y=3227066% \newline% % \end{minipage}